Abstract

A new method of one-dimensional profile reconstruction is presented. The method is based on an extension to the Born approximation and relates measurements of the scattered field to the Fourier transform of the slab profile. Since the Born and our new approximations are most valid at low frequency, we utilize superresolution to recover high-frequency information and then invert for the slab profile. Finally, we vary different parameters and examine the resulting reconstructions.

© 1995 Optical Society of America

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