Abstract

We quantify the behavior of the real () and imaginary () components of the optical response of a recently developed ellipsometric microscope. For a polydimethylsiloxane drop spreading on top of a silicon wafer substrate the experimental values of and show the same correlation as a function of film thickness as do the theoretical values. This confirms that the ellipsometric microscope is operating as predicted. The ellipsometric microscope has a thickness resolution of ~0.1 nm and a lateral spatial resolution of ~1 μm and can collect 512 × 512 pixels of information in approximately 20 s.

© 1996 Optical Society of America

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