D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, and S. Bajt, “Extended asymmetric-cut multilayer X-ray gratings,” Opt. Express 23(12), 15195–15204 (2015).
[Crossref]
[PubMed]
S. Bajt, H. N. Chapman, A. Aquila, and E. Gullikson, “High-efficiency x-ray gratings with asymmetric-cut multilayers,” J. Opt. Soc. Am. A 29(3), 216–230 (2012).
[Crossref]
[PubMed]
R. G. Cruddace, T. W. Barbee, J. C. Rife, and W. R. Hunter, “Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating,” Phys. Scr. 41(4), 396–399 (1990).
[Crossref]
T. W. Barbee., “Multilayers For X-Ray Optics,” Opt. Eng. 25(8), 898–915 (1986).
[Crossref]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
R. van der Meer, I. V. Kozhevnikov, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings,” Opt. Express 21(11), 13105–13117 (2013).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Analytic theory of soft x-ray diffraction by lamellar multilayer gratings,” Opt. Express 19(10), 9172–9184 (2011).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime,” Opt. Express 18(15), 16234–16242 (2010).
[Crossref]
[PubMed]
Q. Huang, V. Medvedev, R. van de Kruijs, A. Yakshin, E. Louis, and F. Bijkerk, “Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics,” Appl. Phys. Rev. 4(1), 011104 (2017).
[Crossref]
F. Senf, F. Bijkerk, F. Eggenstein, G. Gwalt, Q. Huang, R. Kruijs, O. Kutz, S. Lemke, E. Louis, M. Mertin, I. Packe, I. Rudolph, F. Schäfers, F. Siewert, A. Sokolov, J. M. Sturm, Ch. Waberski, Z. Wang, J. Wolf, T. Zeschke, and A. Erko, “Highly efficient blazed grating with multilayer coating for tender X-ray energies,” Opt. Express 24(12), 13220–13230 (2016).
[Crossref]
[PubMed]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
R. van der Meer, I. V. Kozhevnikov, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings,” Opt. Express 21(11), 13105–13117 (2013).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Analytic theory of soft x-ray diffraction by lamellar multilayer gratings,” Opt. Express 19(10), 9172–9184 (2011).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime,” Opt. Express 18(15), 16234–16242 (2010).
[Crossref]
[PubMed]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
R. van der Meer, I. V. Kozhevnikov, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings,” Opt. Express 21(11), 13105–13117 (2013).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Analytic theory of soft x-ray diffraction by lamellar multilayer gratings,” Opt. Express 19(10), 9172–9184 (2011).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime,” Opt. Express 18(15), 16234–16242 (2010).
[Crossref]
[PubMed]
F. Choueikani, B. Lagarde, F. Delmotte, M. Krumrey, F. Bridou, M. Thomasset, E. Meltchakov, and F. Polack, “High-efficiency B4C/Mo2C alternate multilayer grating for monochromators in the photon energy range from 0.7 to 3.4 keV,” Opt. Lett. 39(7), 2141–2144 (2014).
[Crossref]
[PubMed]
F. Choueikani, F. Delmotte, F. Bridou, B. Lagarde, P. Mercere, E. Otero, P. Ohresser, and F. Polack, “Preparation for B4C/Mo2C multilayer deposition of alternate multilayer gratings with high efficiency in the 0.5-2.5 keV energy range,” J. Phys. Conf. Ser. 425(15), 152007 (2013).
[Crossref]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
B. Lagarde, F. Choueikani, B. Capitanio, P. Ohresser, E. Meltchakov, F. Delmotte, M. Krumrey, and F. Polack, “High efficiency multilayer gratings for monochromators in the energy range from 500 eV to 2500 eV,” J. Phys. Conf. Ser. 425(15), 152012 (2013).
[Crossref]
M. Prasciolu, A. Haase, F. Scholze, H. N. Chapman, and S. Bajt, “Extended asymmetric-cut multilayer X-ray gratings,” Opt. Express 23(12), 15195–15204 (2015).
[Crossref]
[PubMed]
S. Bajt, H. N. Chapman, A. Aquila, and E. Gullikson, “High-efficiency x-ray gratings with asymmetric-cut multilayers,” J. Opt. Soc. Am. A 29(3), 216–230 (2012).
[Crossref]
[PubMed]
F. Choueikani, B. Lagarde, F. Delmotte, M. Krumrey, F. Bridou, M. Thomasset, E. Meltchakov, and F. Polack, “High-efficiency B4C/Mo2C alternate multilayer grating for monochromators in the photon energy range from 0.7 to 3.4 keV,” Opt. Lett. 39(7), 2141–2144 (2014).
[Crossref]
[PubMed]
B. Lagarde, F. Choueikani, B. Capitanio, P. Ohresser, E. Meltchakov, F. Delmotte, M. Krumrey, and F. Polack, “High efficiency multilayer gratings for monochromators in the energy range from 500 eV to 2500 eV,” J. Phys. Conf. Ser. 425(15), 152012 (2013).
[Crossref]
F. Choueikani, F. Delmotte, F. Bridou, B. Lagarde, P. Mercere, E. Otero, P. Ohresser, and F. Polack, “Preparation for B4C/Mo2C multilayer deposition of alternate multilayer gratings with high efficiency in the 0.5-2.5 keV energy range,” J. Phys. Conf. Ser. 425(15), 152007 (2013).
[Crossref]
F. Polack, B. Lagarde, M. Idir, A. L. Cloup, E. Jourdain, M. Roulliay, F. Delmotte, J. Gautier, and M.-F. Ravet-Krill, “Alternate Multilayer Gratings with Enhanced Diffraction Efficiency in the 500–5000 eV Energy Domain,” AIP Conf. Proc. 879, 489–492 (2007).
[Crossref]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
R. G. Cruddace, T. W. Barbee, J. C. Rife, and W. R. Hunter, “Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating,” Phys. Scr. 41(4), 396–399 (1990).
[Crossref]
Y. V. Shvyd’ko, S. Stoupin, A. Cunsolo, A. H. Said, and X. Huang, “High-reflectivity high-resolution X-ray crystal optics with diamonds,” Nat. Phys. 6(3), 196–199 (2010).
[Crossref]
F. Choueikani, B. Lagarde, F. Delmotte, M. Krumrey, F. Bridou, M. Thomasset, E. Meltchakov, and F. Polack, “High-efficiency B4C/Mo2C alternate multilayer grating for monochromators in the photon energy range from 0.7 to 3.4 keV,” Opt. Lett. 39(7), 2141–2144 (2014).
[Crossref]
[PubMed]
B. Lagarde, F. Choueikani, B. Capitanio, P. Ohresser, E. Meltchakov, F. Delmotte, M. Krumrey, and F. Polack, “High efficiency multilayer gratings for monochromators in the energy range from 500 eV to 2500 eV,” J. Phys. Conf. Ser. 425(15), 152012 (2013).
[Crossref]
F. Choueikani, F. Delmotte, F. Bridou, B. Lagarde, P. Mercere, E. Otero, P. Ohresser, and F. Polack, “Preparation for B4C/Mo2C multilayer deposition of alternate multilayer gratings with high efficiency in the 0.5-2.5 keV energy range,” J. Phys. Conf. Ser. 425(15), 152007 (2013).
[Crossref]
F. Polack, B. Lagarde, M. Idir, A. L. Cloup, E. Jourdain, M. Roulliay, F. Delmotte, J. Gautier, and M.-F. Ravet-Krill, “Alternate Multilayer Gratings with Enhanced Diffraction Efficiency in the 500–5000 eV Energy Domain,” AIP Conf. Proc. 879, 489–492 (2007).
[Crossref]
D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
F. Senf, F. Bijkerk, F. Eggenstein, G. Gwalt, Q. Huang, R. Kruijs, O. Kutz, S. Lemke, E. Louis, M. Mertin, I. Packe, I. Rudolph, F. Schäfers, F. Siewert, A. Sokolov, J. M. Sturm, Ch. Waberski, Z. Wang, J. Wolf, T. Zeschke, and A. Erko, “Highly efficient blazed grating with multilayer coating for tender X-ray energies,” Opt. Express 24(12), 13220–13230 (2016).
[Crossref]
[PubMed]
F. Senf, F. Bijkerk, F. Eggenstein, G. Gwalt, Q. Huang, R. Kruijs, O. Kutz, S. Lemke, E. Louis, M. Mertin, I. Packe, I. Rudolph, F. Schäfers, F. Siewert, A. Sokolov, J. M. Sturm, Ch. Waberski, Z. Wang, J. Wolf, T. Zeschke, and A. Erko, “Highly efficient blazed grating with multilayer coating for tender X-ray energies,” Opt. Express 24(12), 13220–13230 (2016).
[Crossref]
[PubMed]
F. Polack, B. Lagarde, M. Idir, A. L. Cloup, E. Jourdain, M. Roulliay, F. Delmotte, J. Gautier, and M.-F. Ravet-Krill, “Alternate Multilayer Gratings with Enhanced Diffraction Efficiency in the 500–5000 eV Energy Domain,” AIP Conf. Proc. 879, 489–492 (2007).
[Crossref]
D. L. Voronov, L. I. Goray, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “High-order multilayer coated blazed gratings for high resolution soft x-ray spectroscopy,” Opt. Express 23(4), 4771–4790 (2015).
[Crossref]
[PubMed]
D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
D. L. Voronov, F. Salmassi, J. Meyer-Ilse, E. M. Gullikson, T. Warwick, and H. A. Padmore, “Refraction effects in soft x-ray multilayer blazed gratings,” Opt. Express 24(11), 11334–11344 (2016).
[Crossref]
[PubMed]
D. L. Voronov, E. M. Gullikson, F. Salmassi, T. Warwick, and H. A. Padmore, “Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating,” Opt. Lett. 39(11), 3157–3160 (2014).
[Crossref]
[PubMed]
D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[Crossref]
[PubMed]
M. Ishino, P. A. Heimann, H. Sasai, M. Hatayama, H. Takenaka, K. Sano, E. M. Gullikson, and M. Koike, “Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region,” Appl. Opt. 45(26), 6741–6745 (2006).
[Crossref]
[PubMed]
F. Senf, F. Bijkerk, F. Eggenstein, G. Gwalt, Q. Huang, R. Kruijs, O. Kutz, S. Lemke, E. Louis, M. Mertin, I. Packe, I. Rudolph, F. Schäfers, F. Siewert, A. Sokolov, J. M. Sturm, Ch. Waberski, Z. Wang, J. Wolf, T. Zeschke, and A. Erko, “Highly efficient blazed grating with multilayer coating for tender X-ray energies,” Opt. Express 24(12), 13220–13230 (2016).
[Crossref]
[PubMed]
X. Yang, H. Wang, M. Hand, K. Sawhney, B. Kaulich, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Design of a multilayer-based collimated plane-grating monochromator for tender X-ray range,” J. Synchrotron Radiat. 24(1), 168–174 (2017).
[Crossref]
[PubMed]
M. Ishino, P. A. Heimann, H. Sasai, M. Hatayama, H. Takenaka, K. Sano, E. M. Gullikson, and M. Koike, “Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region,” Appl. Opt. 45(26), 6741–6745 (2006).
[Crossref]
[PubMed]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
M. Ishino, P. A. Heimann, H. Sasai, M. Hatayama, H. Takenaka, K. Sano, E. M. Gullikson, and M. Koike, “Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region,” Appl. Opt. 45(26), 6741–6745 (2006).
[Crossref]
[PubMed]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
Q. Huang, V. Medvedev, R. van de Kruijs, A. Yakshin, E. Louis, and F. Bijkerk, “Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics,” Appl. Phys. Rev. 4(1), 011104 (2017).
[Crossref]
X. Yang, H. Wang, M. Hand, K. Sawhney, B. Kaulich, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Design of a multilayer-based collimated plane-grating monochromator for tender X-ray range,” J. Synchrotron Radiat. 24(1), 168–174 (2017).
[Crossref]
[PubMed]
F. Senf, F. Bijkerk, F. Eggenstein, G. Gwalt, Q. Huang, R. Kruijs, O. Kutz, S. Lemke, E. Louis, M. Mertin, I. Packe, I. Rudolph, F. Schäfers, F. Siewert, A. Sokolov, J. M. Sturm, Ch. Waberski, Z. Wang, J. Wolf, T. Zeschke, and A. Erko, “Highly efficient blazed grating with multilayer coating for tender X-ray energies,” Opt. Express 24(12), 13220–13230 (2016).
[Crossref]
[PubMed]
X. Yang, I. V. Kozhevnikov, Q. Huang, H. Wang, K. Sawhney, and Z. Wang, “Wideband multilayer gratings for the 17-25 nm spectral region,” Opt. Express 24(13), 15079–15092 (2016).
[Crossref]
[PubMed]
X. Yang, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Unified analytical theory of single-order soft x-ray multilayer gratings,” J. Opt. Soc. Am. B 32(4), 506–522 (2015).
[Crossref]
Y. V. Shvyd’ko, S. Stoupin, A. Cunsolo, A. H. Said, and X. Huang, “High-reflectivity high-resolution X-ray crystal optics with diamonds,” Nat. Phys. 6(3), 196–199 (2010).
[Crossref]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
R. G. Cruddace, T. W. Barbee, J. C. Rife, and W. R. Hunter, “Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating,” Phys. Scr. 41(4), 396–399 (1990).
[Crossref]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
F. Polack, B. Lagarde, M. Idir, A. L. Cloup, E. Jourdain, M. Roulliay, F. Delmotte, J. Gautier, and M.-F. Ravet-Krill, “Alternate Multilayer Gratings with Enhanced Diffraction Efficiency in the 500–5000 eV Energy Domain,” AIP Conf. Proc. 879, 489–492 (2007).
[Crossref]
A. Mirone, E. Delcamp, M. Idir, G. Cauchon, F. Polack, P. Dhez, and C. Bizeuil, “Numerical and experimental study of grating efficiency for synchrotron monochromators,” Appl. Opt. 37(25), 5816–5822 (1998).
[Crossref]
[PubMed]
M. Ishino, P. A. Heimann, H. Sasai, M. Hatayama, H. Takenaka, K. Sano, E. M. Gullikson, and M. Koike, “Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region,” Appl. Opt. 45(26), 6741–6745 (2006).
[Crossref]
[PubMed]
F. Polack, B. Lagarde, M. Idir, A. L. Cloup, E. Jourdain, M. Roulliay, F. Delmotte, J. Gautier, and M.-F. Ravet-Krill, “Alternate Multilayer Gratings with Enhanced Diffraction Efficiency in the 500–5000 eV Energy Domain,” AIP Conf. Proc. 879, 489–492 (2007).
[Crossref]
X. Yang, H. Wang, M. Hand, K. Sawhney, B. Kaulich, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Design of a multilayer-based collimated plane-grating monochromator for tender X-ray range,” J. Synchrotron Radiat. 24(1), 168–174 (2017).
[Crossref]
[PubMed]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
M. Ishino, P. A. Heimann, H. Sasai, M. Hatayama, H. Takenaka, K. Sano, E. M. Gullikson, and M. Koike, “Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region,” Appl. Opt. 45(26), 6741–6745 (2006).
[Crossref]
[PubMed]
M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, “Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region,” Opt. Lett. 22(11), 834–836 (1997).
[Crossref]
[PubMed]
R. van der Meer, I. Kozhevnikov, B. Krishnan, J. Huskens, P. Hegeman, C. Brons, B. Vratzov, B. Bastiaens, K. Boller, and F. Bijkerk, “Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range,” AIP Adv. 3(1), 012103 (2013).
[Crossref]
X. Yang, H. Wang, M. Hand, K. Sawhney, B. Kaulich, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Design of a multilayer-based collimated plane-grating monochromator for tender X-ray range,” J. Synchrotron Radiat. 24(1), 168–174 (2017).
[Crossref]
[PubMed]
X. Yang, I. V. Kozhevnikov, Q. Huang, H. Wang, K. Sawhney, and Z. Wang, “Wideband multilayer gratings for the 17-25 nm spectral region,” Opt. Express 24(13), 15079–15092 (2016).
[Crossref]
[PubMed]
X. Yang, I. V. Kozhevnikov, Q. Huang, and Z. Wang, “Unified analytical theory of single-order soft x-ray multilayer gratings,” J. Opt. Soc. Am. B 32(4), 506–522 (2015).
[Crossref]
R. van der Meer, I. V. Kozhevnikov, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Extended theory of soft x-ray reflection for realistic lamellar multilayer gratings,” Opt. Express 21(11), 13105–13117 (2013).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “Analytic theory of soft x-ray diffraction by lamellar multilayer gratings,” Opt. Express 19(10), 9172–9184 (2011).
[Crossref]
[PubMed]
I. V. Kozhevnikov, R. van der Meer, H. M. J. Bastiaens, K.-J. Boller, and F. Bijkerk, “High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime,” Opt. Express 18(15), 16234–16242 (2010).
[Crossref]
[PubMed]
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