Abstract

A two-dimensional high-speed, long-range tomography and profilometry based on a low-coherence optical interferometry has been developed. A liquid-crystal Fabry–Perot resonator is fabricated to be a low-coherence optical frequency comb generator for expanding the measurement depth of the tomography and profilometry. The line-shape interference fringes with the individual fringe orders are obtained by a CCD camera in real time. The relative optical length, corresponding to the sample depth information, can be derived from the positions of the interference fringes on the CCD camera and their corresponding fringe orders. The fringe orders can be rapidly calculated using the effectiveness of the changeable extraordinary refractive index of the liquid-crystal material of the resonator. The finesse of the liquid-crystal resonator is approximate 9, giving an expansion of the measurement range of up to 9-fold (8mm depth) with a resolution of profilometry and tomography of 3.7 μm and 11 μm, respectively.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator

Tatsutoshi Shioda, Takashi Morisaki, Tuan Quoc Banh, and Kohei Suzuki
Appl. Opt. 51(21) 5224-5230 (2012)

Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement

Dalip Singh Mehta, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa
Appl. Opt. 42(4) 682-690 (2003)

Projected fringe profilometry using a liquid-crystal spatial light modulator to extend the depth measuring range

Wei-Hung Su, Chun-Hsiang Hsu, Wei-Chia Su, and Jung-Ping Liu
Opt. Express 19(4) 3272-3283 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription