Abstract

We present phase-sensitive absolute amplitude measurements of surface acoustic wave fields obtained using a stroboscopic white-light interferometer. The data analysis makes use of the high resolution available in the measured interferometric phase data, enabling the characterization of the out-of-plane surface vibration fields in electrically excited microstructures with better than 100 pm amplitude resolution. The setup uses a supercontinuum light source with tailored spectral properties for obtaining the high amplitude resolution. The duration of the light pulses is less than 300 ps to allow the detection of high frequencies. These capabilities enabled a detailed measurement of the focusing of surface acoustic waves by an annular interdigital transducer structure operating at 74 MHz, featuring a maximum vibration amplitude of 3 nm.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Stroboscopic white-light interferometry of vibrating microstructures

Igor Shavrin, Lauri Lipiäinen, Kimmo Kokkonen, Steffen Novotny, Matti Kaivola, and Hanne Ludvigsen
Opt. Express 21(14) 16901-16907 (2013)

Picosecond supercontinuum light source for stroboscopic white-light interferometry with freely adjustable pulse repetition rate

Steffen Novotny, Vasuki Durairaj, Igor Shavrin, Lauri Lipiäinen, Kimmo Kokkonen, Matti Kaivola, and Hanne Ludvigsen
Opt. Express 22(11) 13625-13633 (2014)

Scanning Michelson interferometer for imaging surface acoustic wave fields

J. V. Knuuttila, P. T. Tikka, and M. M. Salomaa
Opt. Lett. 25(9) 613-615 (2000)

References

  • View by:
  • |
  • |
  • |

  1. R. L. Whitman and A. Korpel, “Probing of acoustic surface perturbations by coherent light,” Appl. Opt. 8, 1567–1576 (1969).
    [Crossref] [PubMed]
  2. J. P. Monchalin, “Optical detection of ultrasound,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 33, 485–499 (1986).
    [Crossref]
  3. A. Bosseboeuf and S. Petitgrand, “Characterization of the static and dynamic behaviour of m(o)ems by optical techniques: status and trends,” J. Micromech. Microeng. 13, S23–S33 (2003).
    [Crossref]
  4. S. Donati, Electro-Optical Instrumentation: Sensing and Measuring with Lasers (Prentice Hall, 2004).
  5. K. Kokkonen, “Laser interferometers in physical acoustics,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 1036–1043.
  6. J. V. Knuuttila, P. T. Tikka, and M. M. Salomaa, “Scanning Michelson interferometer for imaging surface acoustic wave fields,” Opt. Lett. 25, 613–615 (2000).
    [Crossref]
  7. G. G. Fattinger and P. T. Tikka, “Modified Mach-Zehnder laser interferometer for probing bulk acoustic waves,” Appl. Phys. Lett. 79, 290–292 (2001).
    [Crossref]
  8. J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
    [Crossref]
  9. K. Kokkonen and M. Kaivola, “Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations,” Appl. Phys. Lett. 92, 063502 (2008).
    [Crossref]
  10. S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
    [Crossref]
  11. L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
    [Crossref]
  12. K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, and E. Hæggström, “Stroboscopic supercontinuum white-light interferometer for MEMS characterization,” Opt. Lett. 37, 1703–1705 (2012).
    [Crossref] [PubMed]
  13. I. Shavrin, L. Lipiäinen, K. Kokkonen, S. Novotny, M. Kaivola, and H. Ludvigsen, “Stroboscopic white-light interferometry of vibrating microstructures,” Opt. Express 21, 16901–16907 (2013).
    [Crossref] [PubMed]
  14. S. Novotny, V. Durairaj, I. Shavrin, L. Lipiäinen, K. Kokkonen, M. Kaivola, and H. Ludvigsen, “Picosecond supercontinuum light source for stroboscopic white-light interferometry with freely adjustable pulse repetition rate,” Opt. Express 22, 13625–13633 (2014).
    [Crossref] [PubMed]
  15. K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
    [Crossref]
  16. P.-A. Champert, V. Couderc, P. Leproux, S. Février, V. Tombelaine, L. Labonté, P. Roy, C. Froehly, and P. Nérin, “White-light supercontinuum generation in normally dispersive optical fiber using original multi-wavelength pumping system,” Opt. Express 12, 4366–4371 (2004).
    [Crossref] [PubMed]
  17. V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
    [Crossref]
  18. V. Laude, K. Kokkonen, and S. Benchabane, “Characterization of surface acoustic wave focusing by an annular interdigital transducer,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 919–922.

2014 (1)

2013 (1)

2012 (1)

2009 (1)

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

2008 (2)

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

K. Kokkonen and M. Kaivola, “Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations,” Appl. Phys. Lett. 92, 063502 (2008).
[Crossref]

2004 (1)

2003 (2)

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

A. Bosseboeuf and S. Petitgrand, “Characterization of the static and dynamic behaviour of m(o)ems by optical techniques: status and trends,” J. Micromech. Microeng. 13, S23–S33 (2003).
[Crossref]

2001 (3)

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

G. G. Fattinger and P. T. Tikka, “Modified Mach-Zehnder laser interferometer for probing bulk acoustic waves,” Appl. Phys. Lett. 79, 290–292 (2001).
[Crossref]

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

2000 (1)

1986 (1)

J. P. Monchalin, “Optical detection of ultrasound,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 33, 485–499 (1986).
[Crossref]

1969 (1)

Aaltonen, J.

Barber, B. P.

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

Benchabane, S.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

V. Laude, K. Kokkonen, and S. Benchabane, “Characterization of surface acoustic wave focusing by an annular interdigital transducer,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 919–922.

Bosseboeuf, A.

A. Bosseboeuf and S. Petitgrand, “Characterization of the static and dynamic behaviour of m(o)ems by optical techniques: status and trends,” J. Micromech. Microeng. 13, S23–S33 (2003).
[Crossref]

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

Champert, P.-A.

Chang, C.-C.

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Chen, J.-L.

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Chen, L.-C.

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Cottle, D. L.

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

Couderc, V.

Danaie, K.

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

Deason, V. A.

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

Donati, S.

S. Donati, Electro-Optical Instrumentation: Sensing and Measuring with Lasers (Prentice Hall, 2004).

Durairaj, V.

Fattinger, G. G.

G. G. Fattinger and P. T. Tikka, “Modified Mach-Zehnder laser interferometer for probing bulk acoustic waves,” Appl. Phys. Lett. 79, 290–292 (2001).
[Crossref]

Février, S.

Franssila, S.

Froehly, C.

Gammel, P. L.

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

Gérard, D.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

Gilles, J.

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

Gopani, S.

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

Graebner, J. E.

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

Greywall, D. S.

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

Grigoras, K.

Hæggström, E.

Hanhijärvi, K.

Heikkinen, V.

Huang, Y.-T.

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Jerez-Hanckes, C. F.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

Kaivola, M.

Kassamakov, I.

Khelfaoui, N.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

Khelif, A.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

Knuuttila, J. V.

Kokkonen, K.

S. Novotny, V. Durairaj, I. Shavrin, L. Lipiäinen, K. Kokkonen, M. Kaivola, and H. Ludvigsen, “Picosecond supercontinuum light source for stroboscopic white-light interferometry with freely adjustable pulse repetition rate,” Opt. Express 22, 13625–13633 (2014).
[Crossref] [PubMed]

I. Shavrin, L. Lipiäinen, K. Kokkonen, S. Novotny, M. Kaivola, and H. Ludvigsen, “Stroboscopic white-light interferometry of vibrating microstructures,” Opt. Express 21, 16901–16907 (2013).
[Crossref] [PubMed]

K. Kokkonen and M. Kaivola, “Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations,” Appl. Phys. Lett. 92, 063502 (2008).
[Crossref]

V. Laude, K. Kokkonen, and S. Benchabane, “Characterization of surface acoustic wave focusing by an annular interdigital transducer,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 919–922.

K. Kokkonen, “Laser interferometers in physical acoustics,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 1036–1043.

Korpel, A.

Labonté, L.

Larson, I. J. D.

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

Laude, V.

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

V. Laude, K. Kokkonen, and S. Benchabane, “Characterization of surface acoustic wave focusing by an annular interdigital transducer,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 919–922.

Leproux, P.

Lipiäinen, L.

Ludvigsen, H.

Monchalin, J. P.

J. P. Monchalin, “Optical detection of ultrasound,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 33, 485–499 (1986).
[Crossref]

Nérin, P.

Nguyen, X.-L.

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Novotny, S.

Petitgrand, S.

