Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique

Young-Sik Ghim; Angela Davies

doi:10.1364/AO.51.001922

Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique

Young-Sik Ghim and Angela Davies

Applied Optics
Vol. 51,
Issue 12,
pp. 1922-1928
(2012)
•https://doi.org/10.1364/AO.51.001922

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Young-Sik Ghim and Angela Davies, "Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique," Appl. Opt. 51, 1922-1928 (2012)

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Related Topics
Table of Contents Category
- Instrumentation, Measurement, and Metrology
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Interferometry (120.3180)
- Metrology (120.3940)
- Nondestructive testing (120.4290)
- Optical instruments (120.4640)
- Phase measurement (120.5050)

About this Article
History
- Original Manuscript: December 13, 2011
- Revised Manuscript: February 8, 2012
- Manuscript Accepted: February 26, 2012
- Published: April 11, 2012

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Abstract

White-light interferometry uses a white-light source with a short coherent length that provides a narrowly localized interferogram that is used to measure three-dimensional surface profiles with possible large step heights without $2 π$ -ambiguity. Combining coherence and phase information improves the vertical resolution. But, inconsistencies between phase and coherence occur at highly curved surfaces such as spherical and tilted surfaces, and these inconsistencies often cause what are termed ghost steps in the measurement result. In this paper, we describe a modified version of white-light interferometry for eliminating these ghost steps and improving the accuracy of white-light interferometry. Our proposed technique is verified by measuring several test samples.

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	$Δ h'$	Fringe Order	New Height $h_{1}^{'}$
0	$\pm \frac{λ_{2}}{2} l$	$m_{1} \to m_{1}$	$h_{1}^{'} = h_{1}$
1	$(\frac{λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} - 1$	$h_{1}^{'} = h_{1} - \frac{λ_{1}}{2}$
1	$- (\frac{λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} + 1$	$h_{1}^{'} = h_{1} + \frac{λ_{1}}{2}$
2	$(\frac{2 λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} - 2$	$h_{1}^{'} = h_{1} - \frac{2 λ_{1}}{2}$
2	$- (\frac{2 λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} + 2$	$h_{1}^{'} = h_{1} + \frac{2 λ_{1}}{2}$
χ	$(\frac{χ λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} - χ$	$h_{1}^{'} = h_{1} - \frac{χ λ_{1}}{2}$
χ	$- (\frac{χ λ_{1}}{2} \pm \frac{λ_{2}}{2} l)$	$m_{1} \to m_{1} + χ$	$h_{1}^{'} = h_{1} + \frac{χ λ_{1}}{2}$

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