In this paper, a new process based on QuadriWave Lateral Shearing Interferometry (QWLSI) is introduced. By combining a set of interferograms for various positions of the diffractive optics it provides high-definition quantitative phase images overcoming the definition limitation of conventional QWLSI systems. We implemented this process with sCMOS camera and obtain 5.5MPixels phase images with a 6.5µm-pixel resolution with a phase sensitivity of 0.5nm.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription