Abstract

A prototype of a 248-nm optical projection printer based on the unit magnification Dyson configuration was designed and built [ J. Vac. Sci. Technol. 9, 3108 ( 1991)]. Iterative computer methods were used to optimize the geometry of the system to provide minimum aberrations over a given field. Here we present an alternative optimization procedure and use it to design a 193-nm system. This new procedure yields useful insights into the design process and allows us to see why modifications in geometry are required for optimum performance. An understanding of the trade-offs involved in the optimization allows us to suggest and evaluate future design changes.

© 1992 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Analytic optimization for holographic optical elements

E. Hasman and A. A. Friesem
J. Opt. Soc. Am. A 6(1) 62-72 (1989)

Design of Dyson imaging spectrometers based on the Rowland circle concept

Carlos Montero-Orille, Xesús Prieto-Blanco, Héctor González-Núñez, and Raúl de la Fuente
Appl. Opt. 50(35) 6487-6494 (2011)

Two-wavelength anastigmatic Dyson imaging spectrometers

Carlos Montero-Orille, Xesús Prieto-Blanco, Héctor González-Núñez, and Raúl de la Fuente
Opt. Lett. 35(14) 2379-2381 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (28)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription