Abstract

A 5-cm diameter, 1-μm (peak to valley) rough diamond film has been polished to optical quality by an oxygen–ion beam. The rms and peak-to-valley roughness values of the polished surface have been lowered to 5.5 and 55.4 nm, respectively. Reactive ion beam polishing provides a low-temperature (140°C), noncontact, and precisely controllable approach to improving the surface quality of diamond films. This progress is essential to the use of diamond coatings in optical applications.

© 1992 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ion beam planarization of diamond turned surfaces with various roughness profiles

Yaguo Li, Hideo Takino, and Frank Frost
Opt. Express 25(7) 7828-7838 (2017)

Potential material for fabricating optical mirrors: polished diamond coated silicon carbide

Xinchang Wang, Chengchuan Wang, Xiaotian Shen, and Fanghong Sun
Appl. Opt. 56(14) 4113-4122 (2017)

Modifications of ion beam sputtered tantala thin films by secondary argon and oxygen bombardment

Le Yang, Emmett Randel, Gabriele Vajente, Alena Ananyeva, Eric Gustafson, Ashot Markosyan, Riccardo Bassiri, Martin Fejer, and Carmen Menoni
Appl. Opt. 59(5) A150-A154 (2020)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription