Abstract

In this work, optical properties of epitaxial CaxBa1-xNb2O6, CBN (x = 0.28) thin film based waveguides are studied at 1550 nm optical communications wavelength. CBN thin films are deposited epitaxially on MgO substrates using Pulsed Laser Deposition and characterized by prism coupling to extract the refractive index and propagation loss. It is shown that the 2 µm-thick epitaxial CBN thin films have a refractive index close to the bulk form and the CBN planar waveguides have a propagation loss of 4.3 ± 0.5 dB/cm. 1 cm-long rib waveguide structures were fabricated using a high density plasma etching. Their propagation losses were measured by the cutback method at 8.4 ± 0.6 dB/cm.

© 2016 Optical Society of America

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    [Crossref]
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    [Crossref]
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    [Crossref]
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2016 (2)

2014 (1)

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

2013 (2)

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

2012 (1)

2011 (2)

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

2009 (1)

2008 (1)

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

2007 (3)

F. Lucchi, D. Janner, M. Belmonte, S. Balsamo, M. Villa, S. Giurgiola, P. Vergani, and V. Pruneri, “Very low voltage single drive domain inverted LiNbO3 integrated electro-optic modulator,” Opt. Express 15(17), 10739–10743 (2007).
[Crossref] [PubMed]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

2006 (2)

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

2003 (1)

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

2002 (1)

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

2000 (1)

T. A. Ramadan, M. Levy, and R. M. Osgood, “Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films,” Appl. Phys. Lett. 76(11), 1407 (2000).
[Crossref]

1998 (1)

1997 (1)

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

1996 (1)

P. Tayebati, D. Trivedi, and M. Tabat, “Pulsed laser deposition of SBN: 75 thin films with electrooptic coefficient of 844 pm / V,” Appl. Phys. Lett. 69(8), 1023 (1996).
[Crossref]

1994 (1)

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 (1994).
[Crossref]

1971 (1)

Argiolas, N.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Balsamo, S.

Bancelin, S.

Bazzan, M.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Bellotti, J. A.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Belmonte, M.

Bentini, G. G.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Bianconi, M.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Bulut, S.

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Burianek, M.

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Chaker, M.

S. Vigne, N. Hossain, S. M. H. Kabir, J. Margot, K. Wu, and M. Chaker, “Structural and optical properties of CaxBa1-xNb2O6 thin films deposited by radio frequency magnetron sputtering,” Opt. Mater. Express 5(11), 2404–2414 (2016).
[Crossref]

S. Bancelin, S. Vigne, N. Hossain, M. Chaker, and F. Légaré, “Nonlinear optical properties of calcium barium niobate epitaxial thin films,” Opt. Express 24(15), 17497–17504 (2016).
[Crossref] [PubMed]

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Chen, F.

Chiarini, M.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Conrad, C. W.

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

Correra, L.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Degl’Innocenti, R.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Delprat, S.

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

Duchesne, D.

Durand, C.

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Eßer, M.

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Ferrera, M.

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Fesharaki, F.

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

Ford, G.

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

Gaidi, M.

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Garzarella, A.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Gill, D. M.

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

Giurgiola, S.

Guarino, A.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Günter, P.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Guzzi, R.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Held, P.

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Helsten, R.

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Hiltunen, J.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Ho, S. T.

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

Hossain, N.

Hu, H.

Janner, D.

Kabir, S. M. H.

Lacey, J. P. R.

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 (1994).
[Crossref]

Lantto, V.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Lappalainen, J.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Légaré, F.

Levy, M.

T. A. Ramadan, M. Levy, and R. M. Osgood, “Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films,” Appl. Phys. Lett. 76(11), 1407 (2000).
[Crossref]

Lu, F.

Lucchi, F.

Mahadik, N. A.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Margot, J.

S. Vigne, N. Hossain, S. M. H. Kabir, J. Margot, K. Wu, and M. Chaker, “Structural and optical properties of CaxBa1-xNb2O6 thin films deposited by radio frequency magnetron sputtering,” Opt. Mater. Express 5(11), 2404–2414 (2016).
[Crossref]

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

Mazzoldi, P.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Mitomi, O.

Miyazawa, H.

Morandotti, R.

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Mortazy, E.

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

Mühlberg, M.

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Muñoz, J.

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

Ndione, P. F.

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Noguchi, K.

Osgood, R. M.

T. A. Ramadan, M. Levy, and R. M. Osgood, “Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films,” Appl. Phys. Lett. 76(11), 1407 (2000).
[Crossref]

Pandey, C. S.

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

Payne, F. P.

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 (1994).
[Crossref]

Poberaj, G.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Pruneri, V.

Qadri, S. B.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Ramadan, T. A.

T. A. Ramadan, M. Levy, and R. M. Osgood, “Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films,” Appl. Phys. Lett. 76(11), 1407 (2000).
[Crossref]

Razzari, L.

P. F. Ndione, M. Ferrera, D. Duchesne, L. Razzari, M. Gaidi, M. Chaker, and R. Morandotti, “Hybrid integration of Ca 0.28 Ba 0.72 Nb2O6 thin film electro-optic waveguides with silica/silicon substrates,” Opt. Express 17(17), 15128–15133 (2009).
[Crossref] [PubMed]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Rezzonico, D.

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Rioux, G.

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

Sada, C.

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

Schreuer, J.

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

Seneviratne, D.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Stade, J.

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Stateikina, I.

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

Stolfi, M.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Sun, R.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Tabat, M.

P. Tayebati, D. Trivedi, and M. Tabat, “Pulsed laser deposition of SBN: 75 thin films with electrooptic coefficient of 844 pm / V,” Appl. Phys. Lett. 69(8), 1023 (1996).
[Crossref]

Tayebati, P.

P. Tayebati, D. Trivedi, and M. Tabat, “Pulsed laser deposition of SBN: 75 thin films with electrooptic coefficient of 844 pm / V,” Appl. Phys. Lett. 69(8), 1023 (1996).
[Crossref]

Tehranchi, A.

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

Tien, P. K.

Trivedi, D.

P. Tayebati, D. Trivedi, and M. Tabat, “Pulsed laser deposition of SBN: 75 thin films with electrooptic coefficient of 844 pm / V,” Appl. Phys. Lett. 69(8), 1023 (1996).
[Crossref]

Tuller, H. L.

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

Vergani, P.

Vigne, S.

S. Vigne, N. Hossain, S. M. H. Kabir, J. Margot, K. Wu, and M. Chaker, “Structural and optical properties of CaxBa1-xNb2O6 thin films deposited by radio frequency magnetron sputtering,” Opt. Mater. Express 5(11), 2404–2414 (2016).
[Crossref]

S. Bancelin, S. Vigne, N. Hossain, M. Chaker, and F. Légaré, “Nonlinear optical properties of calcium barium niobate epitaxial thin films,” Opt. Express 24(15), 17497–17504 (2016).
[Crossref] [PubMed]

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

Villa, M.

Wang, K. M.

Wang, X. L.

Wessels, B. W.

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

Wickleder, C.

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

Wieting, T.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Wu, D. H.

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

Wu, K.

S. Vigne, N. Hossain, S. M. H. Kabir, J. Margot, K. Wu, and M. Chaker, “Structural and optical properties of CaxBa1-xNb2O6 thin films deposited by radio frequency magnetron sputtering,” Opt. Mater. Express 5(11), 2404–2414 (2016).
[Crossref]

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (6)

T. A. Ramadan, M. Levy, and R. M. Osgood, “Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films,” Appl. Phys. Lett. 76(11), 1407 (2000).
[Crossref]

D. M. Gill, C. W. Conrad, G. Ford, B. W. Wessels, and S. T. Ho, “Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3,” Appl. Phys. Lett. 71(13), 1783 (1997).
[Crossref]

J. Hiltunen, D. Seneviratne, R. Sun, M. Stolfi, H. L. Tuller, J. Lappalainen, and V. Lantto, “BaTiO3-SrTiO3 multilayer thin film electro-optic waveguide modulator,” Appl. Phys. Lett. 89(24), 242904 (2006).
[Crossref]

P. Tayebati, D. Trivedi, and M. Tabat, “Pulsed laser deposition of SBN: 75 thin films with electrooptic coefficient of 844 pm / V,” Appl. Phys. Lett. 69(8), 1023 (1996).
[Crossref]

S. B. Qadri, J. A. Bellotti, A. Garzarella, T. Wieting, D. H. Wu, and N. A. Mahadik, “Phase transition in Sr0.75 Ba0.25 Nb O3 near the Curie temperature,” Appl. Phys. Lett. 89(22), 222911 (2006).
[Crossref]

R. Helsten, L. Razzari, M. Ferrera, P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, and R. Morandotti, “Pockels response in calcium barium niobate thin films,” Appl. Phys. Lett. 91(26), 261101 (2007).
[Crossref]

Cryst. Res. Technol. (1)

M. Eßer, M. Burianek, P. Held, J. Stade, S. Bulut, C. Wickleder, and M. Mühlberg, “Optical characterization and crystal structure of the novel bronze type CaxBa1-xNb2O6 (x=0.28; CBN-28),” Cryst. Res. Technol. 38(6), 457–464 (2003).
[Crossref]

IEEE Photonics Technol. Lett. (1)

F. Fesharaki, N. Hossain, S. Vigne, J. Margot, K. Wu, and M. Chaker, “theoretical analysis and experimental evaluation of SiO2-CBN-MgO rib waveguide structure,” IEEE Photonics Technol. Lett. 26(18), 1821–1824 (2014).
[Crossref]

J. Appl. Phys. (3)

S. Vigne, S. Delprat, M. Chaker, and J. Margot, “Investigation of nickel as hard mask for patterning multicomponent oxide materials in chlorine plasmas,” J. Appl. Phys. 114(10), 103303 (2013).
[Crossref]

G. G. Bentini, M. Bianconi, M. Chiarini, L. Correra, C. Sada, P. Mazzoldi, N. Argiolas, M. Bazzan, and R. Guzzi, “Effect of low dose high energy O 3 + implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: planar optical waveguide formation and characterization,” J. Appl. Phys. 92(11), 6477 (2002).
[Crossref]

P. F. Ndione, M. Gaidi, C. Durand, M. Chaker, R. Morandotti, and G. Rioux, “Structural and optical properties of epitaxial CaxBa1-xNb2O6 thin films grown on MgO by pulsed laser deposition,” J. Appl. Phys. 103(3), 033510 (2008).
[Crossref]

J. Lightwave Technol. (1)

Microelectron. Eng. (2)

E. Mortazy, I. Stateikina, A. Tehranchi, S. Delprat, M. Chaker, and K. Wu, “Low-loss CaxBa1-xNb2O6 ridge waveguide for electro-optic devices,” Microelectron. Eng. 88(3), 218–221 (2011).
[Crossref]

S. Vigne, J. Muñoz, S. Delprat, J. Margot, and M. Chaker, “Plasma etching dynamics of CaxBa1-xNb2O6 (CBN) material,” Microelectron. Eng. 110, 265–269 (2013).
[Crossref]

Nat. Photonics (1)

A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, and P. Günter, “Electro–optically tunable microring resonators in lithium niobate,” Nat. Photonics 1(7), 407–410 (2007).
[Crossref]

Opt. Express (4)

Opt. Mater. Express (1)

Opt. Quantum Electron. (1)

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 (1994).
[Crossref]

Phys. Rev. B (1)

C. S. Pandey, J. Schreuer, M. Burianek, and M. Mühlberg, “Anomalous elastic behavior of relaxor ferroelectric Ca0.28Ba0.72Nb2O6 single crystals,” Phys. Rev. B 84(17), 174102 (2011).
[Crossref]

Other (1)

“Generic Reliability Assurance Requirements for Optoelectronic Devices Used in Telecommunications Equipment”, Telcordia document number GR-468, Piscataway, NJ, Telcordia (2004)

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Figures (7)

Fig. 1
Fig. 1 XRD out-of-plane θ-2θ pattern of CBN thin film deposited on MgO with (a) 2 µm, (b) 1.5 µm and (c) 1 µm thickness. (d) Typical in-plane Φ-scan of the oblique (311) plan of CBN / MgO, (e) Rocking Curve measurement of the (001) family of planes of CBN. The red line represents the fitting used to determine the FWHM.
Fig. 2
Fig. 2 SAED patterns of (a) MgO and (b) CBN/MgO film along the MgO [001] axis.
Fig. 3
Fig. 3 Typical SEM image of the surface of epitaxial CBN / MgO deposited by PLD.
Fig. 4
Fig. 4 Reflected intensity from prism coupling measurement of a) 2 µm, b) 1.5µm and c) 1 µm thick epitaxial CBN thin films deposited on MgO, the arrows represent the substrate cut-off angle.
Fig. 5
Fig. 5 (a) Scattered light from the top of the CBN sample measured by fiber scanning, inset: zoom on the linear region, suitable for propagation loss measurement, (b) Measured propagation loss as a function of the CBN thickness.
Fig. 6
Fig. 6 (a) Typical cross-section SEM image of the fabricated waveguide, (b) Schematic of the fabricated multilayer structure.
Fig. 7
Fig. 7 Total loss as a function of waveguide length to estimate the facet loss and propagation loss. (inset) Typical mode profile at the output of the waveguide.

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