Abstract

As an important characterization method for beamline optics, at-wavelength metrology technology based on wavefront measurements has been developed for many years. However, the previous studies on at-wavelength metrology of reflective mirrors is limited to the indirect method. So, the accurate surface information of the mirror under test would normally be inaccessible because of lack of experimental deconvolution between the mirror and any backgrounds from upstream optics. In this study, an absolute metrology method is developed based on the speckle scanning technique. Using this method, the surface profile of the mirror can be extracted exactly from the mixed information of the entire upstream beamline. At the same time, data acquisition time can also be significantly reduced by the processing algorithm introduced in this study without sacrificing the angular sensitivity.

© 2019 Optical Society of America

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