Abstract

We demonstrate intense emission in the water-window soft x-ray spectral region by controlling the spectral behavior through changing the balance between emissivity and self-absorption in an expanding plasma. The number of photons obtained from a dual laser irradiated target with a 150-ps pre-pulse was maximized at 3.8 × 1014 photons/sr in λ = 2.34 − 4.38 nm at a pulse separation time of 7 − 10 ns. Enhancement of the number of photons is attributed to efficient coupling with the main laser pulse while maintaining a tiny source size.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
  22. T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  30. T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
    [Crossref]
  31. H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
    [Crossref]
  32. R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
    [Crossref]
  33. H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
    [Crossref]
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    [Crossref]
  35. A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
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    [Crossref]
  38. A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
    [Crossref]
  39. H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
    [Crossref]
  40. T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
    [Crossref]

2018 (2)

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

2017 (2)

R. Fazeli, “Enhanced X-ray emission from laser-produced gold plasma by double pulses irradiation of nano-porous targets,” Phys. Lett. A 381(5), 467–471 (2017).
[Crossref]

T. Hatano, T. Ejima, and T. Tsuru, “Cr/Sc/Mo multilayer for condenser optics in water window microscopes,” J. Electron Spectrosc. Relat. Phenom. 220, 14–16 (2017).
[Crossref]

2016 (6)

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
[Crossref]

2015 (2)

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

2014 (1)

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

2013 (4)

2012 (2)

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

2011 (1)

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

2010 (1)

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

2008 (2)

E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
[Crossref]

2007 (1)

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

2006 (3)

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
[Crossref]

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
[Crossref]

2005 (5)

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, “Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas,” Appl. Phys. Lett. 87(4), 041503 (2005).
[Crossref]

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
[Crossref] [PubMed]

P. A. C. Jansson, U. Vogt, and H. M. Hertz, “Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy,” Rev. Sci. Instrum. 76(4), 043503 (2005).
[Crossref]

2003 (2)

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

2002 (1)

A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
[Crossref] [PubMed]

2001 (2)

G. Duffy, P. van Kampen, and P. Dunne, “4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III,” J. Phys. At. Mol. Opt. Phys. 34(15), 3171–3178 (2001).
[Crossref]

A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
[Crossref]

2000 (1)

P. Dunne, G. O’Sullivan, and D. O’Reilly, “Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source,” Appl. Phys. Lett. 76(1), 34–36 (2000).
[Crossref]

1999 (1)

K. Sakano and M. Yamamoto, “Development of soft x-ray multilayer mirrors for a wavelength of 3 nm,” Proc. SPIE 3767, 238–241 (1999).
[Crossref]

1982 (1)

J. C. Solem and G. C. Baldwin, “Microholography of Living Organisms,” Science 218(4569), 229–235 (1982).
[Crossref] [PubMed]

Akinaga, K.

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R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
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W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
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T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
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A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
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Arai, G.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Attwood, D. T.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
[Crossref] [PubMed]

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Backus, S.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

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J. C. Solem and G. C. Baldwin, “Microholography of Living Organisms,” Science 218(4569), 229–235 (1982).
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A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
[Crossref]

Barte, E. F.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

Baumgarten, C.

Chao, W.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
[Crossref] [PubMed]

Chen, W.-B.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

Christov, I. P.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Cummins, T.

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

Dinh, T.-H.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

Dojyo, N.

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
[Crossref]

Duffy, G.

G. Duffy, P. van Kampen, and P. Dunne, “4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III,” J. Phys. At. Mol. Opt. Phys. 34(15), 3171–3178 (2001).
[Crossref]

Dunne, P.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

G. Duffy, P. van Kampen, and P. Dunne, “4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III,” J. Phys. At. Mol. Opt. Phys. 34(15), 3171–3178 (2001).
[Crossref]

P. Dunne, G. O’Sullivan, and D. O’Reilly, “Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source,” Appl. Phys. Lett. 76(1), 34–36 (2000).
[Crossref]

Ejima, T.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

T. Hatano, T. Ejima, and T. Tsuru, “Cr/Sc/Mo multilayer for condenser optics in water window microscopes,” J. Electron Spectrosc. Relat. Phenom. 220, 14–16 (2017).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

Endo, A.

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

Fazeli, R.

R. Fazeli, “Enhanced X-ray emission from laser-produced gold plasma by double pulses irradiation of nano-porous targets,” Phys. Lett. A 381(5), 467–471 (2017).
[Crossref]

Fujii, Y.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

Fujioka, S.

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Furukawa, H.

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Gaudiosi, D.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Gibson, E. A.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Gisuji, T.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

Gu, Q.

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Gullikson, E. M.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Hamada, M.

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
[Crossref]

Hara, H.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

Harteneck, B. D.

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
[Crossref] [PubMed]

Hasegawa, N.

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Hatano, T.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

T. Hatano, T. Ejima, and T. Tsuru, “Cr/Sc/Mo multilayer for condenser optics in water window microscopes,” J. Electron Spectrosc. Relat. Phenom. 220, 14–16 (2017).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

Hertz, H. M.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

P. A. C. Jansson, U. Vogt, and H. M. Hertz, “Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy,” Rev. Sci. Instrum. 76(4), 043503 (2005).
[Crossref]

Higashiguchi, T.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
[Crossref]

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
[Crossref]

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
[Crossref]

Holmberg, A.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

Ishikawa, K. L.

E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

Ishino, M.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Iskakov, A. B.

A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
[Crossref] [PubMed]

Izawa, Y.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Jansson, P. A. C.

P. A. C. Jansson, U. Vogt, and H. M. Hertz, “Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy,” Rev. Sci. Instrum. 76(4), 043503 (2005).
[Crossref]

Jiang, W.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

Johansson, G. A.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

Kado, M.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Kanai, T.

E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

Kang, Y.-G.

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H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
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Kato, Y.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Kawachi, T.

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
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M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Kawasaki, K.

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
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Kawasaki, M.

Kawata, S.

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
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T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
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Kilbane, D.

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
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T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
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M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Kitano, K.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
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A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
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Koike, F.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
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Kondo, Y.

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
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T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
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H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
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H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
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R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

Kubodera, S.

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
[Crossref]

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
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T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
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Li, B.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
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T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
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B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
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T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
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T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
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T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
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T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
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E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
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A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
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P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
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E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
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R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

Makimura, T.

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
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T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
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Marconi, M. C.

Matsumoto, A.

H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, “Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas,” Appl. Phys. Lett. 87(4), 041503 (2005).
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T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
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S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
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Miura, T.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
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H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
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T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
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T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
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T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

Murakami, I.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Murakami, M.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Murnane, M. M.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

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E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

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T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
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M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Nakamura, D.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

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A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
[Crossref] [PubMed]

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A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
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A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
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T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Nishikawa, T.

A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
[Crossref]

Nishikino, M.

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Nishimura, H.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Norimatsu, T.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

O’Gorman, C.

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

O’Reilly, D.

P. Dunne, G. O’Sullivan, and D. O’Reilly, “Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source,” Appl. Phys. Lett. 76(1), 34–36 (2000).
[Crossref]

O’Reilly, F.

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

O’Sullivan, G.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

P. Dunne, G. O’Sullivan, and D. O’Reilly, “Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source,” Appl. Phys. Lett. 76(1), 34–36 (2000).
[Crossref]

Ochi, Y.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Ohashi, H.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

Ohta, S.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Oikawa, H.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Okada, T.

Ono, Y.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Oreg, J.

A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
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Otani, Y.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Otsuka, T.

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

Paul, A.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
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Rajyaguru, C.

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
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Reagan, B. A.

Rocca, J. J.

Sakano, K.

K. Sakano and M. Yamamoto, “Development of soft x-ray multilayer mirrors for a wavelength of 3 nm,” Proc. SPIE 3767, 238–241 (1999).
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Sakaue, H. A.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Sakaue, K.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

Salsbury, C.

Sasaki, A.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
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A. Sasaki, “Construction of a collisional radiative model of complex multiple charged ions for mid- to high-Z elements,” High Energy Density Phys. 9(2), 325–335 (2013).
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A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
[Crossref]

Sasaki, W.

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
[Crossref]

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
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T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
[Crossref]

Sasanuma, A.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

Shimada, Y.

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Sokell, E.

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

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P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
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Sudo, S.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Sukegawa, K.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Sunahara, A.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
[Crossref]

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

Suzuki, C.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Suzuki, Y.

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

Takahashi, A.

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

T. Higashiguchi, B. Li, Y. Suzuki, M. Kawasaki, H. Ohashi, S. Torii, D. Nakamura, A. Takahashi, T. Okada, W. Jiang, T. Miura, A. Endo, P. Dunne, G. O’Sullivan, and T. Makimura, “Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas,” Opt. Express 21(26), 31837–31845 (2013).
[Crossref] [PubMed]

H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, “Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas,” Appl. Phys. Lett. 87(4), 041503 (2005).
[Crossref]

Takahashi, E. J.

E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

Takman, P. A. C.

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

Tamura, N.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

Tamura, T.

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Tanaka, H.

H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, “Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas,” Appl. Phys. Lett. 87(4), 041503 (2005).
[Crossref]

Tanaka, M.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Tobey, R.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Torii, S.

Tsuru, T.

T. Hatano, T. Ejima, and T. Tsuru, “Cr/Sc/Mo multilayer for condenser optics in water window microscopes,” J. Electron Spectrosc. Relat. Phenom. 220, 14–16 (2017).
[Crossref]

Ueda, N.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

Urbanski, L.

van Kampen, P.

G. Duffy, P. van Kampen, and P. Dunne, “4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III,” J. Phys. At. Mol. Opt. Phys. 34(15), 3171–3178 (2001).
[Crossref]

Vogt, U.

P. A. C. Jansson, U. Vogt, and H. M. Hertz, “Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy,” Rev. Sci. Instrum. 76(4), 043503 (2005).
[Crossref]

Wagner, N.

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

Wernsing, K. A.

Wu, T.

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

Yamamoto, M.

K. Sakano and M. Yamamoto, “Development of soft x-ray multilayer mirrors for a wavelength of 3 nm,” Proc. SPIE 3767, 238–241 (1999).
[Crossref]

Yamamoto, Y.

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Yasuda, Y.

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

Yatagai, T.

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

Yugami, N.

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
[Crossref]

AIP Adv. (1)

A. Sasaki, A. Sunahara, K. Nishihara, and T. Nishikawa, “Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model,” AIP Adv. 6(10), 105002 (2016).
[Crossref]

Appl. Phys. Express (2)

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

H. Hara, G. Arai, Y. Kondo, T.-H. Dinh, P. Dunne, G. O’Sullivan, T. Ejima, T. Hatano, W. Jiang, M. Nishikino, A. Sasaki, A. Sunahara, and T. Higashiguchi, “Characteristics of the soft X-ray emission from laser-produced highly charged platinum plasmas,” Appl. Phys. Express 9(6), 066201 (2016).
[Crossref]

Appl. Phys. Lett. (15)

R. Lokasani, G. Arai, Y. Kondo, H. Hara, T.-H. Dinh, T. Ejima, T. Hatano, W. Jiang, T. Makimura, B. Li, P. Dunne, G. O’Sullivan, T. Higashiguchi, and J. Limpouch, “Soft X-ray emission from molybdenum plasmas generated by dual laser pulses,” Appl. Phys. Lett. 109(19), 194103 (2016).
[Crossref]

P. Dunne, G. O’Sullivan, and D. O’Reilly, “Prepulse-enhanced narrow bandwidth soft x-ray emission from a low debris, subnanosecond, laser plasma source,” Appl. Phys. Lett. 76(1), 34–36 (2000).
[Crossref]

T. Higashiguchi, C. Rajyaguru, S. Kubodera, W. Sasaki, N. Yugami, T. Kikuchi, S. Kawata, and A. Andreev, “Efficient soft x-ray emission source at 13.5 nm by use of a femtosecond-laser-produced Li-based microplasma,” Appl. Phys. Lett. 86(23), 231502 (2005).
[Crossref]

T. Higashiguchi, K. Kawasaki, W. Sasaki, and S. Kubodera, “Enhancement of extreme ultraviolet emission from a lithium plasma by use of dual laser pulses,” Appl. Phys. Lett. 88(16), 161502 (2006).
[Crossref]

T.-H. Dinh, Y. Suzuki, G. Arai, B. Li, P. Dunne, G. O’Sullivan, S. Fujioka, N. Hasegawa, T. Kawachi, M. Nishikino, and T. Higashiguchi, “Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions,” Appl. Phys. Lett. 107(12), 121101 (2015).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett. 100(1), 014103 (2012).
[Crossref]

B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, ““Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett. 102(4), 041117 (2013).
[Crossref]

H. Ohashi, T. Higashiguchi, Y. Suzuki, G. Arai, Y. Otani, T. Yatagai, B. Li, P. Dunne, G. O’Sullivan, W. Jiang, A. Endo, H. A. Sakaue, D. Kato, I. Murakami, N. Tamura, S. Sudo, F. Koike, and C. Suzuki, “Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions,” Appl. Phys. Lett. 104(23), 234107 (2014).
[Crossref]

T. Higashiguchi, N. Dojyo, M. Hamada, W. Sasaki, and S. Kubodera, “Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles,” Appl. Phys. Lett. 88(20), 201503 (2006).
[Crossref]

T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, and G. O’Sullivan, “Extreme ultraviolet source at 6.7 nm based on a low-density plasma,” Appl. Phys. Lett. 99(19), 191502 (2011).
[Crossref]

S. Fujioka, H. Nishimura, K. Nishihara, M. Murakami, Y.-G. Kang, Q. Gu, K. Nagai, T. Norimatsu, N. Miyanaga, Y. Izawa, K. Mima, Y. Shimada, A. Sunahara, and H. Furukawa, “Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications,” Appl. Phys. Lett. 87(24), 241503 (2005).
[Crossref]

T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, “Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas,” Appl. Phys. Lett. 89(15), 151501 (2006).
[Crossref]

T. Cummins, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, C. O’Gorman, P. Dunne, E. Sokell, G. O’Sullivan, and T. Higashiguchi, “Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma,” Appl. Phys. Lett. 100(6), 061118 (2012).
[Crossref]

H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, “Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas,” Appl. Phys. Lett. 87(4), 041503 (2005).
[Crossref]

T. Otsuka, D. Kilbane, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources,” Appl. Phys. Lett. 97(23), 231503 (2010).
[Crossref]

High Energy Density Phys. (1)

A. Sasaki, “Construction of a collisional radiative model of complex multiple charged ions for mid- to high-Z elements,” High Energy Density Phys. 9(2), 325–335 (2013).
[Crossref]

J. Appl. Phys. (2)

E. F. Barte, H. Hara, T. Tamura, T. Gisuji, W.-B. Chen, R. Lokasani, T. Hatano, T. Ejima, W. Jiang, C. Suzuki, B. Li, P. Dunne, G. O’Sullivan, A. Sasaki, T. Higashiguchi, and J. Limpouch, “Characteristics of soft x-ray and extreme ultraviolet (XUV) emission from laser-produced highly charged rhodium ions,” J. Appl. Phys. 123(18), 183301 (2018).
[Crossref]

H. Hara, G. Arai, T.-H. Dinh, W. Jiang, T. Miura, A. Endo, T. Ejima, B. Li, P. Dunne, G. O’Sullivan, A. Sunahara, and T. Higashiguchi, “Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source,” J. Appl. Phys. 118(19), 193301 (2015).
[Crossref]

J. Electron Spectrosc. Relat. Phenom. (1)

T. Hatano, T. Ejima, and T. Tsuru, “Cr/Sc/Mo multilayer for condenser optics in water window microscopes,” J. Electron Spectrosc. Relat. Phenom. 220, 14–16 (2017).
[Crossref]

J. Microsc. (1)

P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007).
[Crossref] [PubMed]

J. Phys. At. Mol. Opt. Phys. (2)

T. Wu, T. Higashiguchi, B. Li, G. Arai, H. Hara, Y. Kondo, T. Miyazaki, T.-H. Dinh, P. Dunne, F. O’Reilly, E. Sokell, and G. O’Sullivan, “Spectral investigation of highly ionized bismuth plasmas produced by subnanosecond Nd:YAG laser pulses,” J. Phys. At. Mol. Opt. Phys. 49(3), 035001 (2016).
[Crossref]

G. Duffy, P. van Kampen, and P. Dunne, “4d → 5p transitions in the extreme ultraviolet photoabsorption spectra of Sn II and Sn III,” J. Phys. At. Mol. Opt. Phys. 34(15), 3171–3178 (2001).
[Crossref]

J. Phys. Conf. Ser. (1)

A. Sunahara, A. Sasaki, and K. Nishihara, “Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas,” J. Phys. Conf. Ser. 112(Pt. 4), 042048 (2008).
[Crossref]

J. Quant. Spectrosc. Radiat. Transf. (1)

A. Bar-Shalom, M. Klapisch, and J. Oreg, “HULLAC, an integrated computer package for atomic processes in plasmas,” J. Quant. Spectrosc. Radiat. Transf. 71(2–6), 169–188 (2001).
[Crossref]

Jpn. J. Appl. Phys.: Rapid Commun. (1)

R. Amano, T.-H. Dinh, A. Sasanuma, G. Arai, Y. Fujii, T. Hatano, T. Ejima, A. Sunahara, G. O’Sullivan, A. Takahashi, D. Nakamura, K. Sakaue, T. Miura, and T. Higashiguchi, “Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas,” Jpn. J. Appl. Phys.: Rapid Commun. 57(7), 070311 (2018).
[Crossref]

Nature (1)

W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature 435(7046), 1210–1213 (2005).
[Crossref] [PubMed]

Opt. Express (2)

Phys. Lett. A (1)

R. Fazeli, “Enhanced X-ray emission from laser-produced gold plasma by double pulses irradiation of nano-porous targets,” Phys. Lett. A 381(5), 467–471 (2017).
[Crossref]

Phys. Rev. A (1)

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (R) (2003).

Phys. Rev. E Stat. Nonlin. Soft Matter Phys. (1)

A. A. Andreev, J. Limpouch, A. B. Iskakov, and H. Nakano, “Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 65(2), 026403 (2002).
[Crossref] [PubMed]

Phys. Rev. Lett. (1)

E. J. Takahashi, T. Kanai, K. L. Ishikawa, Y. Nabekawa, and K. Midorikawa, “Coherent Water Window X Ray by Phase-Matched High-Order Harmonic Generation in Neutral Media,” Phys. Rev. Lett. 101(25), 253901 (2008).
[Crossref] [PubMed]

Proc. SPIE (1)

K. Sakano and M. Yamamoto, “Development of soft x-ray multilayer mirrors for a wavelength of 3 nm,” Proc. SPIE 3767, 238–241 (1999).
[Crossref]

Rev. Sci. Instrum. (2)

P. A. C. Jansson, U. Vogt, and H. M. Hertz, “Liquid-nitrogen-jet laser-plasma source for compact soft x-ray microscopy,” Rev. Sci. Instrum. 76(4), 043503 (2005).
[Crossref]

T.-H. Dinh, Y. Kondo, T. Tamura, Y. Ono, H. Hara, H. Oikawa, Y. Yamamoto, M. Ishino, M. Nishikino, T. Makimura, P. Dunne, G. O’Sullivan, S. Ohta, K. Kitano, T. Ejima, T. Hatano, and T. Higashiguchi, “Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm,” Rev. Sci. Instrum. 87(12), 123106 (2016).
[Crossref] [PubMed]

Science (2)

J. C. Solem and G. C. Baldwin, “Microholography of Living Organisms,” Science 218(4569), 229–235 (1982).
[Crossref] [PubMed]

E. A. Gibson, A. Paul, N. Wagner, R. Tobey, D. Gaudiosi, S. Backus, I. P. Christov, A. Aquila, E. M. Gullikson, D. T. Attwood, M. M. Murnane, and H. C. Kapteyn, “Coherent soft x-ray generation in the water window with quasi-phase matching,” Science 302(5642), 95–98 (2003).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1 Schematic diagram of the experimental apparatus.
Fig. 2
Fig. 2 Pulse separation time dependence of the soft x-ray emission from dual-laser-produced plasmas for pre-pulse durations of 10 ns (a) and 150 ps (b), respectively. Pulse separation time dependences of the number of photons in the water-window soft x-ray spectral region (2.34 − 4.38 nm) at pre-pulse durations of 10 ns (c) and 150 ps (d), and the relative spectral intensity enhancement [I(λ) − I0(λ)] / I0(λ) = ΔI(λ) / I0(λ) for pre-pulses of 10 ns duration (e) and 150 ps duration (f).
Fig. 3
Fig. 3 Calculated electron temperature dependence of the radiation emissivity coefficient ην (a) and absorption coefficient κ’(ν) (b) of Bi at an electron density of 1 × 1019 cm−3 obtained using the CR model, where ν is the frequency of the soft x-ray emission.
Fig. 4
Fig. 4 Time-integrated pinhole images of soft x-ray emission without the pre-pulse (a) and with the 150-ps pre-pulse at pulse separation times of 7 ns (b) and 100 ns (c).

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