A. Bosseboeuf and S. Petitgrand, “Characterization of the static and dynamic behaviour of m(o)ems by optical techniques: status and trends,” J. Micromech. Microeng. 13, S23–S33 (2003).
[Crossref]

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

Roy, P.

Sainiemi, L.

Salomaa, M. M.

Shavrin, I.

Telschow, K. L.

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

Tikka, P. T.

G. G. Fattinger and P. T. Tikka, “Modified Mach-Zehnder laser interferometer for probing bulk acoustic waves,” Appl. Phys. Lett. 79, 290–292 (2001).
[Crossref]

J. V. Knuuttila, P. T. Tikka, and M. M. Salomaa, “Scanning Michelson interferometer for imaging surface acoustic wave fields,” Opt. Lett. 25, 613–615 (2000).
[Crossref]

Tombelaine, V.

Whitman, R. L.

Yahiaoui, R.

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (4)

G. G. Fattinger and P. T. Tikka, “Modified Mach-Zehnder laser interferometer for probing bulk acoustic waves,” Appl. Phys. Lett. 79, 290–292 (2001).
[Crossref]

J. E. Graebner, B. P. Barber, P. L. Gammel, D. S. Greywall, and S. Gopani, “Dynamic visualization of sub-angstrom high-frequency surface vibrations,” Appl. Phys. Lett. 78, 159–161 (2001).
[Crossref]

K. Kokkonen and M. Kaivola, “Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations,” Appl. Phys. Lett. 92, 063502 (2008).
[Crossref]

V. Laude, D. Gérard, N. Khelfaoui, C. F. Jerez-Hanckes, S. Benchabane, and A. Khelif, “Subwavelength focusing of surface acoustic waves generated by an annular interdigital transducer,” Appl. Phys. Lett. 92, 094104 (2008).
[Crossref]

IEEE Trans. Ultrason., Ferroelect., Freq. Contr. (2)

K. L. Telschow, V. A. Deason, D. L. Cottle, and I. J. D. Larson, “Full-field imaging of gigahertz film bulk acoustic resonator motion,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 50, 1279–1285 (2003).
[Crossref]

J. P. Monchalin, “Optical detection of ultrasound,” IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 33, 485–499 (1986).
[Crossref]

J. Micromech. Microeng. (1)

A. Bosseboeuf and S. Petitgrand, “Characterization of the static and dynamic behaviour of m(o)ems by optical techniques: status and trends,” J. Micromech. Microeng. 13, S23–S33 (2003).
[Crossref]

Opt. Express (3)

Opt. Laser. Eng. (2)

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, and J. Gilles, “3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope,” Opt. Laser. Eng. 36, 77–101 (2001).
[Crossref]

L.-C. Chen, Y.-T. Huang, X.-L. Nguyen, J.-L. Chen, and C.-C. Chang, “Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm,” Opt. Laser. Eng. 47, 237–251 (2009).
[Crossref]

Opt. Lett. (2)

Other (3)

V. Laude, K. Kokkonen, and S. Benchabane, “Characterization of surface acoustic wave focusing by an annular interdigital transducer,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 919–922.

S. Donati, Electro-Optical Instrumentation: Sensing and Measuring with Lasers (Prentice Hall, 2004).

K. Kokkonen, “Laser interferometers in physical acoustics,” in “Ultrasonics Symposium (IUS), 2009 IEEE International,” (2009), pp. 1036–1043.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (2)

Fig. 1
Fig. 1 Schematic presentation of the Michelson-type SWLI setup utilizing a supercontinuum source. (a) Measured averaged illumination pulse spectrum. (b) Measured temporal width of the illumination pulse. (c) Illustration of optical pulses synchronized to the electrical excitation of the sample. The sample is periodically illuminated at the 72nd sub-harmonic frequency of the vibration. The relative phase, θ, between the two signals is controlled to acquire the instantaneous surface deflection at a number of phase values indicated on the sine wave by black dots (pulses at 0° and 160° provided for illustration).
Fig. 2
Fig. 2 (a) Microscope image of the AIDT intended to excite SAWs to form an intense focal spot. The measurement area within the AIDT is denoted by gray shading and a dashed border line. (b) 3D view of the instantaneous surface vibration obtained by combining the amplitude and phase information. Amplitude (c) and phase (d) fields of the surface vibration, obtained from the SWLI measurement data.

Metrics