Abstract

In this paper, a new process based on QuadriWave Lateral Shearing Interferometry (QWLSI) is introduced. By combining a set of interferograms for various positions of the diffractive optics it provides high-definition quantitative phase images overcoming the definition limitation of conventional QWLSI systems. We implemented this process with sCMOS camera and obtain 5.5MPixels phase images with a 6.5µm-pixel resolution with a phase sensitivity of 0.5nm.

© 2019 The Author(s)

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