Abstract

Polarizers have been widely used in various optical systems to reduce polarization cross talk. The polarizers based on the silicon nanowire waveguide can provide chip-scale device size and a high polarization extinction ratio. However, the working bandwidth for the on-chip silicon polarizers is always limited (<100  nm) by the strong waveguide dispersion. In this paper, an on-chip all-silicon polarizer with an extremely broad working bandwidth is proposed and demonstrated. The device is based on a 180° sharp waveguide bend, assisted with anisotropic subwavelength grating (SWG) metamaterial cladding to enhance the polarization selectivity. For TE polarization, the effective refractive index for SWG is extraordinary, so the incident TE mode can propagate through the sharp waveguide bend. For TM polarization, the effective refractive index for SWG is ordinary, so the incident TM mode will be coupled into the radiation mode regardless of the wavelength. The fabricated polarizer shows low loss (<1  dB) and high polarization extinction ratio (>20  dB) over a >415  nm bandwidth from 1.26 to 1.675 μm, which is at least fourfold better than what has been demonstrated in all previous works. To the best of our knowledge, such a device is the first all-silicon polarizer that covers O-, E-, S-, C-, L-, and U-bands.

© 2019 Chinese Laser Press

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References

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2019 (7)

H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
[Crossref]

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
[Crossref]

H. Xu, D. Dai, and Y. Shi, “Ultra-broadband and ultra-compact on-chip silicon polarization beam splitter by using hetero-anisotropic metamaterials,” Laser Photon. Rev. 13, 1800349 (2019).
[Crossref]

W. Bogaerts, Y. Xing, and U. Khan, “Layout-aware variability analysis, yield prediction, and optimization in photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 25, 6100413 (2019).
[Crossref]

H. Xu and Y. Shi, “Subwavelength-grating-assisted silicon polarization rotator covering all optical communication bands,” Opt. Express 27, 5588–5597 (2019).
[Crossref]

B. Bai, F. Yang, and Z. Zhou, “Demonstration of an on-chip TE-pass polarizer using a silicon hybrid plasmonic grating,” Photon. Res. 7, 289–293 (2019).
[Crossref]

D. Liu, M. Zhang, and D. Dai, “Low-loss and low-crosstalk silicon triplexer based on cascaded multimode waveguide gratings,” Opt. Lett. 44, 1304–1307 (2019).
[Crossref]

2018 (9)

H. Xu, L. Liu, and Y. Shi, “Polarization-insensitive four-channel coarse wavelength-division (de)multiplexer based on Mach-Zehnder interferometers with bent directional couplers and polarization rotators,” Opt. Lett. 43, 1483–1486 (2018).
[Crossref]

N. Abadía, M. Saber, F. Bello, A. Samani, E. El-Fiky, Y. Wang, J. F. Donegan, and D. V. Plant, “CMOS-compatible multi-band plasmonic TE-pass polarizer,” Opt. Express 26, 30292–30304 (2018).
[Crossref]

H. Zafar, P. Moreira, A. M. Taha, B. Paredes, M. S. Dahlem, and A. Khilo, “Compact silicon TE-pass polarizer using adiabatically-bent fully-etched waveguides,” Opt. Express 26, 31850–31860 (2018).
[Crossref]

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

H. Xu and Y. Shi, “Ultra-sharp multi-mode waveguide bending assisted with metamaterial-based mode converters,” Laser Photon. Rev. 12, 1700240 (2018).
[Crossref]

H. Xu and Y. Shi, “Metamaterial-based Maxwell’s fisheye lens for multimode waveguide crossing,” Laser Photon. Rev. 12, 1800094 (2018).
[Crossref]

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

W. Bogaerts and L. Chrostowski, “Silicon photonics circuit design: methods, tools and challenges,” Laser Photon. Rev. 12, 1700237 (2018).
[Crossref]

2017 (10)

B. Ni and J. Xiao, “A compact silicon-based TE-pass polarizer using three-guide directional couplers,” IEEE Photon. Technol. Lett. 29, 1631–1634 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon TE-pass polarizer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 861–864 (2017).
[Crossref]

B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
[Crossref]

H. Xu and Y. Shi, “Flat-top CWDM (de)multiplexer based on MZI with bent directional couplers,” IEEE Photon. Technol. Lett. 30, 169–172 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon triplexer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 1265–1268 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact and highly efficient polarization rotator utilizing multi-mode waveguides,” Opt. Lett. 42, 771–774 (2017).
[Crossref]

H. Wu, Y. Tan, and D. Dai, “Ultra-broadband high-performance polarizing beam splitter on silicon,” Opt. Express 25, 6069–6075 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-broadband silicon polarization splitter-rotator based on the multi-mode waveguide,” Opt. Express 25, 18485–18491 (2017).
[Crossref]

C. Li and D. Dai, “Compact polarization beam splitter for silicon photonic integrated circuits with a 340-nm-thick silicon core layer,” Opt. Lett. 42, 4243–4246 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact polarization-independent directional couplers utilizing a subwavelength structure,” Opt. Lett. 42, 5202–5205 (2017).
[Crossref]

2016 (4)

D. Kim, M. Lee, Y. Kim, and K. Kim, “Ultracompact transverse magnetic mode-pass filter based on one-dimensional photonic crystals with subwavelength structures,” Opt. Express 24, 21560–21565 (2016).
[Crossref]

J. Chen, Y. Zhang, and Y. Shi, “An on-chip triplexer based on silicon Bragg grating-assisted multimode interference couplers,” IEEE Photon. Technol. Lett. 29, 63–65 (2016).
[Crossref]

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
[Crossref]

2015 (6)

2014 (4)

X. Guan, P. Chen, S. Chen, P. Xu, Y. Shi, and D. Dai, “Low-loss ultracompact transverse-magnetic-pass polarizer with a silicon subwavelength grating waveguide,” Opt. Lett. 39, 4514–4517 (2014).
[Crossref]

Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
[Crossref]

2013 (3)

2012 (3)

2011 (1)

2010 (2)

2005 (1)

2004 (1)

1997 (1)

1996 (1)

1987 (1)

1984 (1)

1983 (1)

1980 (1)

Abadía, N.

Aers, G. C.

Agha, I.

Aitchison, J. S.

Aitchison, S. J.

Alam, M. Z.

Alonso-Ramos, C.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
[Crossref]

Atkinson, J.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Atwater, H. A.

P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

Baets, R.

Bai, B.

B. Bai, F. Yang, and Z. Zhou, “Demonstration of an on-chip TE-pass polarizer using a silicon hybrid plasmonic grating,” Photon. Res. 7, 289–293 (2019).
[Crossref]

B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
[Crossref]

B. Bai, X. Li, and Z. Zhou, “Fabrication tolerant TE-pass polarizer based on hybrid plasmonic Bragg grating,” in International Conference on Group IV Photonics (IEEE, 2016), pp. 132–133.

Barwicz, T.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Bauters, J.

D. Dai, J. Bauters, and J. E. Bowers, “Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction,” Light Sci. Appl. 1, e1 (2012).
[Crossref]

Bello, F.

Benedikovic, D.

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
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Bergh, R. A.

Bhawalkar, D. D.

Bienstman, P.

Bock, P. J.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
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P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
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Bogaerts, W.

W. Bogaerts, Y. Xing, and U. Khan, “Layout-aware variability analysis, yield prediction, and optimization in photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 25, 6100413 (2019).
[Crossref]

W. Bogaerts and L. Chrostowski, “Silicon photonics circuit design: methods, tools and challenges,” Laser Photon. Rev. 12, 1700237 (2018).
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Bowers, J. E.

H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
[Crossref]

J. Wang, D. Liang, Y. Tang, D. Dai, and J. E. Bowers, “Realization of an ultra-short silicon polarization beam splitter with an asymmetrical bent directional coupler,” Opt. Lett. 38, 4–6 (2013).
[Crossref]

D. Dai, J. Bauters, and J. E. Bowers, “Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction,” Light Sci. Appl. 1, e1 (2012).
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D. Dai, Z. Wang, N. Julian, and J. E. Bowers, “Compact broadband polarizer based on shallowly-etched silicon-on-insulator ridge optical waveguides,” Opt. Express 18, 27404–27415 (2010).
[Crossref]

Cheben, P.

P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23, 22553–22563 (2015).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
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Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering,” IEEE Photon. J. 7, 7802107 (2015).
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D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
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Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
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A. Maese-Novo, R. Halir, S. Romero-García, D. Pérez-Galacho, L. Zavargo-Peche, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, and P. Cheben, “Wavelength independent multimode interference coupler,” Opt. Express 21, 7033–7040 (2013).
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R. Halir, A. Maese-Novo, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, D.-X. Xu, J. H. Schmid, and S. Janz, “Colorless directional coupler with dispersion engineered sub-wavelength structure,” Opt. Express 20, 13470–13477 (2012).
[Crossref]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
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Chen, J.

J. Chen, Y. Zhang, and Y. Shi, “An on-chip triplexer based on silicon Bragg grating-assisted multimode interference couplers,” IEEE Photon. Technol. Lett. 29, 63–65 (2016).
[Crossref]

Chen, L.

Chen, P.

Chen, R.

B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
[Crossref]

Chen, S.

Chrostowski, L.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

W. Bogaerts and L. Chrostowski, “Silicon photonics circuit design: methods, tools and challenges,” Laser Photon. Rev. 12, 1700237 (2018).
[Crossref]

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
[Crossref]

Dado, M.

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

Dahlem, M. S.

Dai, D.

H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
[Crossref]

D. Liu, M. Zhang, and D. Dai, “Low-loss and low-crosstalk silicon triplexer based on cascaded multimode waveguide gratings,” Opt. Lett. 44, 1304–1307 (2019).
[Crossref]

H. Xu, D. Dai, and Y. Shi, “Ultra-broadband and ultra-compact on-chip silicon polarization beam splitter by using hetero-anisotropic metamaterials,” Laser Photon. Rev. 13, 1800349 (2019).
[Crossref]

C. Li and D. Dai, “Compact polarization beam splitter for silicon photonic integrated circuits with a 340-nm-thick silicon core layer,” Opt. Lett. 42, 4243–4246 (2017).
[Crossref]

H. Wu, Y. Tan, and D. Dai, “Ultra-broadband high-performance polarizing beam splitter on silicon,” Opt. Express 25, 6069–6075 (2017).
[Crossref]

X. Guan, P. Chen, S. Chen, P. Xu, Y. Shi, and D. Dai, “Low-loss ultracompact transverse-magnetic-pass polarizer with a silicon subwavelength grating waveguide,” Opt. Lett. 39, 4514–4517 (2014).
[Crossref]

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
[Crossref]

J. Wang, D. Liang, Y. Tang, D. Dai, and J. E. Bowers, “Realization of an ultra-short silicon polarization beam splitter with an asymmetrical bent directional coupler,” Opt. Lett. 38, 4–6 (2013).
[Crossref]

D. Dai, L. Liu, S. Gao, D. X. Xu, and S. He, “Polarization management for silicon photonic integrated circuits,” Laser Photon. Rev. 7, 303–328 (2013).
[Crossref]

D. Dai, J. Bauters, and J. E. Bowers, “Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction,” Light Sci. Appl. 1, e1 (2012).
[Crossref]

D. Dai, Z. Wang, N. Julian, and J. E. Bowers, “Compact broadband polarizer based on shallowly-etched silicon-on-insulator ridge optical waveguides,” Opt. Express 18, 27404–27415 (2010).
[Crossref]

DeCorby, R. G.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Delâge, A.

Deng, J.

Deng, X.

Densmore, A.

Donegan, J. F.

Edahiro, T.

El-Fiky, E.

Engelmann, S.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Erdogan, T.

Fortier, P.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Gao, S.

D. Dai, L. Liu, S. Gao, D. X. Xu, and S. He, “Polarization management for silicon photonic integrated circuits,” Laser Photon. Rev. 7, 303–328 (2013).
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Gilo, M.

Green, W. M. J.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Gu, C.

Guan, X.

X. Guan, P. Chen, S. Chen, P. Xu, Y. Shi, and D. Dai, “Low-loss ultracompact transverse-magnetic-pass polarizer with a silicon subwavelength grating waveguide,” Opt. Lett. 39, 4514–4517 (2014).
[Crossref]

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
[Crossref]

Gupta, P. D.

Halir, R.

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

A. Maese-Novo, R. Halir, S. Romero-García, D. Pérez-Galacho, L. Zavargo-Peche, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, and P. Cheben, “Wavelength independent multimode interference coupler,” Opt. Express 21, 7033–7040 (2013).
[Crossref]

R. Halir, A. Maese-Novo, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, D.-X. Xu, J. H. Schmid, and S. Janz, “Colorless directional coupler with dispersion engineered sub-wavelength structure,” Opt. Express 20, 13470–13477 (2012).
[Crossref]

Hall, T. J.

Han, K.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

He, S.

D. Dai, L. Liu, S. Gao, D. X. Xu, and S. He, “Polarization management for silicon photonic integrated circuits,” Laser Photon. Rev. 7, 303–328 (2013).
[Crossref]

He, Y.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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Hosaka, T.

Jacob, Z.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Jaeger, N. A. F.

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
[Crossref]

Jahani, S.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Janta-Polczynski, A.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Janz, S.

Julian, N.

Kalhor, F.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Ke, X.

Khan, U.

W. Bogaerts, Y. Xing, and U. Khan, “Layout-aware variability analysis, yield prediction, and optimization in photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 25, 6100413 (2019).
[Crossref]

Khater, M.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Khilo, A.

Kim, D.

Kim, K.

Kim, S.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Kim, Y.

Lapointe, J.

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
[Crossref]

P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23, 22553–22563 (2015).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
[Crossref]

Lee, M.

Lefevre, H. C.

Leidy, R.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Li, C.

H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
[Crossref]

C. Li and D. Dai, “Compact polarization beam splitter for silicon photonic integrated circuits with a 340-nm-thick silicon core layer,” Opt. Lett. 42, 4243–4246 (2017).
[Crossref]

Li, J.

Li, X.

Liang, D.

Liu, D.

Liu, F.

Liu, L.

H. Xu, L. Liu, and Y. Shi, “Polarization-insensitive four-channel coarse wavelength-division (de)multiplexer based on Mach-Zehnder interferometers with bent directional couplers and polarization rotators,” Opt. Lett. 43, 1483–1486 (2018).
[Crossref]

B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
[Crossref]

D. Dai, L. Liu, S. Gao, D. X. Xu, and S. He, “Polarization management for silicon photonic integrated circuits,” Laser Photon. Rev. 7, 303–328 (2013).
[Crossref]

Lu, Z.

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
[Crossref]

Luque-González, J. M.

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

Ma, M.

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
[Crossref]

Maese-Novo, A.

Maling, J.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Martel, S.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

Mashanovich, G. Z.

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

Mojahedi, M.

Molina-Fernández, I.

Molina-Fernández, Í.

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
[Crossref]

Monga, J. C.

Moreira, P.

Newman, W. D.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
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S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
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R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
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R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
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R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
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D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
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R. Halir, A. Maese-Novo, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, D.-X. Xu, J. H. Schmid, and S. Janz, “Colorless directional coupler with dispersion engineered sub-wavelength structure,” Opt. Express 20, 13470–13477 (2012).
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S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

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Romero-García, S.

Saber, M.

Samani, A.

Sarangan, A. M.

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R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
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P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
[Crossref]

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
[Crossref]

P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23, 22553–22563 (2015).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
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Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering,” IEEE Photon. J. 7, 7802107 (2015).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
[Crossref]

R. Halir, A. Maese-Novo, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, D.-X. Xu, J. H. Schmid, and S. Janz, “Colorless directional coupler with dispersion engineered sub-wavelength structure,” Opt. Express 20, 13470–13477 (2012).
[Crossref]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
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Sciortino, P.

Shaw, H. J.

Shekhar, P.

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

Shi, Y.

H. Xu, D. Dai, and Y. Shi, “Ultra-broadband and ultra-compact on-chip silicon polarization beam splitter by using hetero-anisotropic metamaterials,” Laser Photon. Rev. 13, 1800349 (2019).
[Crossref]

H. Xu and Y. Shi, “Subwavelength-grating-assisted silicon polarization rotator covering all optical communication bands,” Opt. Express 27, 5588–5597 (2019).
[Crossref]

H. Xu, L. Liu, and Y. Shi, “Polarization-insensitive four-channel coarse wavelength-division (de)multiplexer based on Mach-Zehnder interferometers with bent directional couplers and polarization rotators,” Opt. Lett. 43, 1483–1486 (2018).
[Crossref]

H. Xu and Y. Shi, “Metamaterial-based Maxwell’s fisheye lens for multimode waveguide crossing,” Laser Photon. Rev. 12, 1800094 (2018).
[Crossref]

H. Xu and Y. Shi, “Ultra-sharp multi-mode waveguide bending assisted with metamaterial-based mode converters,” Laser Photon. Rev. 12, 1700240 (2018).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact polarization-independent directional couplers utilizing a subwavelength structure,” Opt. Lett. 42, 5202–5205 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon TE-pass polarizer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 861–864 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact and highly efficient polarization rotator utilizing multi-mode waveguides,” Opt. Lett. 42, 771–774 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-broadband silicon polarization splitter-rotator based on the multi-mode waveguide,” Opt. Express 25, 18485–18491 (2017).
[Crossref]

H. Xu and Y. Shi, “Flat-top CWDM (de)multiplexer based on MZI with bent directional couplers,” IEEE Photon. Technol. Lett. 30, 169–172 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon triplexer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 1265–1268 (2017).
[Crossref]

J. Chen, Y. Zhang, and Y. Shi, “An on-chip triplexer based on silicon Bragg grating-assisted multimode interference couplers,” IEEE Photon. Technol. Lett. 29, 63–65 (2016).
[Crossref]

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
[Crossref]

X. Guan, P. Chen, S. Chen, P. Xu, Y. Shi, and D. Dai, “Low-loss ultracompact transverse-magnetic-pass polarizer with a silicon subwavelength grating waveguide,” Opt. Lett. 39, 4514–4517 (2014).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact and broadband silicon polarization rotator,” in Conference on Lasers and Electro-Optics Pacific Rim (IEEE, 2017), pp. 1–2.

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P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
[Crossref]

Song, L.

H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
[Crossref]

Su, Y.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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Sun, L.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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Taillaert, D.

Tan, Y.

Tang, Y.

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H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
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S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
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Wang, H.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
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P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23, 22553–22563 (2015).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
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Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
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N. Abadía, M. Saber, F. Bello, A. Samani, E. El-Fiky, Y. Wang, J. F. Donegan, and D. V. Plant, “CMOS-compatible multi-band plasmonic TE-pass polarizer,” Opt. Express 26, 30292–30304 (2018).
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Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
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Wangüemert-Pérez, G.

R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
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R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
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Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
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S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
[Crossref]

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H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
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H. Wu, Y. Tan, and D. Dai, “Ultra-broadband high-performance polarizing beam splitter on silicon,” Opt. Express 25, 6069–6075 (2017).
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B. Ni and J. Xiao, “A compact silicon-based TE-pass polarizer using three-guide directional couplers,” IEEE Photon. Technol. Lett. 29, 1631–1634 (2017).
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Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering,” IEEE Photon. J. 7, 7802107 (2015).
[Crossref]

Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
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[Crossref]

P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, M. Vachon, S. Janz, J. Lapointe, Y. Painchaud, and M.-J. Picard, “Broadband polarization independent nanophotonic coupler for silicon waveguides with ultra-high efficiency,” Opt. Express 23, 22553–22563 (2015).
[Crossref]

Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering,” IEEE Photon. J. 7, 7802107 (2015).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
[Crossref]

D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
[Crossref]

Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
[Crossref]

R. Halir, A. Maese-Novo, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, D.-X. Xu, J. H. Schmid, and S. Janz, “Colorless directional coupler with dispersion engineered sub-wavelength structure,” Opt. Express 20, 13470–13477 (2012).
[Crossref]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
[Crossref]

Xu, H.

H. Xu and Y. Shi, “Subwavelength-grating-assisted silicon polarization rotator covering all optical communication bands,” Opt. Express 27, 5588–5597 (2019).
[Crossref]

H. Xu, D. Dai, and Y. Shi, “Ultra-broadband and ultra-compact on-chip silicon polarization beam splitter by using hetero-anisotropic metamaterials,” Laser Photon. Rev. 13, 1800349 (2019).
[Crossref]

H. Xu, L. Liu, and Y. Shi, “Polarization-insensitive four-channel coarse wavelength-division (de)multiplexer based on Mach-Zehnder interferometers with bent directional couplers and polarization rotators,” Opt. Lett. 43, 1483–1486 (2018).
[Crossref]

H. Xu and Y. Shi, “Metamaterial-based Maxwell’s fisheye lens for multimode waveguide crossing,” Laser Photon. Rev. 12, 1800094 (2018).
[Crossref]

H. Xu and Y. Shi, “Ultra-sharp multi-mode waveguide bending assisted with metamaterial-based mode converters,” Laser Photon. Rev. 12, 1700240 (2018).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact polarization-independent directional couplers utilizing a subwavelength structure,” Opt. Lett. 42, 5202–5205 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon TE-pass polarizer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 861–864 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact and highly efficient polarization rotator utilizing multi-mode waveguides,” Opt. Lett. 42, 771–774 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-broadband silicon polarization splitter-rotator based on the multi-mode waveguide,” Opt. Express 25, 18485–18491 (2017).
[Crossref]

H. Xu and Y. Shi, “Flat-top CWDM (de)multiplexer based on MZI with bent directional couplers,” IEEE Photon. Technol. Lett. 30, 169–172 (2017).
[Crossref]

H. Xu and Y. Shi, “On-chip silicon triplexer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 1265–1268 (2017).
[Crossref]

H. Xu and Y. Shi, “Ultra-compact and broadband silicon polarization rotator,” in Conference on Lasers and Electro-Optics Pacific Rim (IEEE, 2017), pp. 1–2.

Xu, P.

X. Guan, P. Chen, S. Chen, P. Xu, Y. Shi, and D. Dai, “Low-loss ultracompact transverse-magnetic-pass polarizer with a silicon subwavelength grating waveguide,” Opt. Lett. 39, 4514–4517 (2014).
[Crossref]

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
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Yang, F.

Ye, W. N.

Y. Xiong, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “High extinction ratio and broadband silicon TE-pass polarizer using subwavelength grating index engineering,” IEEE Photon. J. 7, 7802107 (2015).
[Crossref]

Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
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Yeh, P.

Yin, X.

Yun, H.

Y. Wang, M. Ma, H. Yun, Z. Lu, X. Wang, N. A. F. Jaeger, and L. Chrostowski, “Ultra-compact sub-wavelength grating polarization splitter-rotator for silicon-on-insulator platform,” IEEE Photon. J. 8, 7805709 (2016).
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Zafar, H.

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Zhang, M.

Zhang, T.

Zhang, W.

Zhang, Y.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
[Crossref]

J. Chen, Y. Zhang, and Y. Shi, “An on-chip triplexer based on silicon Bragg grating-assisted multimode interference couplers,” IEEE Photon. Technol. Lett. 29, 63–65 (2016).
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Zhao, Y.

Zhou, Z.

B. Bai, F. Yang, and Z. Zhou, “Demonstration of an on-chip TE-pass polarizer using a silicon hybrid plasmonic grating,” Photon. Res. 7, 289–293 (2019).
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B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
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B. Bai, X. Li, and Z. Zhou, “Fabrication tolerant TE-pass polarizer based on hybrid plasmonic Bragg grating,” in International Conference on Group IV Photonics (IEEE, 2016), pp. 132–133.

Zhu, Q.

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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Zhu, Z.

Adv. Opt. Mater. (1)

H. Wang, Y. Zhang, Y. He, Q. Zhu, L. Sun, and Y. Su, “Compact silicon waveguide mode converter employing dielectric metasurface structure,” Adv. Opt. Mater. 7, 1801191 (2019).
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Appl. Opt. (2)

IEEE J. Sel. Top. Quantum Electron. (1)

W. Bogaerts, Y. Xing, and U. Khan, “Layout-aware variability analysis, yield prediction, and optimization in photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 25, 6100413 (2019).
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IEEE Photon. J. (2)

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J. Chen, Y. Zhang, and Y. Shi, “An on-chip triplexer based on silicon Bragg grating-assisted multimode interference couplers,” IEEE Photon. Technol. Lett. 29, 63–65 (2016).
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B. Ni and J. Xiao, “A compact silicon-based TE-pass polarizer using three-guide directional couplers,” IEEE Photon. Technol. Lett. 29, 1631–1634 (2017).
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H. Xu and Y. Shi, “On-chip silicon TE-pass polarizer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 861–864 (2017).
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B. Bai, L. Liu, R. Chen, and Z. Zhou, “Low loss, compact TM-pass polarizer based on hybrid plasmonic grating,” IEEE Photon. Technol. Lett. 29, 607–610 (2017).
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H. Xu and Y. Shi, “Flat-top CWDM (de)multiplexer based on MZI with bent directional couplers,” IEEE Photon. Technol. Lett. 30, 169–172 (2017).
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H. Xu and Y. Shi, “On-chip silicon triplexer based on asymmetrical directional couplers,” IEEE Photon. Technol. Lett. 29, 1265–1268 (2017).
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Laser Photon. Rev. (9)

H. Xu and Y. Shi, “Ultra-sharp multi-mode waveguide bending assisted with metamaterial-based mode converters,” Laser Photon. Rev. 12, 1700240 (2018).
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H. Wu, C. Li, L. Song, H.-K. Tsang, J. E. Bowers, and D. Dai, “Ultra-sharp multimode waveguide bends with subwavelength gratings,” Laser Photon. Rev. 13, 1800119 (2019).
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H. Xu and Y. Shi, “Metamaterial-based Maxwell’s fisheye lens for multimode waveguide crossing,” Laser Photon. Rev. 12, 1800094 (2018).
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H. Xu, D. Dai, and Y. Shi, “Ultra-broadband and ultra-compact on-chip silicon polarization beam splitter by using hetero-anisotropic metamaterials,” Laser Photon. Rev. 13, 1800349 (2019).
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R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photon. Rev. 9, 25–49 (2015).
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D. Benedikovic, P. Cheben, J. H. Schmid, D.-X. Xu, J. Lapointe, S. Wang, R. Halir, A. Ortega-Moñux, S. Janz, and M. Dado, “High-efficiency single etch step apodized surface grating coupler using subwavelength structure,” Laser Photon. Rev. 8, L93–L97 (2014).
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R. Halir, P. Cheben, J. M. Luque-González, J. D. Sarmiento-Merenguel, J. H. Schmid, G. Wangüemert-Pérez, D.-X. Xu, S. Wang, A. Ortega-Moñux, and Í. Molina-Fernández, “Ultra-broadband nanophotonic beamsplitter using an anisotropic sub-wavelength metamaterial,” Laser Photon. Rev. 10, 1039–1046 (2016).
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D. Dai, L. Liu, S. Gao, D. X. Xu, and S. He, “Polarization management for silicon photonic integrated circuits,” Laser Photon. Rev. 7, 303–328 (2013).
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Light Sci. Appl. (1)

D. Dai, J. Bauters, and J. E. Bowers, “Passive technologies for future large-scale photonic integrated circuits on silicon: polarization handling, light non-reciprocity and loss reduction,” Light Sci. Appl. 1, e1 (2012).
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Nat. Commun. (1)

S. Jahani, S. Kim, J. Atkinson, J. C. Wirth, F. Kalhor, A. A. Noman, W. D. Newman, P. Shekhar, K. Han, V. Van, R. G. DeCorby, L. Chrostowski, M. Qi, and Z. Jacob, “Controlling evanescent waves using silicon photonic all-dielectric metamaterials for dense integration,” Nat. Commun. 9, 1893 (2018).
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Nature (1)

P. Cheben, R. Halir, J. H. Schmid, H. A. Atwater, and D. R. Smith, “Subwavelength integrated photonics,” Nature 560, 565–572 (2018).
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Opt. Express (11)

D. Kim, M. Lee, Y. Kim, and K. Kim, “Ultracompact transverse magnetic mode-pass filter based on one-dimensional photonic crystals with subwavelength structures,” Opt. Express 24, 21560–21565 (2016).
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H. Wu, Y. Tan, and D. Dai, “Ultra-broadband high-performance polarizing beam splitter on silicon,” Opt. Express 25, 6069–6075 (2017).
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H. Xu and Y. Shi, “Ultra-broadband silicon polarization splitter-rotator based on the multi-mode waveguide,” Opt. Express 25, 18485–18491 (2017).
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P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express 18, 20251–20262 (2010).
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D. Dai, Z. Wang, N. Julian, and J. E. Bowers, “Compact broadband polarizer based on shallowly-etched silicon-on-insulator ridge optical waveguides,” Opt. Express 18, 27404–27415 (2010).
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A. Maese-Novo, R. Halir, S. Romero-García, D. Pérez-Galacho, L. Zavargo-Peche, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, and P. Cheben, “Wavelength independent multimode interference coupler,” Opt. Express 21, 7033–7040 (2013).
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N. Abadía, M. Saber, F. Bello, A. Samani, E. El-Fiky, Y. Wang, J. F. Donegan, and D. V. Plant, “CMOS-compatible multi-band plasmonic TE-pass polarizer,” Opt. Express 26, 30292–30304 (2018).
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H. Zafar, P. Moreira, A. M. Taha, B. Paredes, M. S. Dahlem, and A. Khilo, “Compact silicon TE-pass polarizer using adiabatically-bent fully-etched waveguides,” Opt. Express 26, 31850–31860 (2018).
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H. Xu and Y. Shi, “Subwavelength-grating-assisted silicon polarization rotator covering all optical communication bands,” Opt. Express 27, 5588–5597 (2019).
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Opt. Lett. (17)

D. Liu, M. Zhang, and D. Dai, “Low-loss and low-crosstalk silicon triplexer based on cascaded multimode waveguide gratings,” Opt. Lett. 44, 1304–1307 (2019).
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Y. Xiong, G. J. Wangüemert-Pérez, D.-X. Xu, J. H. Schmid, P. Cheben, and W. N. Ye, “Polarization splitter and rotator with subwavelength grating for enhanced fabrication tolerance,” Opt. Lett. 39, 6931–6934 (2014).
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Photon. Res. (1)

Proc. IEEE (1)

R. Halir, A. Ortega-Moñux, D. Benedikovic, G. Z. Mashanovich, G. J. Wangüemert-Pérez, J. H. Schmid, Í. Molina-Fernández, and P. Cheben, “Subwavelength-grating metamaterial structures for silicon photonic devices,” Proc. IEEE 106, 2144–2157 (2018).
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Proc. SPIE (1)

X. Guan, P. Xu, Y. Shi, and D. Dai, “Ultra-compact and ultra-broadband TE-pass polarizer with a silicon hybrid plasmonic waveguide,” Proc. SPIE 8988, 89880U (2014).
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Other (3)

B. Bai, X. Li, and Z. Zhou, “Fabrication tolerant TE-pass polarizer based on hybrid plasmonic Bragg grating,” in International Conference on Group IV Photonics (IEEE, 2016), pp. 132–133.

H. Xu and Y. Shi, “Ultra-compact and broadband silicon polarization rotator,” in Conference on Lasers and Electro-Optics Pacific Rim (IEEE, 2017), pp. 1–2.

T. Barwicz, A. Janta-Polczynski, M. Khater, Y. Thibodeau, R. Leidy, J. Maling, S. Martel, S. Engelmann, J. S. Orcutt, P. Fortier, and W. M. J. Green, “An O-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides,” in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2015), paper Th3F.3.

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Figures (9)

Fig. 1.
Fig. 1. (a) 3D view of the proposed on-chip all-silicon polarizer utilizing the AM with some key parameters labeled. The white dashed line shows the optical axis orientation of the SWG metamaterial. (b) The enlarged top view of the input section with some key parameters labeled; (c) calculated extraordinary (ne) and ordinary (no) effective refractive indices for the SWG metamaterial with varied duty cycle f; (d) working principle for the metamaterial-assisted polarizer. For TE polarization, the SWG effective refractive index is extraordinary (neffTMn=ne), which is much smaller than the silicon refractive index, leading to the confined mode and negligible bending loss, so the incident TE mode will propagate through the sharp bend. For TM polarization, the SWG effective refractive index is ordinary (neffTMn=no), which is close to the silicon refractive index, leading to the leaky mode and strong bending loss, so the incident TM mode will be coupled into the radiation mode.
Fig. 2.
Fig. 2. Calculated transmittance spectra for TE and TM modes with varied maximum SWG duty cycle (fM) and bending radius (R0).
Fig. 3.
Fig. 3. Calculated (a) EL and (b) PER spectra with varied SWG period number (N).
Fig. 4.
Fig. 4. (a) Calculated TE and TM light propagation profiles for the optimized polarizer at three different wavelengths (λ=1.26, 1.55, 1.675 μm). The calculated transmittance spectra for the (b) optimized polarizer with full structure, (c) optimized polarizer with effective medium equivalence, and (d) waveguide bend without SWG cladding.
Fig. 5.
Fig. 5. Calculated transmittance spectra for the metamaterial-assisted polarizer with deviated parameters.
Fig. 6.
Fig. 6. (a) Microscope image of the fabricated devices; (b) SEM image of the fabricated metamaterial-assisted polarizer. The measured transmittance spectra over (c) O-, E-bands and (d) S-, C-, L-, U-bands.
Fig. 7.
Fig. 7. (a) Microscope image of the cascaded polarizers. The measured single polarizer EL spectra over (b) O-, E-bands and (c) S-, C-, L-, U-bands.
Fig. 8.
Fig. 8. Calculated TM mode transmittance spectra with varied SWG period number (N) and minimum SWG duty cycle (fm).
Fig. 9.
Fig. 9. (a) Configuration of the GC with some key parameters labeled; (b) measured EL spectra for the fabricated GCs with different fiber probe tilt angles θfiber.

Tables (2)

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Table 1. Performance Comparison of Several On-Chip Silicon Polarizers

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Table 2. Optimized Parameters of Four Different GCs

Equations (7)

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Ri=R0+wwg/2+Λ·(i1/2),
neff=diag[n,n]=diag[ne,no],
1/ne2=f/nSi2+(1f)/nair2,
no2=f·nSi2+(1f)·nair2,
fi=fM+(fmfM)·(i1)/(N1),
EL=10log10(TTE),
PER=10log10(TTE/TTM),