Abstract

A digital scanning laser microscope system, capable of scanning a specimen at high speed, has been developed. The system can display a reflected, transmitted, or photoinduced mode of the scanning laser micrograph size 512 × 512 pixels on a conventional TV monitor within 10 sec. Features of the system are: (1) object scanning in the X direction is achieved by a vibrating stage driven by sinusoidal oscillation of a voice coil across a fixed laser spot, and precise sample positions on a specimen can be determined by using a interference comparator technique for length measurement; and (2) the whole system is controlled by a digital electronic technique. Use of a digital frame memory enabled us to avoid the problem of synchronizing the hardware during data acquisition and data display and makes it possible to ignore any effect of irregular movement of the vibrating stage. In this paper, design concept and architecture of the developed system are described, and some experimental results are represented.

© 1985 Optical Society of America

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