Abstract

This paper proposes a new shearing approach to eliminate the systematic errors in phase measuring deflectometry (PMD). Besides a normal measurement using PMD, another three measurements are taken when the test surfaces are translated and rotated with an amount of known magnitude in our proposed method. The four measurements give three sheared wavefronts, and then the difference Zernike polynomial fitting and a least squares algorithm are proposed to reconstruct the true test surface figure. The proposed method is demonstrated and verified through computer simulation and experimental results. The error propagation when the sheared wavefronts include random noise and the introduced errors due to the incorrect shearing values are both analyzed.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Absolute measurement of optical flat surface shape based on the conjugate differential method

Ya Huang, Jun Ma, Rihong Zhu, Caojin Yuan, Lei Chen, Huijuan Cai, and Weiyuan Sun
Opt. Express 23(23) 29687-29697 (2015)

Improved zonal integration method for high accurate surface reconstruction in quantitative deflectometry

Mengyang Li, Dahai Li, Chengying Jin, Kewei E, Xiaodong Yuan, Zhao Xiong, and Qionghua Wang
Appl. Opt. 56(13) F144-F151 (2017)

Improved method for rapid shape recovery of large specular surfaces based on phase measuring deflectometry

Tian Zhou, Kun Chen, Haoyun Wei, and Yan Li
Appl. Opt. 55(10) 2760-2770 (2016)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription