Abstract

Two types of phase-shifting algorithms were developed for simultaneous measurement of the surface and thickness variation of an optical flat. During wavelength tuning, phase-shift nonlinearity can cause a spatially nonuniform error and spatially uniform DC drift error. A 19-sample algorithm was developed that eliminates the effect of the spatially uniform error by expanding the 17-sample algorithm with characteristic polynomial theory. The 19-sample algorithm was then altered to measure the surface shape of the optical flat by rotation of the characteristic diagram. The surface shape and thickness variation were measured with these two algorithms and a wavelength-tuning Fizeau interferometer.

© 2020 Optical Society of America

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