Abstract

Layered synthetic microstructures (LSM’s) have been observed using transmission electron microscopy, thin wedges of LSM’s being obtained by a microcleavage technique. Electron micrographs and electron diffraction patterns connected with the composition profiles of LSM’s are presented. If a (111) silicon single crystal is used as the substrate for the LSM it is possible to observe diffraction-pattern spots originating from the LSM and from the silicon simultaneously and thus to measure accurately the LSM mean period using the silicon as a standard. It is shown that in certain cases LSM diffraction patterns exhibit particular features such as transverse structures, which are believed to result from the interface roughness of the LSM. Laser diffractometry is used on bright-field images both to corroborate and to obtain more information from the electron diffraction patterns.

© 1985 Optical Society of America

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