Abstract

This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

© 2017 Optical Society of America

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  2. Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
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  3. P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
    [Crossref] [PubMed]
  4. K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
    [Crossref] [PubMed]
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  6. H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
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    [Crossref] [PubMed]
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    [Crossref]
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2016 (3)

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

J. Pribošek, J. Diaci, and S. Sinzinger, “Simple unimorph deformable mirrors fabricated from piezo buzzers,” J. Micromech. Microeng. 26(5), 055009 (2016).
[Crossref]

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

2015 (7)

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

Y. Matoba, Y. Taguchi, and Y. Nagasaka, “Micro optical diffusion sensor using a comb-driven micro Fresnel mirror,” Opt. Express 23(1), 477–483 (2015).
[Crossref] [PubMed]

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

J. Björnerås, M. Nilsson, and L. Mäler, “Analysing DHPC/DMPC bicelles by diffusion NMR and multivariate decomposition,” Biochim. Biophys. Acta 1848(1111 Pt A), 2910–2917 (2015).
[Crossref] [PubMed]

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
[Crossref]

2014 (1)

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

2013 (6)

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Z. Zang, A. Nakamura, and J. Temmyo, “Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application,” Opt. Express 21(9), 11448–11456 (2013).
[Crossref] [PubMed]

Z. Zang, A. Nakamura, and J. Temmyo, “Nitrogen doping in cuprous oxide films synthesized by radical oxidation at low temperature,” Mater. Lett. 92, 188–191 (2013).
[Crossref]

2012 (4)

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

L. Liu, S. Pal, and H. Xie, “MEMS mirrors based on a curved concentric electrothermal actuator,” Sensor Actuat. A-Phys. 188, 349–358 (2012).

2011 (1)

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

2010 (1)

R. Endo, M. Shima, and M. Susa, “Thermal-conductivity measurements and predictions for Ni–Cr solid solution alloys,” Int. J. Thermophys. 31(10), 1991–2003 (2010).
[Crossref]

1999 (1)

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

1996 (1)

A. S. Pavlovic, V. S. Babu, and M. S. Seehra, “High-temperature thermal expansion of binary alloys of Ni with Cr, Mo and Re: a comparison with molecular dynamics simulations,” J. Phys. Condens. Matter 8(18), 3139–3149 (1996).
[Crossref]

1986 (1)

R. Brandt, L. Pawlowski, and G. Neuer, “Specific heat and thermal conductivity of plasma sprayed yttria-stabilized zirconia and NiAl, NiCr, NiCrAl, NiCrAlY, NiCoCrAlY coatings,” High Temp. High Pressures 18, 65–77 (1986).

Amin, T. M. F.

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

Asante, A.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Asanuma, H.

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

Babu, V. S.

A. S. Pavlovic, V. S. Babu, and M. S. Seehra, “High-temperature thermal expansion of binary alloys of Ni with Cr, Mo and Re: a comparison with molecular dynamics simulations,” J. Phys. Condens. Matter 8(18), 3139–3149 (1996).
[Crossref]

Björnerås, J.

J. Björnerås, M. Nilsson, and L. Mäler, “Analysing DHPC/DMPC bicelles by diffusion NMR and multivariate decomposition,” Biochim. Biophys. Acta 1848(1111 Pt A), 2910–2917 (2015).
[Crossref] [PubMed]

Branca, C.

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

Brandt, R.

R. Brandt, L. Pawlowski, and G. Neuer, “Specific heat and thermal conductivity of plasma sprayed yttria-stabilized zirconia and NiAl, NiCr, NiCrAl, NiCrAlY, NiCoCrAlY coatings,” High Temp. High Pressures 18, 65–77 (1986).

Brunne, J.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Choe, S. W.

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Crupi, C.

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

D’Angelo, G.

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

Diaci, J.

J. Pribošek, J. Diaci, and S. Sinzinger, “Simple unimorph deformable mirrors fabricated from piezo buzzers,” J. Micromech. Microeng. 26(5), 055009 (2016).
[Crossref]

Dominguez, C.

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

Duan, C.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

Endo, R.

R. Endo, M. Shima, and M. Susa, “Thermal-conductivity measurements and predictions for Ni–Cr solid solution alloys,” Int. J. Thermophys. 31(10), 1991–2003 (2010).
[Crossref]

Esashic, M.

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

Fu, S. G.

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

Fujii, S.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Fujii, T.

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

Getzoff, E. D.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Grunwald, R.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Henry, D.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

Hitomi, K.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Howard, P.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Huda, M. Q.

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

Hung, A. C. L.

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

Itani, K.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Iwaasa, S.

H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
[Crossref]

Iwai, M.

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Iwai, S.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Jäger, W.

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

Jun, M. H.

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

Kakite, S.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Kaminou, T.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Kamiya, Y.

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

Kanasaki, Y.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Komiya, A.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

Kondoh, M.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Lai, H. Y. H.

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

Lang, A. E.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Lee, B. H.

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

Lee, J. H.

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

Lina, T. W.

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

Liu, L.

L. Liu, S. Pal, and H. Xie, “MEMS mirrors based on a curved concentric electrothermal actuator,” Sensor Actuat. A-Phys. 188, 349–358 (2012).

Lu, M. S. C.

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

Mäler, L.

J. Björnerås, M. Nilsson, and L. Mäler, “Analysing DHPC/DMPC bicelles by diffusion NMR and multivariate decomposition,” Biochim. Biophys. Acta 1848(1111 Pt A), 2910–2917 (2015).
[Crossref] [PubMed]

Maruyama, S.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

Matoba, Y.

Matsusue, E.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Matsuura, H.

H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
[Crossref]

Mikulis, D. J.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Moon, S.

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

Munoz, F. J.

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

Nagasaka, Y.

Y. Matoba, Y. Taguchi, and Y. Nagasaka, “Micro optical diffusion sensor using a comb-driven micro Fresnel mirror,” Opt. Express 23(1), 477–483 (2015).
[Crossref] [PubMed]

H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
[Crossref]

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Nakamura, A.

Z. Zang, A. Nakamura, and J. Temmyo, “Nitrogen doping in cuprous oxide films synthesized by radical oxidation at low temperature,” Mater. Lett. 92, 188–191 (2013).
[Crossref]

Z. Zang, A. Nakamura, and J. Temmyo, “Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application,” Opt. Express 21(9), 11448–11456 (2013).
[Crossref] [PubMed]

Nakano, A.

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Nakasone, Y.

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

Naono, T.

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

Neuer, G.

R. Brandt, L. Pawlowski, and G. Neuer, “Specific heat and thermal conductivity of plasma sprayed yttria-stabilized zirconia and NiAl, NiCr, NiCrAl, NiCrAlY, NiCoCrAlY coatings,” High Temp. High Pressures 18, 65–77 (1986).

Nilsson, M.

J. Björnerås, M. Nilsson, and L. Mäler, “Analysing DHPC/DMPC bicelles by diffusion NMR and multivariate decomposition,” Biochim. Biophys. Acta 1848(1111 Pt A), 2910–2917 (2015).
[Crossref] [PubMed]

Ogawa, T.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Oka, T.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Ooi, H.

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

Pack, C. G.

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Pal, S.

L. Liu, S. Pal, and H. Xie, “MEMS mirrors based on a curved concentric electrothermal actuator,” Sensor Actuat. A-Phys. 188, 349–358 (2012).

Pavlovic, A. S.

A. S. Pavlovic, V. S. Babu, and M. S. Seehra, “High-temperature thermal expansion of binary alloys of Ni with Cr, Mo and Re: a comparison with molecular dynamics simulations,” J. Phys. Condens. Matter 8(18), 3139–3149 (1996).
[Crossref]

Pawlowski, L.

R. Brandt, L. Pawlowski, and G. Neuer, “Specific heat and thermal conductivity of plasma sprayed yttria-stabilized zirconia and NiAl, NiCr, NiCrAl, NiCrAlY, NiCoCrAlY coatings,” High Temp. High Pressures 18, 65–77 (1986).

Pozzi, A.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

Pribošek, J.

J. Pribošek, J. Diaci, and S. Sinzinger, “Simple unimorph deformable mirrors fabricated from piezo buzzers,” J. Micromech. Microeng. 26(5), 055009 (2016).
[Crossref]

Ribeirro, M. Q.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Rifici, S.

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

Robblee, J.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Rodriguez, J. A.

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

Sako, Y.

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Samuelson, S. R.

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Seehra, M. S.

A. S. Pavlovic, V. S. Babu, and M. S. Seehra, “High-temperature thermal expansion of binary alloys of Ni with Cr, Mo and Re: a comparison with molecular dynamics simulations,” J. Phys. Condens. Matter 8(18), 3139–3149 (1996).
[Crossref]

Shima, M.

R. Endo, M. Shima, and M. Susa, “Thermal-conductivity measurements and predictions for Ni–Cr solid solution alloys,” Int. J. Thermophys. 31(10), 1991–2003 (2010).
[Crossref]

Sinzinger, S.

J. Pribošek, J. Diaci, and S. Sinzinger, “Simple unimorph deformable mirrors fabricated from piezo buzzers,” J. Micromech. Microeng. 26(5), 055009 (2016).
[Crossref]

Sorg, B. S.

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Sun, J.

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Susa, M.

R. Endo, M. Shima, and M. Susa, “Thermal-conductivity measurements and predictions for Ni–Cr solid solution alloys,” Int. J. Thermophys. 31(10), 1991–2003 (2010).
[Crossref]

Taguchi, Y.

Y. Matoba, Y. Taguchi, and Y. Nagasaka, “Micro optical diffusion sensor using a comb-driven micro Fresnel mirror,” Opt. Express 23(1), 477–483 (2015).
[Crossref] [PubMed]

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Takenaka, Y.

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Tanaka, S.

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

Temmyo, J.

Z. Zang, A. Nakamura, and J. Temmyo, “Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application,” Opt. Express 21(9), 11448–11456 (2013).
[Crossref] [PubMed]

Z. Zang, A. Nakamura, and J. Temmyo, “Nitrogen doping in cuprous oxide films synthesized by radical oxidation at low temperature,” Mater. Lett. 92, 188–191 (2013).
[Crossref]

Terazima, M.

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Todo, T.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Torres, J. F.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

Tsukamoto, K.

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Tulip, J.

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

Wadia, P. M.

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

Wallrabe, U.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Wanderlingh, U.

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

Wang, W.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

Wapler, M. C.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Wu, L.

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Xie, H.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

L. Liu, S. Pal, and H. Xie, “MEMS mirrors based on a curved concentric electrothermal actuator,” Sensor Actuat. A-Phys. 188, 349–358 (2012).

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

Yamamoto, J.

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Zang, Z.

Z. Zang, A. Nakamura, and J. Temmyo, “Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application,” Opt. Express 21(9), 11448–11456 (2013).
[Crossref] [PubMed]

Z. Zang, A. Nakamura, and J. Temmyo, “Nitrogen doping in cuprous oxide films synthesized by radical oxidation at low temperature,” Mater. Lett. 92, 188–191 (2013).
[Crossref]

Zhang, X.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

Zhou, L.

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

Zine, N.

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

Biochim. Biophys. Acta (1)

J. Björnerås, M. Nilsson, and L. Mäler, “Analysing DHPC/DMPC bicelles by diffusion NMR and multivariate decomposition,” Biochim. Biophys. Acta 1848(1111 Pt A), 2910–2917 (2015).
[Crossref] [PubMed]

Can. J. Neurol. Sci. (1)

P. M. Wadia, P. Howard, M. Q. Ribeirro, J. Robblee, A. Asante, D. J. Mikulis, and A. E. Lang, “The value of GRE, ADC and routine MRI in distinguishing Parkinsonian disorders,” Can. J. Neurol. Sci. 40(3), 389–402 (2013).
[Crossref] [PubMed]

High Temp. High Pressures (1)

R. Brandt, L. Pawlowski, and G. Neuer, “Specific heat and thermal conductivity of plasma sprayed yttria-stabilized zirconia and NiAl, NiCr, NiCrAl, NiCrAlY, NiCoCrAlY coatings,” High Temp. High Pressures 18, 65–77 (1986).

Int. J. Thermophys. (1)

R. Endo, M. Shima, and M. Susa, “Thermal-conductivity measurements and predictions for Ni–Cr solid solution alloys,” Int. J. Thermophys. 31(10), 1991–2003 (2010).
[Crossref]

J. Am. Chem. Soc. (2)

M. Kondoh, K. Hitomi, J. Yamamoto, T. Todo, S. Iwai, E. D. Getzoff, and M. Terazima, “Light-induced conformational change and product release in DNA repair by (6-4) photolyase,” J. Am. Chem. Soc. 133(7), 2183–2191 (2011).
[Crossref] [PubMed]

Y. Nakasone, H. Ooi, Y. Kamiya, H. Asanuma, and M. Terazima, “dynamics of inter-DNA chain interaction of photoresponsive DNA,” J. Am. Chem. Soc. 138(29), 9001–9004 (2016).
[Crossref] [PubMed]

J. Chem. Eng. Data (1)

H. Matsuura, S. Iwaasa, and Y. Nagasaka, “Mass diffusion coefficient and Soret coefficient of o -dichlorobenzene solutions of PCBM and [60]Fullerene by the Soret Forced Rayleigh scattering method, ” J. Chem. Eng. Data 60(12), 3621–3630 (2015).
[Crossref]

J. Chem. Phys. (1)

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

J. Microelectromech. Syst. (4)

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

T. M. F. Amin, M. Q. Huda, J. Tulip, and W. Jäger, “Design and fabrication of a long-arm comb-drive rotary actuator with externally mounted mirror for optical applications,” J. Microelectromech. Syst. 24(5), 1565–1574 (2015).
[Crossref]

S. R. Samuelson, L. Wu, J. Sun, S. W. Choe, B. S. Sorg, and H. Xie, “A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography,” J. Microelectromech. Syst. 21(6), 1291–1302 (2012).
[Crossref]

C. Duan, W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, “A self-aligned 45 degrees-tilted two-axis scanning micromirror for side-view imaging,” J. Microelectromech. Syst. 25(4), 799–811 (2016).
[Crossref]

J. Micromech. Microeng. (3)

M. H. Jun, S. Moon, B. H. Lee, and J. H. Lee, “A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process,” J. Micromech. Microeng. 24(9), 095008 (2014).
[Crossref]

J. Pribošek, J. Diaci, and S. Sinzinger, “Simple unimorph deformable mirrors fabricated from piezo buzzers,” J. Micromech. Microeng. 26(5), 055009 (2016).
[Crossref]

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

J. Mol. Liq. (1)

C. Branca, U. Wanderlingh, G. D’Angelo, C. Crupi, and S. Rifici, “Study of the dynamical behavior of sodium alginate/myoglobin aqueous solutions: A dynamic light scattering study,” J. Mol. Liq. 209, 294–300 (2015).
[Crossref]

J. Phys. Condens. Matter (1)

A. S. Pavlovic, V. S. Babu, and M. S. Seehra, “High-temperature thermal expansion of binary alloys of Ni with Cr, Mo and Re: a comparison with molecular dynamics simulations,” J. Phys. Condens. Matter 8(18), 3139–3149 (1996).
[Crossref]

Mater. Lett. (1)

Z. Zang, A. Nakamura, and J. Temmyo, “Nitrogen doping in cuprous oxide films synthesized by radical oxidation at low temperature,” Mater. Lett. 92, 188–191 (2013).
[Crossref]

Neuroradiology (1)

K. Tsukamoto, E. Matsusue, Y. Kanasaki, S. Kakite, S. Fujii, T. Kaminou, and T. Ogawa, “Significance of apparent diffusion coefficient measurement for the differential diagnosis of multiple system atrophy, progressive supranuclear palsy, and Parkinson’s disease: evaluation by 3.0-T MR imaging,” Neuroradiology 54(9), 947–955 (2012).
[Crossref] [PubMed]

Opt. Express (2)

Sci. Rep. (1)

M. Iwai, C. G. Pack, Y. Takenaka, Y. Sako, and A. Nakano, “Photosystem II antenna phosphorylation-dependent protein diffusion determined by fluorescence correlation spectroscopy,” Sci. Rep. 3, 2833 (2013).
[Crossref] [PubMed]

Sensor Actuat. A-Phys. (3)

T. Naono, T. Fujii, M. Esashic, and S. Tanaka, “Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film,” Sensor Actuat. A-Phys. 233, 147–157 (2015).

A. C. L. Hung, H. Y. H. Lai, T. W. Lina, S. G. Fu, and M. S. C. Lu, “An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensor Actuat. A-Phys. 222, 122–129 (2015).

L. Liu, S. Pal, and H. Xie, “MEMS mirrors based on a curved concentric electrothermal actuator,” Sensor Actuat. A-Phys. 188, 349–358 (2012).

Vacuum (1)

C. Dominguez, J. A. Rodriguez, F. J. Munoz, and N. Zine, “Plasma enhanced CVD silicon oxide films for integrated optic applications,” Vacuum 52(4), 395–400 (1999).
[Crossref]

Other (1)

Microchem, “SU-8 3000 Data Sheet,” http://www.microchem.com/pdf/SU-8%203000%20Data%20Sheet.pdf .

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Figures (10)

Fig. 1
Fig. 1 Schematic of the proposed electrothermal MEMS mirror. The thickness of the mirror plate was 5 µm. The thicknesses of NiCr and SU-8 were 0.2 µm and 10 µm, respectively.
Fig. 2
Fig. 2 (a) Analytical results for the displacement of the proposed mirror (the image is enlarged three times along the z-axis) and (b) Analytical angular shift of the proposed MEMS mirror.
Fig. 3
Fig. 3 Fabrication process flow for the proposed MEMS mirror.
Fig. 4
Fig. 4 SEM image of the fabricated electrothermal MEMS mirror. (a) View of the entire mirror and (b) enlarged view of the actuator and torsion spring.
Fig. 5
Fig. 5 (a) Measured temperature distribution at the initial state, (b) measured temperature distribution at 3 V, and (c) analytical and measured temperatures of the proposed MEMS mirror.
Fig. 6
Fig. 6 Step response of the MEMS mirror. (a) Entire wave, (b) enlarged view of the rising edge, and (c) enlarged view of the falling edge.
Fig. 7
Fig. 7 Frequency response of the fabricated mirror.
Fig. 8
Fig. 8 Deviation of each optical angle from the angle at 0 h.
Fig. 9
Fig. 9 (a) Image acquired by the beam profiler at 0 V, (b) image acquired by the beam profiler at 7 V, (c) optical-intensity distribution at 0 V, and (d) optical-intensity distribution at 7 V.
Fig. 10
Fig. 10 (a) Optical-intensity distribution of the ultranarrow-linewidth solid-state laser at 7 V, (b) optical-intensity distribution of the low-cost compact-laser-diode coherency laser at 7 V, and (c) fringe spacing obtained using each laser under different voltages.

Tables (1)

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Table 1 Material properties of NiCr and SU-8 used in finite element analysis.

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