Abstract

Silicon photonics has experienced phenomenal transformations over the last decade. In this paper, we present some of the notable advances in silicon-based passive and active optical interconnect components, and highlight some of our key contributions. Light is also cast on few other parallel technologies that are working in tandem with silicon-based structures, and providing unique functions not achievable with any single system acting alone. With an increasing utilization of CMOS foundries for silicon photonics fabrication, a viable path for realizing extremely low-cost integrated optoelectronics has been paved. These advances are expected to benefit several application domains in the years to come, including communication networks, sensing, and nonlinear systems.

© 2015 Optical Society of America

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2014 (23)

W. S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, and J. Burghartz, “Bridging the gap between optical fibers and silicon photonic integrated circuits,” Opt. Express 22(2), 1277–1286 (2014).
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Z. Cheng and H. K. Tsang, “Experimental demonstration of polarization-insensitive air-cladding grating couplers for silicon-on-insulator waveguides,” Opt. Lett. 39(7), 2206–2209 (2014).
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Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, S. Janz, and W. N. Ye, “Fabrication tolerant and broadband polarization splitter and rotator based on a taper-etched directional coupler,” Opt. Express 22(14), 17458–17465 (2014).
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S.-H. Kim, G. Cong, H. Kawashima, T. Hasama, and H. Ishikawa, “Tilted MMI crossings based on silicon wire waveguide,” Opt. Express 22(3), 2545–2552 (2014).
[Crossref] [PubMed]

S. Cheung, T. Su, K. Okamoto, and S. J. B. Yoo, “Ultra-compact Silicon Photonic 512x512 25-GHz Arrayed Waveguide Grating Router,” IEEE J. Sel. Top. Quantum Electron. 20(4), 8202207 (2014).
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K. K. Mehta, J. S. Orcutt, O. Tehar-Zahav, Z. Sternberg, R. Bafrali, R. Meade, and R. J. Ram, “High-Q CMOS-integrated photonic crystal microcavity devices,” Sci Rep 4, 4077 (2014).
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N. C. Harris, Y. Ma, J. Mower, T. Baehr-Jones, D. Englund, M. Hochberg, and C. Galland, “Efficient, compact and low loss thermo-optic phase shifter in silicon,” Opt. Express 22(9), 10487–10493 (2014).
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G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, Y. Hu, D. J. Thomson, K. Li, P. R. Wilson, S.-W. Chen, and S. S. Hsu, “Recent breakthroughs in carrier depletion based silicon optical modulators,” Nanophotonics 3(4-5), 229–245 (2014).
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T. Baba, H. C. Nguyen, N. Yazawa, Y. Terada, Hashimoto, and T. Watanabe, “Optical modulators based on Si photonic crystals,” Sci. Technol. Adv. Mater. 15, 024602 (2014).
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P. Damas, X. Le Roux, D. Le Bourdais, E. Cassan, D. Marris-Morini, N. Izard, T. Maroutian, P. Lecoeur, and L. Vivien, “Wavelength dependence of Pockels effect in strained silicon waveguides,” Opt. Express 22(18), 22095–22100 (2014).
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A. V. Krishnamoorthy, X. Zheng, D. Feng, J. Lexau, J. F. Buckwalter, H. D. Thacker, F. Liu, Y. Luo, E. Chang, P. Amberg, I. Shubin, S. S. Djordjevic, J. H. Lee, S. Lin, H. Liang, A. Abed, R. Shafiiha, K. Raj, R. Ho, M. Asghari, and J. E. Cunningham, “A low-power, high-speed, 9-channel germanium-silicon electro-absorption modulator array integrated with digital CMOS driver and wavelength multiplexer,” Opt. Express 22(10), 12289–12295 (2014).
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B. Souhan, R. R. Grote, J. B. Driscoll, M. Lu, A. Stein, H. Bakhru, and R. M. Osgood, “Metal-semiconductor-metal ion-implanted Si waveguide photodetectors for C-band operation,” Opt. Express 22(8), 9150–9158 (2014).
[Crossref] [PubMed]

L. Alloatti, R. Palmer, S. Diebold, K. P. Pahl, B. Chen, R. Dinu, M. Fournier, J.-M. Fedeli, T. Zwick, W. Freude, C. Koos, and J. Leuthold, “100 GHz silicon–organic hybrid modulator,” Light: Science and Applications. 3(5), e173 (2014).
[Crossref]

M. Lauermann, R. Palmer, S. Koeber, P. Schindler, D. Korn, T. Wahlbrink, J. Bolten, M. Waldow, D. Elder, L. Dalton, J. Leuthold, W. Freude, and C. Koos, “Low-power silicon-organic hybrid (SOH) modulators for advanced modulation formats,” Opt. Express 22(24), 29927–29936 (2014).
[Crossref]

J. N. Caspers and M. Mojahedi, “Measurement of a compact colorless 3 dB hybrid plasmonic directional coupler,” Opt. Lett. 39(11), 3262–3265 (2014).
[Crossref] [PubMed]

X. Guan, H. Wu, Y. Shi, and D. Dai, “Extremely small polarization beam splitter based on a multimode interference coupler with a silicon hybrid plasmonic waveguide,” Opt. Lett. 39(2), 259–262 (2014).
[Crossref] [PubMed]

J. T. Kim, “CMOS-compatible hybrid plasmonic modulator based on vanadium dioxide insulator-metal phase transition,” Opt. Lett. 39(13), 3997–4000 (2014).
[Crossref] [PubMed]

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, “High-speed plasmonic phase modulators,” Nat. Photonics 8(3), 229–233 (2014).
[Crossref]

M. Z. Alam, J. S. Aitchison, and M. Mojahedi, “A marriage of convenience: Hybridization of surface plasmon and dielectric waveguide modes,” Laser and Photonics Reviews. 8(3), 1863–8899 (2014).
[Crossref]

Z. Cheng, Z. Li, K. Xu, and H. K. Tsang, “Increase of grating coupler bandwidth with a graphene overlay,” Appl. Phys. Lett. 104(11), 111109 (2014).
[Crossref]

M. Mohsin, D. Schall, M. Otto, A. Noculak, D. Neumaier, and H. Kurz, “Graphene based low insertion loss electro-absorption modulator on SOI waveguide,” Opt. Express 22(12), 15292–15297 (2014).
[Crossref] [PubMed]

N. Kinsey, M. Ferrera, G. V. Naik, V. E. Babicheva, V. M. Shalaev, and A. Boltasseva, “Experimental demonstration of titanium nitride plasmonic interconnects,” Opt. Express 22(10), 12238–12247 (2014).
[Crossref] [PubMed]

C.-H. Liu, Y.-C. Chang, T. B. Norris, and Z. Zhong, “Graphene photodetectors with ultra-broadband and high responsivity at room temperature,” Nat. Nanotechnol. 9(4), 273–278 (2014).
[Crossref] [PubMed]

2013 (35)

Q. Li, A. A. Eftekhar, M. Sodagar, Z. Xia, A. H. Atabaki, and A. Adibi, “Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform,” Opt. Express 21(15), 18236–18248 (2013).
[Crossref] [PubMed]

J. F. Bauters, M. L. Davenport, M. J. Heck, J. K. Doylend, A. Chen, A. W. Fang, and J. E. Bowers, “Silicon on ultra-low-loss waveguide photonic integration platform,” Opt. Express 21(1), 544–555 (2013).
[Crossref] [PubMed]

A. Pospischil, M. Humer, M. M. Furchi, D. Bachmann, R. Guider, T. Fromherz, and T. Mueller, “CMOS-compatible graphene photodetector covering all optical communication bands,” Nat. Photonics 7(11), 892–896 (2013).
[Crossref]

X. Gan, R.-J. Shiue, Y. Gao, I. Meric, T. F. Heinz, K. Shepard, J. Hone, S. Assefa, and D. Englund, “Chip-integrated ultrafast graphene photodetector with high responsivity,” Nat. Photonics 7(11), 883–891 (2013).
[Crossref]

K. J. A. Ooi, P. Bai, H. S. Chu, and L. K. Ang, “Ultracompact vanadium dioxide dual-mode plasmonic waveguide electroabsorption modulator,” Nanophotonics 2(1), 13–19 (2013).
[Crossref]

A. Joushaghani, B. A. Kruger, S. Paradis, D. Alain, J. S. Aitchison, and J. K. S. Poon, “Sub-volt broadband hybrid plasmonic-vanadium dioxide switches,” Appl. Phys. Lett. 102(6), 061101 (2013).
[Crossref]

V. E. Babicheva, N. Kinsey, G. V. Naik, M. Ferrera, A. V. Lavrinenko, V. M. Shalaev, and A. Boltasseva, “Towards CMOS-compatible nanophotonics: Ultra-compact modulators using alternative plasmonic materials,” Opt. Express 21(22), 27326–27337 (2013).
[Crossref] [PubMed]

L. Gao, F. Hu, X. Wang, L. Tang, and Z. Zhou, “Ultracompact and silicon-on-insulator-compatible polarization splitter based on asymmetric plasmonic–dielectric coupling,” Appl. Phys. B 113(2), 199–203 (2013).
[Crossref]

F. Lou, L. Thylen, and L. Wosinski, “Hybrid plasmonic microdisk resonators for optical interconnect applications,” Proc. SPIE 8781, 87810X (2013).
[Crossref]

S. Zhu, G.-Q. Lo, J. Xie, and D.-L. Kwong, “Toward athermal plasmonic ring resonators based on Cu-TiO2-Si hybrid plasmonic waveguide,” IEEE Photon. Technol. Lett. 25(12), 1161–1164 (2013).
[Crossref]

J. N. Caspers, J. S. Aitchison, and M. Mojahedi, “Experimental demonstration of an integrated hybrid plasmonic polarization rotator,” Opt. Lett. 38(20), 4054–4057 (2013).
[Crossref] [PubMed]

X. Zhang, A. Hosseini, X. Lin, H. Subbaraman, and R. T. Chen, “Polymer-based Hybrid Integrated Photonic Devices for Silicon On-chip Modulation and Board-level Optical Interconnects,” Selected Topics in Quantum Electronics, IEEE Journal of 19(6), 3401115 (2013).
[Crossref]

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. M. Osgood., “10 Gb/s Error-Free Operation of All-Silicon Ion-Implanted-Waveguide Photodiodes at 1.55µm,” IEEE Photon. Technol. Lett. 25(1), 67–70 (2013).
[Crossref]

X. Zhang, A. Hosseini, S. Chakravarty, J. Luo, A. K.-Y. Jen, and R. T. Chen, “Wide optical spectrum range, subvolt, compact modulator based on an electro-optic polymer refilled silicon slot photonic crystal waveguide,” Opt. Lett. 38(22), 4931–4934 (2013).
[Crossref] [PubMed]

A. Opheij, N. Rotenberg, D. M. Beggs, I. H. Rey, T. F. Krauss, and L. Kuipers, “Ultracompact (3 μm) silicon slow-light optical modulator,” Sci Rep 3, 3546 (2013).
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X. Xiao, H. Xu, X. Li, Z. Li, T. Chu, Y. Yu, and J. Yu, “High-speed, low-loss silicon Mach-Zehnder modulators with doping optimization,” Opt. Express 21(4), 4116–4125 (2013).
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Q. Zhao, K. Cui, Z. Huang, X. Feng, D. Zhang, F. Liu, W. Zhang, and Y. Huang, “Compact Thermo-Optic Switch Based on Tapered W1 Photonic Crystal Waveguide,” IEEE Photonics Journal. 5(2), 2200606 (2013).
[Crossref]

K. Cui, X. Feng, Y. Huang, Q. Zhao, Z. Huang, and W. Zhang, “Broadband thermo-optic switch based on a W2 photonic crystal waveguide,” Proc. SPIE 8630, Optoelectronic Interconnects XIII, 863018 (2013).
[Crossref]

L. Yangyang, T. Yonghui, and Y. Lin, “Integrated reconfigurable optical add-drop multiplexers based on cascaded microring resonators,” J. Semicond. 34(9), 094012 (2013).
[Crossref]

X. Sun, L. Zhou, J. Xie, Z. Zou, L. Lu, H. Zhu, X. Li, and J. Chen, “Tunable silicon Fabry-Perot comb filters formed by Sagnac loop mirrors,” Opt. Lett. 38(4), 567–569 (2013).
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Y. Zhang, A. Hosseini, X. Xu, D. Kwong, and R. T. Chen, “Ultralow-loss silicon waveguide crossing using Bloch modes in index-engineered cascaded multimode-interference couplers,” Opt. Lett. 38(18), 3608–3611 (2013).
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Y. Ma, Y. Zhang, S. Yang, A. Novack, R. Ding, A. E. Lim, G.-Q. Lo, T. Baehr-Jones, and M. Hochberg, “Ultralow loss single layer submicron silicon waveguide crossing for SOI optical interconnect,” Opt. Express 21(24), 29374–29382 (2013).
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H. Li, Y. Bai, X. Dong, E. Li, Y. Li, Y. Liu, and W. Zhou, “Optimal Design of an Ultrasmall SOI-Based 1 × 8 Flat-Top AWG by Using an MMI,” ScientificWorldJournal 2013, 636912 (2013).
[PubMed]

Y. Huang, Z. Tu, H. Yi, Y. Li, X. Wang, and W. Hu, “High extinction ratio polarization beam splitter with multimode interference coupler on SOI,” Opt. Commun. 307, 46–49 (2013).
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A. M. Jones, C. T. DeRose, A. L. Lentine, D. C. Trotter, A. L. Starbuck, and R. A. Norwood, “Ultra-low crosstalk, CMOS compatible waveguide crossings for densely integrated photonic interconnection networks,” Opt. Express 21(10), 12002–12013 (2013).
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M. R. Watts, J. Sun, C. DeRose, D. C. Trotter, R. W. Young, and G. N. Nielson, “Adiabatic thermo-optic Mach-Zehnder switch,” Opt. Lett. 38(5), 733–735 (2013).
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D. T. Spencer, D. Dai, Y. Tang, M. J. R. Heck, and J. E. Bowers, “Realization of a Novel 1×N Power Splitter With Uniformly Excited Ports,” IEEE Photon. Technol. Lett. 25(1), 36–39 (2013).
[Crossref]

X. Li, H. Xu, X. Xiao, Z. Li, J. Yu, and Y. Yu, “Compact and low-loss silicon power splitter based on inverse tapers,” Opt. Lett. 38(20), 4220–4223 (2013).
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J. Xing, Z. Li, Y. Yu, and J. Yu, “Design of polarization-independent adiabatic splitters fabricated on silicon-on-insulator substrates,” Opt. Express 21(22), 26729–26734 (2013).
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W. S. Zaoui, A. Kunze, W. Vogel, and M. Berroth, “CMOS-Compatible Polarization Splitting Grating Couplers With a Backside Metal Mirror,” IEEE Photon. Technol. Lett. 25(14), 1395–1397 (2013).
[Crossref]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, “Colorless grating couplers realized by interleaving dispersion engineered subwavelength structures,” Opt. Lett. 38(18), 3588–3591 (2013).
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Y. Ding, H. Ou, and C. Peucheret, “Ultrahigh-efficiency apodized grating coupler using fully etched photonic crystals,” Opt. Lett. 38(15), 2732–2734 (2013).
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M. Streshinsky, R. Shi, A. Novack, R. T. Cher, A. E. Lim, P. G. Lo, T. Baehr-Jones, and M. Hochberg, “A compact bi-wavelength polarization splitting grating coupler fabricated in a 220 nm SOI platform,” Opt. Express 21(25), 31019–31028 (2013).
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H. Park, S. Kim, J. Park, J. Joo, and G. Kim, “A fiber-to-chip coupler based on Si/SiON cascaded tapers for Si photonic chips,” Opt. Express 21(24), 29313–29319 (2013).
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K.-N. Ku and M.-C. M. Lee, “Wide-Band Optical Mode Converters for Coupling Between Fibers and Silicon Photonic Wires With Large Misalignment Tolerance,” J. Lightwave Technol. 31(10), 1616–1620 (2013).
[Crossref]

2012 (20)

M. Wood, P. Sun, and R. M. Reano, “Compact cantilever couplers for low-loss fiber coupling to silicon photonic integrated circuits,” Opt. Express 20(1), 164–172 (2012).
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X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, “Complementary metal–oxide–semiconductor compatible high efficiency subwavelength grating couplers for silicon integrated photonics,” Appl. Phys. Lett. 101(3), 031109 (2012).
[Crossref]

W. S. Zaoui, M. F. Rosa, W. Vogel, M. Berroth, J. Butschke, and F. Letzkus, “Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency,” Opt. Express 20(26), B238–B243 (2012).
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X. Chen, K. Xu, Z. Cheng, C. K. Fung, and H. K. Tsang, “Wideband subwavelength gratings for coupling between silicon-on-insulator waveguides and optical fibers,” Opt. Lett. 37(17), 3483–3485 (2012).
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X. Chen, K. Xu, Z. Cheng, C. K. Y. Fung, and H. K. Tsang, “Wideband subwavelength gratings for coupling between silicon-on-insulator waveguides and optical fibers,” Opt. Lett. 37(17), 3483–3485 (2012).
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W. S. Fegadolli, G. Vargas, X. Wang, F. Valini, L. A. M. Barea, J. E. B. Oliveira, N. Frateschi, A. Scherer, V. R. Almeida, and R. R. Panepucci, “Reconfigurable Silicon Thermo-Optical Ring Resonator Switch Based on Vernier Effect Control,” Opt. Express 20(13), 14722–14733 (2012).
[Crossref] [PubMed]

P. Dong, L. Chen, and Y.-K. Chen, “High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators,” Opt. Express 20(6), 6163–6169 (2012).
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D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P.-P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50Gb/s silicon optical modulator,” IEEE Photon. Technol. Lett. 24(4), 234–236 (2012).
[Crossref]

A. Hosseini, X. Xu, H. Subbaraman, C.-Y. Lin, S. Rahimi, and R. T. Chen, “Large optical spectral range dispersion engineered silicon-based photonic crystal waveguide modulator,” Opt. Express 20(11), 12318–12325 (2012).
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H. C. Nguyen, S. Hashimoto, M. Shinkawa, and T. Baba, “Compact and fast photonic crystal silicon optical modulators,” Opt. Express 20(20), 22465–22474 (2012).
[Crossref] [PubMed]

S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, and T. Usuki, “12.5-Gb/s operation with 0.29-V·cm V(π)L using silicon Mach-Zehnder modulator based-on forward-biased pin diode,” Opt. Express 20(3), 2911–2923 (2012).
[Crossref] [PubMed]

P. Chaisakul, D. Marris-Morini, M. S. Rouifed, G. Isella, D. Chrastina, J. Frigerio, X. Le Roux, S. Edmond, J. R. Coudevylle, and L. Vivien, “23 GHz Ge/SiGe multiple quantum well electro-absorption modulator,” Opt. Express 20(3), 3219–3224 (2012).
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D. Feng, S. Liao, H. Liang, J. Fong, B. Bijlani, R. Shafiiha, B. J. Luff, Y. Luo, J. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed GeSi electro-absorption modulator at 1550 nm wavelength on SOI waveguide,” Opt. Express 20(20), 22224–22232 (2012).
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X. Sun, M. Z. Alam, S. J. Wagner, J. S. Aitchison, and M. Mojahedi, “Experimental demonstration of a hybrid plasmonic transverse electric pass polarizer for a silicon-on-insulator platform,” Opt. Lett. 37(23), 4814–4816 (2012).
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J. Chee, S. Zhu, and G. Q. Lo, “CMOS compatible polarization splitter using hybrid plasmonic waveguide,” Opt. Express 20(23), 25345–25355 (2012).
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S. Y. Zhu, G. Q. Lo, and D. L. Kwong, “Performance of ultracompact copper-capped silicon hybrid plasmonic waveguide-ring resonators at telecom wavelengths,” Opt. Express 20(14), 15232–15246 (2012).
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V. J. Sorger, N. D. Lanzillotti-Kimura, R.-M. Ma, and X. Zhang, “Ultra-compact silicon nanophotonic modulator with broadband response,” Nanophotonics 1(1), 17–22 (2012).
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V. J. Sorger, N. D. Lanzillotti-Kimura, R.-M. Ma, and X. Zhang, “Ultra-compact silicon nanophotonic modulator with broadband response,” Nanophotonics 1(1), 17–22 (2012).
[Crossref]

S. Y. Zhu, G. Q. Lo, and D. L. Kwong, “Experimental demonstration of vertical Cu-SiO2-Si hybrid plasmonic waveguide components on an SOI platform,” IEEE Photon. Technol. Lett. 24(14), 1224–1226 (2012).
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K. F. Mak, L. Ju, F. Wang, and T. F. Heinz, “Optical spectroscopy of graphene: from the far infrared to the ultraviolet,” Solid State Commun. 152(15), 1341–1349 (2012).
[Crossref]

2011 (16)

M. C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express 19(14), 13551–13556 (2011).
[Crossref] [PubMed]

J. Wang, X. Guan, Y. He, Y. Shi, Z. Wang, S. He, P. Holmström, L. Wosinski, L. Thylen, and D. Dai, “Sub-μm2 power splitters by using silicon hybrid plasmonic waveguides,” Opt. Express 19(2), 838–847 (2011).
[Crossref] [PubMed]

A. E. Lim, T. Y. Liow, F. Qing, N. Duan, L. Ding, M. Yu, G. Q. Lo, and D. L. Kwong, “Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector,” Opt. Express 19(6), 5040–5046 (2011).
[Crossref] [PubMed]

B. Chmielak, M. Waldow, C. Matheisen, C. Ripperda, J. Bolten, T. Wahlbrink, M. Nagel, F. Merget, and H. Kurz, “Pockels effect based fully integrated, strained silicon electro-optic modulator,” Opt. Express 19(18), 17212–17219 (2011).
[PubMed]

R. Nagarajan, J. Rahn, M. Kato, J. Pleumeekers, D. Lambert, V. Lal, H.-S. Tsai, A. Nilsson, A. Dentai, M. Kuntz, R. Malendevich, J. Tang, J. Zhang, T. Butrie, M. Raburn, B. Little, W. Chen, G. Goldfarb, V. Dominic, B. Taylor, M. Reffle, F. Kish, and D. Welch, “10 Channel, 45.6Gb/s per Channel, Polarization Multiplexed DQPSK InP Receiver Photonic Integrated Circuit,” J. Lightwave Technol. 29(4), 386–395 (2011).
[Crossref]

R. Ding, T. Baehr-Jones, W.-J. Kim, A. Spott, M. Fournier, J.-M. Fedeli, S. Huang, J. Luo, A. K.-Y. Jen, and L. Dalton, “Sub-Volt Silicon-Organic Electro-optic Modulator With 500 MHz Bandwidth,” J. Lightwave Technol. 29(8), 1112–1117 (2011).
[Crossref]

M. Gould, T. Baehr-Jones, R. Ding, S. Huang, J. Luo, A. K.-Y. Jen, J.-M. Fedeli, M. Fournier, and M. Hochberg, “Silicon-polymer hybrid slot waveguide ring-resonator modulator,” Opt. Express 19(5), 3952–3961 (2011).
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X. Wang, C.-Y. Lin, S. Chakravarty, J. Luo, A. K.-Y. Jen, and R. T. Chen, “Effective in-device r33 of 735 pm/V on electro-optic polymer infiltrated silicon photonic crystal slot waveguides,” Opt. Lett. 36(6), 882–884 (2011).
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L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, and J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
[PubMed]

A. E.-J. Lim, T.-Y. Liow, F. Qing, N. Duan, L. Ding, M. Yu, G.-Q. Lo, and D.-L. Kwong, “Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector,” Opt. Express 19(6), 5040–5046 (2011).
[Crossref] [PubMed]

D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in Silicon,” Opt. Express 19(12), 11507–11516 (2011).
[Crossref] [PubMed]

M. Yang, W. M. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, and Y. A. Vlasov, “Non-Blocking 4x4 Electro-Optic Silicon Switch for On-Chip Photonic Networks,” Opt. Express 19(1), 47–54 (2011).
[Crossref] [PubMed]

A. Hosseini, D. N. Kwong, Y. Zhang, H. Subbaraman, X. Xu, and R. T. Chen, “1× N Multimode Interference Beam Splitter Design Techniques for On-Chip Optical Interconnections,” IEEE J. Sel. Top. Quantum Electron. 17(3), 510–515 (2011).
[Crossref]

A. Hosseini, S. Rahimi, X. Xu, D. Kwong, J. Covey, and R. T. Chen, “Ultracompact and Fabrication-Tolerant Integrated Polarization Splitter,” Opt. Lett. 36(20), 4047–4049 (2011).
[Crossref] [PubMed]

L. Chen, C. R. Doerr, P. Dong, and Y. K. Chen, “Monolithic silicon chip with 10 modulator channels at 25 Gbps and 100-GHz spacing,” Opt. Express 19(26), B946–B951 (2011).
[Crossref] [PubMed]

A. V. Tsarev, “Efficient silicon wire waveguide crossing with negligible loss and crosstalk,” Opt. Express 19(15), 13732–13737 (2011).
[Crossref] [PubMed]

2010 (18)

C.-H. Chen and C.-H. Chiu, “Taper-Integrated Multimode-Interference Based Waveguide Crossing Design,” IEEE J. Quantum Electron. 46(11), 1656–1661 (2010).
[Crossref]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, D. X. Xu, S. Janz, A. Densmore, and T. J. Hall, “Subwavelength grating crossings for silicon wire waveguides,” Opt. Express 18(15), 16146–16155 (2010).
[Crossref] [PubMed]

S. Corzine, P. Evans, M. Fisher, J. Gheorma, M. Kato, V. Dominic, P. Samra, A. Nilsson, J. Rahn, I. Lyubomirsky, A. Dentai, P. Studenkov, M. Missey, D. Lambert, A. Spannagel, R. Muthiah, R. Salvatore, S. Murthy, E. Strzelecka, J. Pleumeekers, A. Chen, R. Schneider, R. Nagarajan, M. Ziari, J. Stewart, C. Joyner, F. Kish, and D. Welch, “Large-scale InP transmitter PICs for PM-DQPSK fiber transmission systems,” IEEE Photon. Technol. Lett. 22(14), 1015–1017 (2010).
[Crossref]

L. Chen, C. R. Doerr, Y. K. Chen, and T. Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

M. Hochberg and T. Baehr-Jones, “Towards fabless silicon photonics,” Nat. Photonics 4(8), 492–494 (2010).
[Crossref]

L. O’Faolain, D. M. Beggs, T. P. White, T. Kampfrath, K. Kuipers, and T. F. Krauss, “Compact Optical Switches and Modulators Based on Dispersion Engineered Photonic Crystals,” IEEE Photonics Journal 2(3), 404–414 (2010).
[Crossref]

J. Van Campenhout, W. M. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett. 35(7), 1013–1015 (2010).
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P. Dong, S. Liao, H. Liang, R. Shafiiha, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Submilliwatt, ultrafast and broadband electro-optic silicon switches,” Opt. Express 18(24), 25225–25231 (2010).
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T.-T. Le and L. W. Cahill, “The Design of 4×4 Multimode Interference Coupler Based Microring Resonators on an SOI Platform,” J. Telecom. Information. Technology. 2, 98–102 (2010).

Y. Cui, K. Liu, D. L. MacFarlane, and J.-B. Lee, “Thermo-optically tunable silicon photonic crystal light modulator,” Opt. Lett. 35(21), 3613–3615 (2010).
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G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[Crossref]

J. Witzens, T. Baehr-Jones, and M. Hochberg, “Design of transmission line driven slot waveguide Mach-Zehnder interferometers and application to analog optical links,” Opt. Express 18(16), 16902–16928 (2010).
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J. H. Wülbern, S. Prorok, J. Hampe, A. Petrov, M. Eich, J. Luo, A. K.-Y. Jen, M. Jenett, and A. Jacob, “40 GHz electro-optic modulation in hybrid silicon-organic slotted photonic crystal waveguides,” Opt. Lett. 35(16), 2753–2755 (2010).
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J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White, and M. L. Brongersma, “Plasmonics for extreme light concentration and manipulation,” Nat. Mater. 9(3), 193–204 (2010).
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D. K. Gramotnev and S. I. Bozhevolnyi, “Plasmonics beyond the diffraction limit,” Nat. Photonics 4(2), 83–91 (2010).
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N. N. Feng, P. Dong, D. Zheng, S. Liao, H. Liang, R. Shafiiha, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides,” Opt. Express 18(1), 96–101 (2010).
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T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon Modulators and Germanium Photodetectors on SOI: Monolithic Integration, Compatibility, and Performance Optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
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A. V. Krasavin and A. V. Zayats, “Silicon-based plasmonic waveguides,” Opt. Express 18(11), 11791–11799 (2010).
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2009 (16)

F. N. Xia, T. Mueller, Y. M. Lin, A. Valdes-Garcia, and P. Avouris, “Ultrafast graphene photodetector,” Nat. Nanotechnol. 4(12), 839–843 (2009).
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L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17(8), 6252–6257 (2009).
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L. Chen and M. Lipson, “Ultra-low capacitance and high speed germanium photodetectors on silicon,” Opt. Express 17(10), 7901–7906 (2009).
[Crossref] [PubMed]

D. Feng, S. Liao, P. Dong, N.-N. Feng, H. Liang, D. Zheng, C.-C. Kung, J. Fong, R. Shafiiha, J. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High-speed Ge photodetector monolithically integrated with large cross section silicon-on-insulator waveguide,” Appl. Phys. Lett. 95(26), 261105 (2009).
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D. Dai and S. He, “A silicon-based hybrid plasmonic waveguide with a metal cap for a nano-scale light confinement,” Opt. Express 17(19), 16646–16653 (2009).
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F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J.-M. Fedeli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express 17(24), 21986–21991 (2009).
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D. M. Beggs, T. P. White, L. Cairns, L. O’Faolain, and T. F. Krauss, “Ultrashort Photonic Crystal Optical Switch Actuated by a Microheater,” IEEE Photon. Technol. Lett. 21(1), 24–26 (2009).
[Crossref]

M. Geng, L. Jia, L. Zhang, P. Chen, and Y. Liu, “Compact four-channel reconfigurable optical add-drop multi-channeler using silicon photonic wire,” Opt. Commun. 282(17), 3477–3480 (2009).
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J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Low-power, 2 x 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express 17(26), 24020–24029 (2009).
[PubMed]

K. Pei Yap, A. Delge, J. Lapointe, B. Lamontagne, J. H. Schmid, P. Waldron, B. A. Syrett, and S. Janz, “Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides,” IEEE J. Lightwav. Technol. 27(18), 3999–4008 (2009).
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B. Schmid, A. Petrov, and M. Eich, “Optimized grating coupler with fully etched slots,” Opt. Express 17(13), 11066–11076 (2009).
[PubMed]

R. Halir, P. Cheben, S. Janz, D. X. Xu, I. Molina-Fernández, and J. G. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
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X. Chen and H. K. Tsang, “Nanoholes Grating Couplers for Coupling Between Silicon-on-Insulator Waveguides and Optical Fibers,” IEEE. Photonics Journal. 1(3), 184–190 (2009).
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Y. Tang, D. Dai, and S. He, “Proposal for a Grating Waveguide Serving as Both a Polarization Splitter and an Efficient Coupler for Silicon-on-Insulator Nanophotonic Circuits,” IEEE Photon. Technol. Lett. 21(4), 242–244 (2009).
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B.-K. Yang, S.-Y. Shin, and D. Zhang, “Ultrashort polarization splitter using two-mode interference in silicon photonic wires,” IEEE Photon. Technol. Lett. 21(7), 432–434 (2009).
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P. Sanchis, P. Villalba, F. Cuesta, A. Håkansson, A. Griol, J. V. Galán, A. Brimont, and J. Martí, “Highly efficient crossing structure for silicon-on-insulator waveguides,” Opt. Lett. 34(18), 2760–2762 (2009).
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2008 (13)

S. H. Tao, Q. Fang, J. F. Song, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Cascade wide-angle Y-junction 1 x 16 optical power splitter based on silicon wire waveguides on silicon-on-insulator,” Opt. Express 16(26), 21456–21461 (2008).
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S. J. Spector, M. W. Geis, G.-R. Zhou, M. E. Grein, F. Gan, M. A. Popovic, J. U. Yoon, D. M. Lennon, E. P. Ippen, F. Z. Kärtner, and T. M. Lyszczarz, “CMOS-compatible dual-output silicon modulator for analog signal processing,” Opt. Express 16(15), 11027–11031 (2008).
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X. Wang, J. A. Martinez, M. S. Nawrocka, and R. R. Panepucci, “Compact Thermally Tunable Silicon Wavelength Switch: Modeling and Characterization,” IEEE Photon. Technol. Lett. 20(11), 936–938 (2008).
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Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
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