Abstract

The optical constants n and k of Inconel alloy films are presented for film thicknesses between 200 and 900 Å for the visible and near infrared spectrum. Values of n and k were determined from ellipsometric measurements and, separately, from reflection and transmission measurements at normal and oblique incidence. Results of both methods are compared and the effects of film preparation, aging, and surface condition are discussed.

© 1973 Optical Society of America

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