Abstract

In order to solve the problem that the grating quality cannot be monitored directly in real time, we provided a method based on Rayleigh criterion with our designing optical measurement structure to measure yaw and displacement errors of a grating ruling machine feeding system. Gratings are ruled with or without errors correction by the real-time monitoring system . It shows that the resolution obtained without errors correction is reduced from 99.97% to 87.47% of theoretical value, while the resolution obtained with errors correction is stable, remaining at 99.99%–97.21%. The experimental result is that the grating quality can be guaranteed by monitoring grating resolution in real time.

© 2015 Optical Society of America

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