Abstract

Although high-resistivity, low-loss silicon is an excellent material for terahertz transmission optics, its high refractive index necessitates an antireflection treatment. We fabricated a wide-bandwidth, two-layer antireflection treatment by cutting subwavelength structures into the silicon surface using multi-depth deep reactive-ion etching (DRIE). A wafer with this treatment on both sides has <20  dB (<1%) reflectance over 187–317 GHz at a 15° angle of incidence in TE polarization. We also demonstrated that bonding wafers introduce no reflection features above the 20  dB level (also in TE at 15°), reproducing previous work. Together these developments immediately enable construction of wide-bandwidth silicon vacuum windows and represent two important steps toward gradient-index silicon optics with integral broadband antireflection treatment.

© 2018 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics

Patricio A. Gallardo, Brian J. Koopman, Nicholas F. Cothard, Sarah Marie M. Bruno, German Cortes-Medellin, Galen Marchetti, Kevin H. Miller, Brenna Mockler, Michael D. Niemack, Gordon Stacey, and Edward J. Wollack
Appl. Opt. 56(10) 2796-2803 (2017)

Laser-generated broadband antireflection structures for freeform silicon lenses at terahertz frequencies

A. Brahm, S. Döring, A. Wilms, G. Notni, S. Nolte, and A. Tünnermann
Appl. Opt. 53(13) 2886-2891 (2014)

Large-aperture wide-bandwidth antireflection-coated silicon lenses for millimeter wavelengths

R. Datta, C. D. Munson, M. D. Niemack, J. J. McMahon, J. Britton, E. J. Wollack, J. Beall, M. J. Devlin, J. Fowler, P. Gallardo, J. Hubmayr, K. Irwin, L. Newburgh, J. P. Nibarger, L. Page, M. A. Quijada, B. L. Schmitt, S. T. Staggs, R. Thornton, and L. Zhang
Appl. Opt. 52(36) 8747-8758 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription