Abstract

Diamond films, deposited on silicon substrates through microwave-assisted chemical vapor deposition, have been polished with a 500-eV beam of oxygen ions through the use of a planarizing layer. The films’ surface roughness, in excess of 1 μm (rms) and 6 μm (peak to valley), was reduced to 35 nm (rms) and 217 nm (peak to valley). The polished films retained their diamond character and surface contamination was negligible. With this polishing process, optical applications of diamond films in the near infrared region are realizable.

© 1992 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Oxygen–ion beam polishing of a 5-cm-diameter diamond film

Bertrand G. Bovard, Tianji Zhao, and H. Angus Macleod
Appl. Opt. 31(13) 2366-2369 (1992)

Efficacy of ion polishing optical surfaces

R. A. House, J. R. Bettis, and A. H. Guenther
Appl. Opt. 16(6) 1486-1488 (1977)

Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics

N. I. Chkhalo, S. A. Churin, M. S. Mikhaylenko, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, and M. V. Zorina
Appl. Opt. 55(6) 1249-1256 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription