Abstract

High harmonic sources can provide ultrashort pulses of coherent radiation in the XUV and X-ray spectral region. In this paper we utilize a sub-two-cycle femtosecond fiber laser to efficiently generate a broadband continuum of high-order harmonics between 70 eV and 120 eV. The average power delivered by this source ranges from > 0.2 µW/eV at 80 eV to >0.03 µW/eV at 120 eV. At 92 eV (13.5 nm wavelength), we measured a coherent record-high average power of 0.1 µW/eV, which corresponds to 7 · 109 ph/s/eV, with a long-term stability of 0.8% rms deviation over a 20 min time period. The presented approach is average power scalable and promises up to 1011 ph/s/eV in the near future. With additional carrier-envelop phase control even isolated attosecond pulses can be expected from such sources. The combination of high flux, high photon energy and ultrashort (sub-) fs duration will enable photon-hungry time-resolved and multidimensional studies.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
  17. J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
    [Crossref]
  18. E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).
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    [Crossref]
  20. P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
    [Crossref]
  21. J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
    [Crossref]
  22. C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
    [Crossref]
  23. G. L. Yudin and M. Y. Ivanov, “Nonadiabatic tunnel ionization: Looking inside a laser cycle,” Phys. Rev. A: At., Mol., Opt. Phys. 64(1), 013409 (2001).
    [Crossref]
  24. S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
    [Crossref]
  25. O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intracavity XUV output coupler,” Opt. Express 19(11), 10232–10240 (2011).
    [Crossref]
  26. E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
    [Crossref]
  27. C. Ding, W. Xiong, T. Fan, D. D. Hickstein, T. Popmintchev, X. Zhang, M. Walls, M. M. Murnane, and H. C. Kapteyn, “High flux coherent super-continuum soft X-ray source driven by a single-stage, 10mJ, Ti:sapphire amplifier-pumped OPA,” Opt. Express 22(5), 6194–6202 (2014).
    [Crossref]
  28. D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
    [Crossref]
  29. S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
    [Crossref]
  30. R. Klas, A. Kirsche, M. Tschernajew, J. Rothhardt, and J. Limpert, “Annular beam driven high harmonic generation for high flux coherent XUV and soft X-ray radiation,” Opt. Express 26(15), 19318–19327 (2018).
    [Crossref]

2019 (2)

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

2018 (3)

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

R. Klas, A. Kirsche, M. Tschernajew, J. Rothhardt, and J. Limpert, “Annular beam driven high harmonic generation for high flux coherent XUV and soft X-ray radiation,” Opt. Express 26(15), 19318–19327 (2018).
[Crossref]

2017 (3)

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
[Crossref]

T. Nubbemeyer, M. Kaumanns, M. Ueffing, M. Gorjan, A. Alismail, H. Fattahi, J. Brons, O. Pronin, H. G. Barros, Z. Major, T. Metzger, D. Sutter, and F. Krausz, “1 kW, 200 mJ picosecond thin-disk laser system,” Opt. Lett. 42(7), 1381–1384 (2017).
[Crossref]

2016 (7)

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

2015 (2)

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

2014 (4)

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

C. Ding, W. Xiong, T. Fan, D. D. Hickstein, T. Popmintchev, X. Zhang, M. Walls, M. M. Murnane, and H. C. Kapteyn, “High flux coherent super-continuum soft X-ray source driven by a single-stage, 10mJ, Ti:sapphire amplifier-pumped OPA,” Opt. Express 22(5), 6194–6202 (2014).
[Crossref]

2011 (2)

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intracavity XUV output coupler,” Opt. Express 19(11), 10232–10240 (2011).
[Crossref]

2010 (1)

2009 (1)

F. Krausz and M. Ivanov, “Attosecond physics,” Rev. Mod. Phys. 81(1), 163–234 (2009).
[Crossref]

2001 (1)

G. L. Yudin and M. Y. Ivanov, “Nonadiabatic tunnel ionization: Looking inside a laser cycle,” Phys. Rev. A: At., Mol., Opt. Phys. 64(1), 013409 (2001).
[Crossref]

1999 (1)

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

1993 (1)

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[Crossref]

1992 (1)

J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
[Crossref]

Agostini, P.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Alismail, A.

Andersen, T. V.

Apolonski, A.

Arnold, C. L.

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
[Crossref]

Barros, H. G.

Becker, A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Boll, R.

Bomme, C.

Breger, P.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Brons, J.

Cassou, K.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Chen, M.-C.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Constant, E.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Corkum, P. B.

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[Crossref]

Cormier, E.

Couairon, A.

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
[Crossref]

Cros, B.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Daboussi, S.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Dachraoui, H.

de Vries, O.

Demmler, S.

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

Di Fraia, M.

Ding, C.

Dollar, F.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Dorrer, C.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Drozdy, A.

Eidam, T.

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

T. Eidam, S. Hanf, E. Seise, T. V. Andersen, T. Gabler, C. Wirth, T. Schreiber, J. Limpert, and A. Tünnermann, “Femtosecond fiber CPA system emitting 830 W average output power,” Opt. Lett. 35(2), 94–96 (2010).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Elsaesser, T.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Erk, B.

Eschen, W.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

Faatz, B.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Fabian, S.

Fan, T.

Fattahi, H.

Fill, E.

Foord, M.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Frederik, T.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

Gabler, T.

Gaeta, A. L.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Gaffney, J. A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Gao, X.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Garzella, D.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Gorjan, M.

Gotschall, T.

Gottschall, T.

Guilbaud, O.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Hädrich, S.

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Hage, A.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Hanf, S.

Hankla, A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Harada, T.

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

Hernandez-Garcia, C.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Heyl, C. M.

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
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Hickstein, D. D.

Hilbert, V.

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Hoff, D.

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Hoffmann, A.

Holldack, K.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Höppner, H.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Horke, D. A.

Huang, Z.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
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Ivanov, M.

F. Krausz and M. Ivanov, “Attosecond physics,” Rev. Mod. Phys. 81(1), 163–234 (2009).
[Crossref]

Ivanov, M. Y.

G. L. Yudin and M. Y. Ivanov, “Nonadiabatic tunnel ionization: Looking inside a laser cycle,” Phys. Rev. A: At., Mol., Opt. Phys. 64(1), 013409 (2001).
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Jaron-Becker, A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Jójárt, P.

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Just, F.

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Kapteyn, H.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Kapteyn, H. C.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

C. Ding, W. Xiong, T. Fan, D. D. Hickstein, T. Popmintchev, X. Zhang, M. Walls, M. M. Murnane, and H. C. Kapteyn, “High flux coherent super-continuum soft X-ray source driven by a single-stage, 10mJ, Ti:sapphire amplifier-pumped OPA,” Opt. Express 22(5), 6194–6202 (2014).
[Crossref]

Kaumanns, M.

Kazamias, S.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Kienel, M.

Kierspel, T.

Kinoshita, H.

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

Kirsche, A.

Klas, R.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

R. Klas, A. Kirsche, M. Tschernajew, J. Rothhardt, and J. Limpert, “Annular beam driven high harmonic generation for high flux coherent XUV and soft X-ray radiation,” Opt. Express 26(15), 19318–19327 (2018).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

Klenke, A.

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Krause, J. L.

J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
[Crossref]

Krausz, F.

Krebs, M.

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

Kulander, K. C.

J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
[Crossref]

Küpper, J.

L’Huillier, A.

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
[Crossref]

Laarmann, T.

Le Blanc, C.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Levis, R. J.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Li, J.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

Libby, S. B.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Liem, A.

Limpert, J.

R. Klas, A. Kirsche, M. Tschernajew, J. Rothhardt, and J. Limpert, “Annular beam driven high harmonic generation for high flux coherent XUV and soft X-ray radiation,” Opt. Express 26(15), 19318–19327 (2018).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

T. Eidam, S. Hanf, E. Seise, T. V. Andersen, T. Gabler, C. Wirth, T. Schreiber, J. Limpert, and A. Tünnermann, “Femtosecond fiber CPA system emitting 830 W average output power,” Opt. Lett. 35(2), 94–96 (2010).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Major, Z.

Mamezaki, D.

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

Mancuso, C.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Maynard, G.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Metzger, T.

Mével, E.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Midorikawa, K.

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

Müller, M.

Mullins, T.

Murnane, M.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Murnane, M. M.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

C. Ding, W. Xiong, T. Fan, D. D. Hickstein, T. Popmintchev, X. Zhang, M. Walls, M. M. Murnane, and H. C. Kapteyn, “High flux coherent super-continuum soft X-ray source driven by a single-stage, 10mJ, Ti:sapphire amplifier-pumped OPA,” Opt. Express 22(5), 6194–6202 (2014).
[Crossref]

Nagata, Y.

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

Nathanel, A.

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Nubbemeyer, T.

Osvay, K.

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Paulus, G.G.

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Perez-Hernandez, J. A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Pertsch, T.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

Pervak, V.

Plaja, L.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Plötner, M.

Popmintchev, D.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Popmintchev, T.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

C. Ding, W. Xiong, T. Fan, D. D. Hickstein, T. Popmintchev, X. Zhang, M. Walls, M. M. Murnane, and H. C. Kapteyn, “High flux coherent super-continuum soft X-ray source driven by a single-stage, 10mJ, Ti:sapphire amplifier-pumped OPA,” Opt. Express 22(5), 6194–6202 (2014).
[Crossref]

Prandolini, M. J.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Pronin, O.

Przystawik, A.

Rauschenberger, J.

Riedel, R.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Rolles, D.

Romanov, D. A.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Ros, D.

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Rothhardt, J.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

R. Klas, A. Kirsche, M. Tschernajew, J. Rothhardt, and J. Limpert, “Annular beam driven high harmonic generation for high flux coherent XUV and soft X-ray radiation,” Opt. Express 26(15), 19318–19327 (2018).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

Salin, F.

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

Savelyev, E.

Sayler, A. M.

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Sch, V.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

Schafer, K. J.

J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
[Crossref]

Schelle, D.

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Schoenlein, R.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Schreiber, T.

Schrempel, F.

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Schulz, M.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Seise, E.

Shamir, Y.

Shestaev, E.

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Shim, B.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Spiel, C.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

Spielmann, C.

Steinert, M.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

Sutter, D.

Tadesse, G. K.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

Tanikawa, T.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Tarazkar, M.

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Tavella, F.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Teubner, U.

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

Tschernajew, M.

Tschnernajew, M.

Tünnermann, A.

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, Y. Shamir, M. Tschnernajew, R. Klas, A. Hoffmann, G. K. Tadesse, A. Klenke, T. Gottschall, T. Eidam, J. Limpert, A. Tünnermann, R. Boll, C. Bomme, H. Dachraoui, B. Erk, M. Di Fraia, D. A. Horke, T. Kierspel, T. Mullins, A. Przystawik, E. Savelyev, J. Wiese, T. Laarmann, J. Küpper, and D. Rolles, “High-repetition-rate and high-photon-flux 70 eV high-harmonic source for coincidence ion imaging of gas-phase molecules,” Opt. Express 24(16), 18133–18147 (2016).
[Crossref]

R. Klas, S. Demmler, M. Tschernajew, S. Hädrich, Y. Shamir, A. Tünnermann, J. Rothhardt, and J. Limpert, “Table-top milliwatt-class extreme ultraviolet high harmonic light source,” Optica 3(11), 1167–1170 (2016).
[Crossref]

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

S. Hädrich, J. Rothhardt, S. Demmler, M. Tschernajew, A. Hoffmann, M. Krebs, A. Liem, O. de Vries, M. Plötner, S. Fabian, T. Schreiber, J. Limpert, and A. Tünnermann, “Scalability of components for kW-level average power few-cycle lasers,” Appl. Opt. 55(7), 1636–1640 (2016).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

T. Eidam, S. Hanf, E. Seise, T. V. Andersen, T. Gabler, C. Wirth, T. Schreiber, J. Limpert, and A. Tünnermann, “Femtosecond fiber CPA system emitting 830 W average output power,” Opt. Lett. 35(2), 94–96 (2010).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Ueffing, M.

Várallyay, Z.

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

Wahyutama, I.

Walls, M.

Watanabe, T.

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

Wiese, J.

Wirth, C.

Woerner, M.

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Xiong, W.

Yudin, G. L.

G. L. Yudin and M. Y. Ivanov, “Nonadiabatic tunnel ionization: Looking inside a laser cycle,” Phys. Rev. A: At., Mol., Opt. Phys. 64(1), 013409 (2001).
[Crossref]

Zhang, X.

Zilk, M.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Zoltán, P.

Zürch, M.

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

Appl. Opt. (1)

J. Opt. (U. K.) (1)

J. Rothhardt, G. K. Tadesse, W. Eschen, and J. Limpert, “Table-top nanoscale coherent imaging with XUV light,” J. Opt. (U. K.) 20(11), 113001 (2018).
[Crossref]

J. Phys. B: At., Mol. Opt. Phys. (2)

S. Hädrich, J. Rothhardt, M. Krebs, S. Demmler, A. Klenke, A. Tünnermann, and J. Limpert, “Single-pass high harmonic generation at high repetition rate and photon flux,” J. Phys. B: At., Mol. Opt. Phys. 49(17), 172002 (2016).
[Crossref]

C. M. Heyl, C. L. Arnold, A. Couairon, and A. L’Huillier, “Introduction to macroscopic power scaling principles for high-order harmonic generation,” J. Phys. B: At., Mol. Opt. Phys. 50(1), 013001 (2017).
[Crossref]

Jpn. J. Appl. Phys. (2)

H. Kinoshita, T. Harada, Y. Nagata, T. Watanabe, and K. Midorikawa, “Development of EUV mask inspection system using high-order harmonic generationwith a femtosecond laser,” Jpn. J. Appl. Phys. 53(8), 086701 (2014).
[Crossref]

D. Mamezaki, T. Harada, Y. Nagata, and T. Watanabe, “Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source,” Jpn. J. Appl. Phys. 56(6S1), 06GB01 (2017).
[Crossref]

New J. Phys. (2)

H. Höppner, A. Hage, T. Tanikawa, M. Schulz, R. Riedel, U. Teubner, M. J. Prandolini, B. Faatz, and F. Tavella, “An optical parametric chirped-pulse amplifier for seeding highrepetition rate free-electron lasers,”,” New J. Phys. 17(5), 053020 (2015).
[Crossref]

J. Rothhardt, M. Krebs, S. Hädrich, S. Demmler, J. Limpert, and A. Tünnermann, “Absorption-limited and phase-matched high harmonic generation in the tight focusing regime,” New J. Phys. 16(3), 033022 (2014).
[Crossref]

Opt. Express (4)

Opt. Lett. (6)

G. K. Tadesse, R. Klas, S. Demmler, S. Hädrich, I. Wahyutama, M. Steinert, C. Spielmann, M. Zürch, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High speed and high resolution table-top nanoscale imaging,” Opt. Lett. 41(22), 5170–5173 (2016).
[Crossref]

T. Nubbemeyer, M. Kaumanns, M. Ueffing, M. Gorjan, A. Alismail, H. Fattahi, J. Brons, O. Pronin, H. G. Barros, Z. Major, T. Metzger, D. Sutter, and F. Krausz, “1 kW, 200 mJ picosecond thin-disk laser system,” Opt. Lett. 42(7), 1381–1384 (2017).
[Crossref]

S. Hädrich, M. Kienel, M. Müller, A. Klenke, J. Rothhardt, R. Klas, T. Gottschall, T. Eidam, A. Drozdy, P. Zoltán, Z. Várallyay, E. Cormier, K. Osvay, A. Tünnermann, and J. Limpert, “Energetic sub-2-cycle laser with 216 W average power,” Opt. Lett. 41(18), 4332–4335 (2016).
[Crossref]

M. Müller, M. Kienel, A. Klenke, T. Gottschall, E. Shestaev, M. Plötner, J. Limpert, and A. Tünnermann, “1 kW 1 mJ eight-channel ultrafast fiber laser,” Opt. Lett. 41(15), 3439–3442 (2016).
[Crossref]

J. Rothhardt, S. Hädrich, A. Klenke, S. Demmler, A. Hoffmann, T. Gotschall, T. Eidam, M. Krebs, J. Limpert, and A. Tünnermann, “53W average power few-cycle fiber laser system generating soft x rays up to the water window,” Opt. Lett. 39(17), 5224–5227 (2014).
[Crossref]

T. Eidam, S. Hanf, E. Seise, T. V. Andersen, T. Gabler, C. Wirth, T. Schreiber, J. Limpert, and A. Tünnermann, “Femtosecond fiber CPA system emitting 830 W average output power,” Opt. Lett. 35(2), 94–96 (2010).
[Crossref]

Optica (1)

Philos. Trans. R. Soc., A (1)

R. Schoenlein, T. Elsaesser, K. Holldack, Z. Huang, H. Kapteyn, M. Murnane, and M. Woerner, “Recent advances in ultrafast X-ray sources,” Philos. Trans. R. Soc., A 377(2145), 20180384 (2019).
[Crossref]

Phys. Rev. A (1)

S. Kazamias, S. Daboussi, O. Guilbaud, K. Cassou, D. Ros, B. Cros, and G. Maynard, “Pressure-induced phase matching in high-order harmonic generation,” Phys. Rev. A 83(6), 063405 (2011).
[Crossref]

Phys. Rev. A: At., Mol., Opt. Phys. (1)

G. L. Yudin and M. Y. Ivanov, “Nonadiabatic tunnel ionization: Looking inside a laser cycle,” Phys. Rev. A: At., Mol., Opt. Phys. 64(1), 013409 (2001).
[Crossref]

Phys. Rev. Lett. (3)

E. Constant, D. Garzella, P. Breger, E. Mével, C. Dorrer, C. Le Blanc, F. Salin, and P. Agostini, “Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment,” Phys. Rev. Lett. 82(8), 1668–1671 (1999).
[Crossref]

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[Crossref]

J. L. Krause, K. J. Schafer, and K. C. Kulander, “High-order harmonic generation from atoms and ions in the high intensity regime,” Phys. Rev. Lett. 68(24), 3535–3538 (1992).
[Crossref]

Rev. Mod. Phys. (1)

F. Krausz and M. Ivanov, “Attosecond physics,” Rev. Mod. Phys. 81(1), 163–234 (2009).
[Crossref]

Sci. Rep. (2)

G. K. Tadesse, W. Eschen, R. Klas, M. Tschernajew, T. Frederik, M. Steinert, M. Zilk, V. Sch, M. Zürch, T. Pertsch, C. Spiel, J. Li, and J. Rothhardt, “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source,” Sci. Rep. 9(1), 1735 (2019).
[Crossref]

G. K. Tadesse, W. Eschen, R. Klas, V. Hilbert, D. Schelle, A. Nathanel, M. Zilk, M. Steinert, F. Schrempel, T. Pertsch, A. Tünnermann, J. Limpert, and J. Rothhardt, “High resolution XUV Fourier transform holography on a table top,” Sci. Rep. 8(1), 8677 (2018).
[Crossref]

Science (1)

D. Popmintchev, C. Hernandez-Garcia, F. Dollar, C. Mancuso, J. A. Perez-Hernandez, M.-C. Chen, A. Hankla, X. Gao, B. Shim, A. L. Gaeta, M. Tarazkar, D. A. Romanov, R. J. Levis, J. A. Gaffney, M. Foord, S. B. Libby, A. Jaron-Becker, A. Becker, L. Plaja, M. M. Murnane, H. C. Kapteyn, and T. Popmintchev, “Ultraviolet surprise: Efficient soft x-ray high-harmonic generation in multiply ionized plasmas,” Science 350(6265), 1225–1231 (2015).
[Crossref]

Other (1)

E. Shestaev, D. Hoff, A. M. Sayler, A. Klenke, S. Hädrich, F. Just, T. Eidam, P. Jójárt, Z. Várallyay, K. Osvay, G.G. Paulus, A. Tünnermann, and J. Limpert, “High power Ytterbium-doped fiber laser delivering few-cycle, CEP-stable 100 uJ pulses at 100 kHz”, submitted to Opt. Lett. (2019).

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Figures (6)

Fig. 1.
Fig. 1. (a) Calculated ionization fraction. Using Yudin-Ivanov rates for different pulse lengths and intensities to reach ∼10% ionization at the peak of the laser in argon. (b) Phase-matching cutoff with different pulse lengths at. The central wavelength is 1030 nm [1].
Fig. 2.
Fig. 2. Experimental setup for a few-cycle laser driven 13.5 nm EUV source (HFC: hollow core fiber compression, ID: inner diameter, L: length, GIPs: gracing incidence plates).
Fig. 3.
Fig. 3. Measured and simulated spectrum as well as the retrieved SPIDER phase (a), and the corresponding reconstructed pulse (b) after the second hollow core compression stage.
Fig. 4.
Fig. 4. Pressure scans for (a) argon and (b) neon (solid lines) at 13.5 nm, with the corresponding simulations (dashed lines).
Fig. 5.
Fig. 5. (a) Spectra for HHG driven by 30 fs pulses at 50 kHz in argon (green line), as well as for HHG driven by 7 fs pulses at 75 kHz in argon (blue line) and neon (red line). The dashed yellow line marks 13.5 nm (92 eV). (b) Spatial lineout of HHG with 7 fs and argon at 13.5 nm (solid line) with the Gaussian fit (dashed line).
Fig. 6.
Fig. 6. (a) Diffraction pattern (upper panel) and lineout along the dashed white line (lower panel) after focusing a 13.5 nm EUV beam on a double slit (inset). (b) Long term stability of the source at 13.5 nm with a rms deviation of 0.8%

Equations (2)

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E c u t o f f = I P + a I λ 2 .
S H H G I 9 .

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