Abstract

We demonstrate an improved approach to integrate various color filters on a chip-scale by using stepwise metal-insulator-metal FP cavities. The cavity is composed of a thick silver mirror, an SU8 gap layer of controlled thickness, and a thin nickel layer. Reflective colors from red to blue can be generated from these filters through a simple UV lithography process. The filters were also fabricated on a flexible substrate which could be incorporated into wearable devices. This method can realize large-scale filter arrays with simple processing and may facilitate the use of structural color filters in displays and sensing.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]

2018 (2)

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

2017 (2)

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

2016 (5)

M. Miyata, H. Hatada, and J. Takahara, “Full-Color Subwavelength Printing with Gap-Plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Y. Zhang and Y. Shi, “Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure,” Opt. Express 24(12), 12542–12548 (2016).
[Crossref]

2015 (2)

F. Cheng, J. Gao, L. Stan, D. Rosenmann, D. Czaplewski, and X. Yang, “Aluminum plasmonic metamaterials for structural color printing,” Opt. Express 23(11), 14552–14560 (2015).
[Crossref]

Z. Li, S. Butun, and K. Aydin, “Large-area, Lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films,” ACS Photonics 2(2), 183–188 (2015).
[Crossref]

2014 (2)

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

2013 (2)

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

2012 (2)

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref]

2010 (2)

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

E.-H. Cho, H.-S. Kim, J.-S. Sohn, C.-Y. Moon, N.-C. Park, and Y.-P. Park, “Nanoimprinted photonic crystal color filters for solar-powered reflective displays,” Opt. Express 18(26), 27712–27722 (2010).
[Crossref]

2009 (1)

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

2007 (1)

2003 (1)

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

1996 (1)

Aizenberg, J.

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Albrektsen, O.

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

Atwater, H. A.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref]

Aydin, K.

Z. Li, S. Butun, and K. Aydin, “Large-area, Lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films,” ACS Photonics 2(2), 183–188 (2015).
[Crossref]

Bedu, F.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Blanchard, R.

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Bleikolm, A. F.

Bonod, N.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Bozhevolnyi, S. I.

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

Brongersma, M. L.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

Burgos, S. P.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref]

Butun, S.

Z. Li, S. Butun, and K. Aydin, “Large-area, Lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films,” ACS Photonics 2(2), 183–188 (2015).
[Crossref]

Byrnes, S. J.

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Capasso, F.

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Chen, Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Chen, Y. Q.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Cheng, F.

Cheong, W. C.

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

Cho, E.-H.

Crne, M.

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

Czaplewski, D.

Dai, P.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Duan, H.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Duan, H. G.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Duan, X. Y.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Feng, L.

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Gallas, B.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Gao, J.

Gao, Y. S.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Genevet, P.

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Goh, X. M.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Hatada, H.

M. Miyata, H. Hatada, and J. Takahara, “Full-Color Subwavelength Printing with Gap-Plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

Hegde, R. S.

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Jiang, L.

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Jing, J. X.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Joel, K. W. Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Kats, M. A.

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

Kim, H.-S.

Kim, S.-H.

Kivshar, Y. S.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

Koh, S. C. W.

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Kolle, M.

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Kudryashov, V.

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

Kumar, K.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Kuznetsov, A. I.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

Lee, H.-S.

Lee, K.-D.

Lee, S.-S.

Li, M.

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Li, Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Li, Z.

Z. Li, S. Butun, and K. Aydin, “Large-area, Lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films,” ACS Photonics 2(2), 183–188 (2015).
[Crossref]

Lin, Z.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Liu, N.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Long, Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Luk’yanchuk, B.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

Matuschek, M.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Miroshnichenko, A. E.

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

Miyata, M.

M. Miyata, H. Hatada, and J. Takahara, “Full-Color Subwavelength Printing with Gap-Plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

Moon, C.-Y.

Neubrech, F.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Ozerov, I.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Palik, E. D.

E. D. Palik, Handbook of optical constants of solids II (Academic, 1991).

Park, J. O.

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

Park, N.-C.

Park, Y.-P.

Phillip, R. W.

Pors, A.

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

Proust, J.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Qiu, C.-W.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Radhakrishnan, K.

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

Roberts, A. S.

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

Rosenmann, D.

Ruan, Q.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Sharma, V.

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

Shen, W.

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Shi, Y.

Sohn, J.-S.

Song, Q. H.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Srinivasarao, M.

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

Stan, L.

Sun, S.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Takahara, J.

M. Miyata, H. Hatada, and J. Takahara, “Full-Color Subwavelength Printing with Gap-Plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

Tan, S. J.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Wang, Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Wang, Y. M.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Wei, J. N.

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Xiao, S. M.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Yang, J. K.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Yang, J. K. W.

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Yang, W. H.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Yang, X.

Yang, Z.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Yokogawa, S.

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref]

Yoon, Y.-T.

Yu, X. Y.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Yuan, X. C.

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

Zhang, C.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

Zhang, L.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Zhang, Y.

Y. Zhang and Y. Shi, “Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure,” Opt. Express 24(12), 12542–12548 (2016).
[Crossref]

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Zhang, Z.

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Zheng, M.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Zheng, Y.

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Zhou, Y.

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Zhou, Y. M.

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

Zhu, D.

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Zhu, X.

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

ACS Nano (2)

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-Dielectric Colored Metasurfaces with Silicon Mie Resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

ACS Photonics (1)

Z. Li, S. Butun, and K. Aydin, “Large-area, Lithography-free super absorbers and color filters at visible frequencies using ultrathin metallic films,” ACS Photonics 2(2), 183–188 (2015).
[Crossref]

Adv. Opt. Mater. (2)

Z. Yang, Y. Zhou, Y. Chen, Y. Wang, P. Dai, Z. Zhang, and H. Duan, “Reflective Color Filters and Monolithic Color Printing Based on Asymmetric Fabry–Perot Cavities Using Nickel as a Broadband Absorber,” Adv. Opt. Mater. 4(8), 1196–1202 (2016).
[Crossref]

Z. Yang, Y. Chen, Y. Zhou, Y. Wang, P. Dai, X. Zhu, and H. Duan, “Microscopic Interference Full-Color Printing Using Grayscale-Patterned Fabry–Perot Resonance Cavities,” Adv. Opt. Mater. 5(10), 1700029 (2017).
[Crossref]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

M. A. Kats, S. J. Byrnes, R. Blanchard, M. Kolle, P. Genevet, J. Aizenberg, and F. Capasso, “Enhancement of absorption and color contrast in ultra-thin highly absorbing optical coatings,” Appl. Phys. Lett. 103(10), 101104 (2013).
[Crossref]

Langmuir (1)

L. Feng, Y. Zhang, M. Li, Y. Zheng, W. Shen, and L. Jiang, “The structural color of red rose petals and their duplicates,” Langmuir 26(18), 14885–14888 (2010).
[Crossref]

Microelectron. Eng. (1)

V. Kudryashov, X. C. Yuan, W. C. Cheong, and K. Radhakrishnan, “Grey scale structures formation in SU-8 with e-beam and UV,” Microelectron. Eng. 67-68, 306–311 (2003).
[Crossref]

Nano Lett. (5)

S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett. 12(8), 4349–4354 (2012).
[Crossref]

A. S. Roberts, A. Pors, O. Albrektsen, and S. I. Bozhevolnyi, “Subwavelength plasmonic color printing protected for ambient use,” Nano Lett. 14(2), 783–787 (2014).
[Crossref]

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C.-W. Qiu, and J. K. Yang, “Plasmonic color palettes for photorealistic printing with aluminum nanostructures,” Nano Lett. 14(7), 4023–4029 (2014).
[Crossref]

Y. Q. Chen, X. Y. Duan, M. Matuschek, Y. M. Zhou, F. Neubrech, H. G. Duan, and N. Liu, “Dynamic Color Displays Using Stepwise Cavity Resonators,” Nano Lett. 17(9), 5555–5560 (2017).
[Crossref]

M. Miyata, H. Hatada, and J. Takahara, “Full-Color Subwavelength Printing with Gap-Plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

Nat. Mater. (1)

M. A. Kats, R. Blanchard, P. Genevet, and F. Capasso, “Nanometre optical coatings based on strong interference effects in highly absorbing media,” Nat. Mater. 12(1), 20–24 (2013).
[Crossref]

Nat. Nanotechnol. (1)

K. Kumar, H. Duan, R. S. Hegde, S. C. W. Koh, J. N. Wei, and J. K. W. Yang, “Printing colour at the optical diffraction limit,” Nat. Nanotechnol. 7(9), 557–561 (2012).
[Crossref]

Opt. Express (4)

Research (1)

Y. Wang, M. Zheng, Q. Ruan, Q. Ruan, Q. Ruan, Y. Zhou, Y. Chen, P. Dai, Z. Yang, Z. Lin, Y. Long, Y. Li, N. Liu, C.-W. Qiu, C.-W. Qiu, K. W. Y. Joel, and H. Duan, “Stepwise-Nanocavity-Assisted Transmissive Color Filter Array Microprints,” Research 2018, 1–10 (2018).
[Crossref]

Science (2)

A. I. Kuznetsov, A. E. Miroshnichenko, M. L. Brongersma, Y. S. Kivshar, and B. Luk’yanchuk, “Optically resonant dielectric nanostructures,” Science 354(6314), aag2472 (2016).
[Crossref]

V. Sharma, M. Crne, J. O. Park, and M. Srinivasarao, “Structural Origin of Circularly Polarized Iridescence in Jeweled Beetles,” Science 325(5939), 449–451 (2009).
[Crossref]

Other (1)

E. D. Palik, Handbook of optical constants of solids II (Academic, 1991).

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Figures (3)

Fig. 1.
Fig. 1. (a) The schematic of the proposed asymmetric FP cavities. Stepwise SU8 thicknesses result in different reflective colors. (b) The simulated reflectance spectra for different n, k values of metals working as the top mirror layer. k = 0.2 for dashed line and k = 2 for solid line.
Fig. 2.
Fig. 2. (a) The height of SU8 as a function of UV exposure dose. (b) Simulated reflectance map of the FP cavities as a function of SU8 thickness in the visible range. Dashed lines correspond to the fabricated thicknesses of three FP cavities. (c) Chromaticity coordinates for SU8 thickness increasing from 150 nm to 400 nm. For thicknesses from 150 nm to 200 nm (blue dot line) increasing the thickness moves away from the center of the diagram. For thicknesses from 200 nm to 400 nm (red solid line), increasing the thickness allows for circular motion in the color diagram reaching every part of the visible spectrum. Arrows show the increase of the thickness. Stars are blue, green and red colors measured from three FP cavities. (d) The measured (solid line) and simulated (dashed line) spectra for SU8 thickness of 261, 323 and 378 nm. The right column shows the corresponding pictures for blue, green and red colors captured by a color CCD. The simulated reflectance and color are shown in (b) and (c).
Fig. 3.
Fig. 3. (a) The colored logo of Zhejiang University. The chip size is 3 × 3 cm. (b) The gratings obtained by twice UV exposures. The pitch is around 4 µm. (c) A colorful tangram with stepwise FP cavities. (d) The stepwise filters fabricated on a flexible substrate show red, green and blue colors. Scale bars: 1 cm in (a)(c)(d)(e) and 10 µm in (b). (e) Transmissive mode for red and green color filters

Equations (1)

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m λ = n eff × h + δ m 2 π

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