Abstract

Diamond is a promising platform for quantum information technologies (QITs) mainly due to the properties of color centers including spin read-out, magnetic field sensing, and entanglement between different nitrogen-vacancy (NV) centers. High photon collection efficiency is essential for a high fidelity optical single-shot readout of electronic spin in the color center. To avoid total internal reflection, sculpting solid immersion lenses in the diamond surface is an ideal natural choice. Three-dimensional (3D) microstructures can be made in a photoresist material by a special lithography method. These structures can be subsequently transferred into silicon, diamond or other semiconductors by plasma etching with appropriate selectivity. However, this method cannot be directly implemented into making large height diamond microlenses where the selectivity between diamond and the photoresist is very low. In this work, we propose and demonstrate a dual mask method to achieve an overall high selectivity between diamond and photoresist via the interlayer of single crystalline silicon. By tuning the process parameters of the two etching steps, diamond micro-lenses with large variable height are successfully demonstrated..

© 2017 Optical Society of America

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2017 (2)

Y. Li, Y. Zhang, L. Liu, and C. Yang, “Diamond micro-lenses with variable height using self-assembly silica-microsphere-monolayer as etching mask,” Mater. Today Commun. 11, 119–122 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25, 1185–1192 (2017).
[Crossref] [PubMed]

2015 (7)

L. Li, I. Bayn, M. Lu, C.-Y. Nam, T. Schroeder, A. Stein, N. C. Harris, and D. Englund, “Nanofabrication on unconventional substrates using transferred hard masks,” Sci. Rep. 5, 7802 (2015).
[Crossref] [PubMed]

T. Iwasaki, F. Ishibashi, Y. Miyamoto, Y. Doi, S. Kobayashi, T. Miyazaki, K. Tahara, K. D. Jahnke, L. J. Rogers, B. Naydenov, F. Jelezko, S. Yamasaki, S. Nagamachi, T. Inubushi, N. Mizuochi, and M. Hatano, “Germanium-vacancy single color centers in diamond,” Sci. Rep. 5, 12882 (2015).
[Crossref] [PubMed]

B. Hensen, H. Bernien, A. E. Dreau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellan, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
[Crossref] [PubMed]

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photon. 9, 363–373 (2015).
[Crossref]

S. A. Momenzadeh, R. J. Stoehr, F. F. de Oliveira, A. Brunner, A. Denisenko, S. Yang, F. Reinhard, and J. Wrachtrup, “Nanoengineered diamond waveguide as a robust bright platform for nanomagnetometry using shallow nitrogen vacancy centers,” Nano Lett. 15, 165–169 (2015).
[Crossref]

S. Furuyama, K. Tahara, T. Iwasaki, M. Shimizu, J. Yaita, M. Kondo, T. Kodera, and M. Hatano, “Improvement of fluorescence intensity of nitrogen vacancy centers in self-formed diamond microstructures,” Appl. Phys. Lett. 107, 163102 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q monolithic diamond microdisks fabricated with quasi-isotropic etching,” Nano Lett. 15, 5131–5136 (2015).
[Crossref] [PubMed]

2014 (8)

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22, 13555–13564 (2014).
[Crossref] [PubMed]

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85, 123703 (2014).
[Crossref]

D. G. Monticone, J. Forneris, M. Levi, A. Battiato, F. Picollo, P. Olivero, P. Traina, E. Moreva, E. Enrico, G. Brida, I. P. Degiovanni, M. Genovese, G. Amato, and L. Boarino, “Single-photon emitters based on NIR color centers in diamond coupled with solid immersion lenses,” Internation. J. Quan. Infor. 12, 1560011 (2014).
[Crossref]

L. J. Rogers, K. D. Jahnke, T. Teraji, L. Marseglia, C. Mueller, B. Naydenov, H. Schauffert, C. Kranz, J. Isoya, L. P. McGuinness, and F. Jelezko, “Multiple intrinsically identical single-photon emitters in the solid state,” Nat. Commun. 5, 4739 (2014).
[Crossref] [PubMed]

W. Pfaff, B. J. Hensen, H. Bernien, S. B. van Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
[Crossref] [PubMed]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photon. 8, 369–374 (2014).
[Crossref]

A. F. Khokhryakov, Y. N. Palyanov, I. N. Kupriyanov, Y. M. Borzdov, and A. G. Sokol, “Effect of nitrogen impurity on the dislocation structure of large HPHT synthetic diamond crystals,” J. Cryst. Growth 386, 162–167 (2014).
[Crossref]

O. Fox, L. Alianelli, A. Malik, I. Pape, P. May, and K. Sawhney, “Nanofocusing optics for synchrotron radiation made from polycrystalline diamond,” Opt. Express 22, 7657–7668 (2014).
[Crossref] [PubMed]

2013 (4)

P. Forsberg and M. Karlsson, “High aspect ratio optical gratings in diamond,” Diam. Relat. Mater. 34, 19–24 (2013).
[Crossref]

I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro-and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
[Crossref] [PubMed]

B. J. M. Hausmann, B. J. Shields, Q. Quan, Y. Chu, N. P. de Leon, R. Evans, M. J. Burek, A. S. Zibrov, M. Markham, D. J. Twitchen, H. Park, M. D. Lukin, and M. Loncar, “Coupling of NV centers to photonic crystal nanobeams in diamond,” Nano Lett. 13, 5791–5796 (2013).
[Crossref] [PubMed]

2012 (4)

J. Riedrich-Moeller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Muecklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotech. 7, 69–74 (2012).
[Crossref]

B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
[Crossref] [PubMed]

K. Beha, H. Fedder, M. Wolfer, M. C. Becker, P. Siyushev, M. Jamali, A. Batalov, C. Hinz, J. Hees, L. Kirste, H. Obloh, E. Gheeraert, B. Naydenov, I. Jakobi, F. Dolde, S. Pezzagna, D. Twittchen, M. Markham, D. Dregely, H. Giessen, J. Meijer, F. Jelezko, C. E. Nebel, R. Bratschitsch, A. Leitenstorfer, and J. Wrachtrup, “Diamond nanophotonics,” Beilstein J. Nanotech. 3, 895–908 (2012).
[Crossref]

D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
[Crossref]

2011 (8)

I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photon. 5, 397–405 (2011).
[Crossref]

F. Dolde, H. Fedder, M. W. Doherty, T. Noebauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
[Crossref]

G. Waldherr, P. Neumann, S. F. Huelga, F. Jelezko, and J. Wrachtrup, “Violation of a temporal Bell inequality for single spins in a diamond defect center,” Phys. Rev. Lett. 107, 090401 (2011).
[Crossref] [PubMed]

L. Robledo, L. Childress, H. Bernien, B. Hensen, P. F. A. Alkemade, and R. Hanson, “High-fidelity projective read-out of a solid-state spin quantum register,” Nature 477, 574–578 (2011).
[Crossref] [PubMed]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[Crossref]

Y. Zhang, L. McKnight, Z. Tian, S. Calvez, E. Gu, and M. D. Dawson, “Large cross-section edge-coupled diamond waveguides,” Diam. Relat. Mater. 20, 564–567 (2011).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photon. 5, 301–305 (2011).
[Crossref]

L. Marseglia, J. P. Hadden, A. C. Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, and J. L. O’Brien, “Nanofabricated solid immersion lenses registered to single emitters in diamond,” Appl. Phys. Lett. 98, 133107 (2011).
[Crossref]

2010 (2)

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).
[Crossref]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotech. 5, 195–199 (2010).
[Crossref]

2009 (2)

L. Jiang, J. S. Hodges, J. R. Maze, P. Maurer, J. M. Taylor, D. G. Cory, P. R. Hemmer, R. L. Walsworth, A. Yacoby, A. S. Zibrov, and M. D. Lukin, “Repetitive readout of a single electronic spin via quantum logic with nuclear spin ancillae,” Science 326, 267–272 (2009).
[Crossref] [PubMed]

P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
[Crossref] [PubMed]

2008 (3)

K. M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
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A. D. Greentree, B. A. Fairchild, F. M. Hossain, and S. Prawer, “Diamond integrated quantum photonics,” Mater. Today 11, 22–31 (2008).
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2006 (2)

F. Jelezko and J. Wrachtrup, “Single defect centres in diamond: A review,” Phys. Status Solidi A 203, 3207–3225 (2006).
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M. Shinoda, K. Saito, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda, M. Yamamoto, T. Schaich, B. Van Oerle, H. Godfried, P. Kriele, E. Houwman, W. Nelissen, G. Pels, and P. Spaaij, “High-density near-field readout using diamond solid immersion lens,” J. J. Appl. Phys. Part 1  45, 1311–1313 (2006).
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2005 (1)

H. Choi, E. Gu, C. Liu, C. Griffin, J. Girkin, I. Watson, and M. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Tech. B 23, 130–132 (2005).
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2001 (1)

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2000 (2)

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B. Hensen, H. Bernien, A. E. Dreau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellan, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
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I. Aharonovich, J. C. Lee, A. P. Magyar, D. O. Bracher, and E. L. Hu, “Bottom-up engineering of diamond micro-and nano-structures,” Laser Photon. Rev. 7, L61–L65 (2013).
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I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photon. 5, 397–405 (2011).
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L. Robledo, L. Childress, H. Bernien, B. Hensen, P. F. A. Alkemade, and R. Hanson, “High-fidelity projective read-out of a solid-state spin quantum register,” Nature 477, 574–578 (2011).
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D. G. Monticone, J. Forneris, M. Levi, A. Battiato, F. Picollo, P. Olivero, P. Traina, E. Moreva, E. Enrico, G. Brida, I. P. Degiovanni, M. Genovese, G. Amato, and L. Boarino, “Single-photon emitters based on NIR color centers in diamond coupled with solid immersion lenses,” Internation. J. Quan. Infor. 12, 1560011 (2014).
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B. Hensen, H. Bernien, A. E. Dreau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellan, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526, 682–686 (2015).
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B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
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F. Dolde, H. Fedder, M. W. Doherty, T. Noebauer, F. Rempp, G. Balasubramanian, T. Wolf, F. Reinhard, L. C. L. Hollenberg, F. Jelezko, and J. Wrachtrup, “Electric-field sensing using single diamond spins,” Nat. Phys. 7, 459–463 (2011).
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A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photon. 5, 301–305 (2011).
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P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
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D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
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K. Beha, H. Fedder, M. Wolfer, M. C. Becker, P. Siyushev, M. Jamali, A. Batalov, C. Hinz, J. Hees, L. Kirste, H. Obloh, E. Gheeraert, B. Naydenov, I. Jakobi, F. Dolde, S. Pezzagna, D. Twittchen, M. Markham, D. Dregely, H. Giessen, J. Meijer, F. Jelezko, C. E. Nebel, R. Bratschitsch, A. Leitenstorfer, and J. Wrachtrup, “Diamond nanophotonics,” Beilstein J. Nanotech. 3, 895–908 (2012).
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D. G. Monticone, J. Forneris, M. Levi, A. Battiato, F. Picollo, P. Olivero, P. Traina, E. Moreva, E. Enrico, G. Brida, I. P. Degiovanni, M. Genovese, G. Amato, and L. Boarino, “Single-photon emitters based on NIR color centers in diamond coupled with solid immersion lenses,” Internation. J. Quan. Infor. 12, 1560011 (2014).
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A. Faraon, P. E. Barclay, C. Santori, K.-M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photon. 5, 301–305 (2011).
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P. E. Barclay, K.-M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17, 9588–9601 (2009).
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K. M. C. Fu, C. Santori, P. E. Barclay, I. Aharonovich, S. Prawer, N. Meyer, A. M. Holm, and R. G. Beausoleil, “Coupling of nitrogen-vacancy centers in diamond to a GaP waveguide,” Appl. Phys. Lett. 93, 234107 (2008).
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K. Beha, H. Fedder, M. Wolfer, M. C. Becker, P. Siyushev, M. Jamali, A. Batalov, C. Hinz, J. Hees, L. Kirste, H. Obloh, E. Gheeraert, B. Naydenov, I. Jakobi, F. Dolde, S. Pezzagna, D. Twittchen, M. Markham, D. Dregely, H. Giessen, J. Meijer, F. Jelezko, C. E. Nebel, R. Bratschitsch, A. Leitenstorfer, and J. Wrachtrup, “Diamond nanophotonics,” Beilstein J. Nanotech. 3, 895–908 (2012).
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K. Beha, H. Fedder, M. Wolfer, M. C. Becker, P. Siyushev, M. Jamali, A. Batalov, C. Hinz, J. Hees, L. Kirste, H. Obloh, E. Gheeraert, B. Naydenov, I. Jakobi, F. Dolde, S. Pezzagna, D. Twittchen, M. Markham, D. Dregely, H. Giessen, J. Meijer, F. Jelezko, C. E. Nebel, R. Bratschitsch, A. Leitenstorfer, and J. Wrachtrup, “Diamond nanophotonics,” Beilstein J. Nanotech. 3, 895–908 (2012).
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D. Le Sage, L. M. Pham, N. Bar-Gill, C. Belthangady, M. D. Lukin, A. Yacoby, and R. L. Walsworth, “Efficient photon detection from color centers in a diamond optical waveguide,” Phys. Rev. B 85, 121202 (2012).
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W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photon. 9, 363–373 (2015).
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W. Pfaff, B. J. Hensen, H. Bernien, S. B. van Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
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H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497, 86–90 (2013).
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L. Robledo, L. Childress, H. Bernien, B. Hensen, P. F. A. Alkemade, and R. Hanson, “High-fidelity projective read-out of a solid-state spin quantum register,” Nature 477, 574–578 (2011).
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W. Pfaff, B. J. Hensen, H. Bernien, S. B. van Dam, M. S. Blok, T. H. Taminiau, M. J. Tiggelman, R. N. Schouten, M. Markham, D. J. Twitchen, and R. Hanson, “Unconditional quantum teleportation between distant solid-state quantum bits,” Science 345, 532–535 (2014).
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K. Beha, H. Fedder, M. Wolfer, M. C. Becker, P. Siyushev, M. Jamali, A. Batalov, C. Hinz, J. Hees, L. Kirste, H. Obloh, E. Gheeraert, B. Naydenov, I. Jakobi, F. Dolde, S. Pezzagna, D. Twittchen, M. Markham, D. Dregely, H. Giessen, J. Meijer, F. Jelezko, C. E. Nebel, R. Bratschitsch, A. Leitenstorfer, and J. Wrachtrup, “Diamond nanophotonics,” Beilstein J. Nanotech. 3, 895–908 (2012).
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L. Robledo, L. Childress, H. Bernien, B. Hensen, P. F. A. Alkemade, and R. Hanson, “High-fidelity projective read-out of a solid-state spin quantum register,” Nature 477, 574–578 (2011).
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H. Choi, E. Gu, C. Liu, C. Griffin, J. Girkin, I. Watson, and M. Dawson, “Fabrication of natural diamond microlenses by plasma etching,” J. Vac. Sci. Tech. B 23, 130–132 (2005).
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B. J. M. Hausmann, B. Shields, Q. Quan, P. Maletinsky, M. McCutcheon, J. T. Choy, T. M. Babinec, A. Kubanek, A. Yacoby, M. D. Lukin, and M. Loncar, “Integrated diamond networks for quantum nanophotonics,” Nano Lett. 12, 1578–1582 (2012).
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Y. Zhang, L. McKnight, Z. Tian, S. Calvez, E. Gu, and M. D. Dawson, “Large cross-section edge-coupled diamond waveguides,” Diam. Relat. Mater. 20, 564–567 (2011).
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Appl. Phys. Lett. (4)

