Abstract

We demonstrate a silicon Mach–Zehnder modulator with a coplanar waveguide transmission-line electrode structure using a meandering optical waveguide and alternating-side PN junction loading of the electrodes, which helps suppress the signal distortion caused by the parasitic slot-line mode and improves the electro-optic (EO) bandwidth. The silicon MZM exhibits a π-phase-shift voltage (Vπ) of 4.5 V with an EO 3 dB bandwidth of 20  GHz for a 5 mm long phase shifter. This achieved Vπ is among the lowest for silicon-only modulators with a bandwidth of more than 20 GHz.

© 2016 Optical Society of America

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