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y. L. D. Ho, B. R. Patton, J. L. O’Brien, and J. G. Rarity, “Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses,” Appl. Phys. Lett. 97, 241901 (2010).
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Figures (7)

Fig. 1
Fig. 1 Diagram of an ideal semi-ellipsoid.
Fig. 2
Fig. 2 Fabrication process of diamond near-hemisphere microlens: (a) photoresist was spun on an SOI substrate; (b) photoresist microdisk was patterned; (c) reflowed photoresist microlens; (d) plasma etched silicon microlens; (e) BOE etched SOI substrate, buried oxide layer removed; (f–g) PDMS tip-based pick-and-place transfer technique was used to move the suspended silicon microlens array onto a diamond substrate; (h) diamond near hemisphere microlens are etched down using silicon thin film mask.
Fig. 3
Fig. 3 Photoresist microlens and silicon microlens: (a) optical image of photoresist microlens; (b) measured surface profile of photoresist microlens; (c) optical image of silicon microlens; (d) measured surface profile of silicon microlens.
Fig. 4
Fig. 4 Fabricating diamond microlens: (a) silicon mask on diamond substrate; (b) fabricated diamond microlens.
Fig. 5
Fig. 5 Etching rate of silicon and selectivity between diamond/silicon under different gas mixtrues.
Fig. 6
Fig. 6 Diamond microlens with various heights [(1) SEM images and (2) surface profile measurements with ellipsoid fitting results]: (a) height: 10 μm, SF6 flow rate: 6 sccm; (b) height: 12 μm, SF6 flow rate: 5 sccm; (c) height: 19 μm, SF6 flow rate: 3 sccm.
Fig. 7
Fig. 7 AFM measurement on top of a diamond microlens: (a) the scanned result showing a curved microlens surface; (b) flattened result where the microlens curve surface (reference background) has been subtracted.

Equations (3)

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x 2 r 2 + y 2 h 2 = 1 ( y > 0 )
1 h 2 r 2 1 + h 2 r 2 < n cladding n diamond
h > 0.64 r

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